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FORMATION OF THREE-DIMENSIONAL SHAPES IN SEMICONDUCTOR SURFACES FOR FUNCTIONAL DEVICES THROUGH PHOTOCHEMICAL REACTION WITH ELECTROPHILIC FLUORINATION AGENTS

Research Project

Project/Area Number 26289017
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Production engineering/Processing studies
Research InstitutionOsaka University

Principal Investigator

MORITA Mizuho  大阪大学, 工学(系)研究科(研究院), 教授 (50157905)

Co-Investigator(Kenkyū-buntansha) 川合 健太郎  大阪大学, 工学(系)研究科(研究院), 助教 (90514464)
Co-Investigator(Renkei-kenkyūsha) ADACHI Kenji  大阪大学, 大学院工学研究科, 招へい教授 (60521739)
Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥16,510,000 (Direct Cost: ¥12,700,000、Indirect Cost: ¥3,810,000)
Fiscal Year 2016: ¥5,070,000 (Direct Cost: ¥3,900,000、Indirect Cost: ¥1,170,000)
Fiscal Year 2015: ¥5,330,000 (Direct Cost: ¥4,100,000、Indirect Cost: ¥1,230,000)
Fiscal Year 2014: ¥6,110,000 (Direct Cost: ¥4,700,000、Indirect Cost: ¥1,410,000)
Keywords半導体表面 / フッ素化剤 / 三次元形状 / 光エッチング / ナノマイクロ加工
Outline of Final Research Achievements

Convex spherical shapes have been formed in silicon surfaces by photoetching with N-fluoropyridinium salts using a system with a projector and reduction optics. Silicon optical-waveguides with a vertical-bend structure have been fabricated using photoetching with the system and the vertical transmission of light passed through a horizontal waveguide with the bend structure has been demonstrated. A multiple beam interference system has been developed and silicon surface textures with a grid-like pattern have been formed by photoetching with the three beams interference system.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Annual Research Report
  • 2014 Annual Research Report

Research Products

(8 results)

All 2017 2016 2015 2014

All Journal Article (2 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 2 results,  Acknowledgement Compliant: 2 results) Presentation (4 results) (of which Invited: 1 results) Patent(Industrial Property Rights) (2 results) (of which Overseas: 1 results)

  • [Journal Article] Photoetching method that provides improved silicon-on-insulator layer thickness uniformity in a defined area2017

    • Author(s)
      Yuki Miyata, Yasunori Nakamukai, Cassia Tiemi Azevedo, Miho Morita, Junichi Uchikoshi, Kentaro Kawai, Kenta Arima, Mizuho Morita
    • Journal Title

      Microelectronic Engineering

      Volume: 印刷中

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Effect of metal particles on the Si etching rate with N-fluoropyridinium salts2016

    • Author(s)
      Masaki Otani, Kentaro Kawai, Kentaro Tsukamoto, Takabumi Nagai, Kenji Adachi, Junichi Uchikoshi, Kenta Arima, and Mizuho Morita
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 55 Issue: 10 Pages: 108003-108003

    • DOI

      10.7567/jjap.55.108003

    • ISSN
      0021-4922, 1347-4065
    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] N-フルオロピリジニウム塩を用いた光エッチングによるSi表面ランダムダブルテクスチャ形成2016

    • Author(s)
      熊田 竜也、川合 健太郎、永井 隆文、足達 健二、有馬 健太、森田 瑞穂
    • Organizer
      応用物理学会
    • Place of Presentation
      東京工業大学 大岡山キャンパス(東京都目黒区)
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] Texturing Low Reflecting Surface of Random Double Inverted Pyramids Using N-fluoropyridinium Salt2014

    • Author(s)
      Tatsuya Kumada, Kentaro Kawai, Toshinori Hirano, Masaki Otani, Takabumi Nagai, Kenji Adachi, Kenta Arima, and Mizuho Morita
    • Organizer
      40th IEEE PHOTOVOLTAIC SPECIALISTS CONFERENCE
    • Place of Presentation
      Denver(USA)
    • Year and Date
      2014-06-11
    • Related Report
      2014 Annual Research Report
  • [Presentation] Mask-less formation of anti-reflecting inverted-pyramids to single-crystal Si solar cell by N-fluoropyridinium salts2014

    • Author(s)
      Kentaro Kawai, Tatsuya Kumada, Takabumi Nagai, Kenji Adachi, Kenta Arima and Mizuho Morita
    • Organizer
      EMN Summer Meeting
    • Place of Presentation
      Cancun(Mexico)
    • Year and Date
      2014-06-10
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Development of Silicon Photo-Etching with N-Fluoropyridinium Salts2014

    • Author(s)
      Kenji Adachi, Takabumi Nagai, Junichi Uchikoshi, Masaki Otani, Toshinori Hirano, Kentaro Kawai, Mizuho Morita
    • Organizer
      INTERNATIONAL CONFERENCE ON FLUORINE CHEMISTRY
    • Place of Presentation
      Pacifico Yokohama(Kanagawa・Yokohama)
    • Year and Date
      2014-05-29
    • Related Report
      2014 Annual Research Report
  • [Patent(Industrial Property Rights)] エッチング処理用組成物及びエッチング処理方法2016

    • Inventor(s)
      川合 健太郎、森田 瑞穂、足達 健二、永井 隆文
    • Industrial Property Rights Holder
      ダイキン工業株式会社、国立大学法人大阪大学
    • Industrial Property Rights Type
      特許
    • Filing Date
      2016-03-04
    • Related Report
      2015 Annual Research Report
    • Overseas
  • [Patent(Industrial Property Rights)] エッチング処理用組成物及びエッチング処理方法2015

    • Inventor(s)
      足達 健二、永井 隆文、森田 瑞穂、川合 健太郎
    • Industrial Property Rights Holder
      ダイキン工業株式会社、国立大学法人大阪大学
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2015-043031
    • Filing Date
      2015-03-04
    • Related Report
      2014 Annual Research Report

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Published: 2014-04-04   Modified: 2018-03-22  

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