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Development of process performance for diamond wafers and cutting / grinding tools by ultraviolet irradiation polishing

Research Project

Project/Area Number 26289020
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Production engineering/Processing studies
Research InstitutionKumamoto University

Principal Investigator

TOUGE Mutsumi  熊本大学, 先進マグネシウム国際研究センター, 教授 (00107731)

Co-Investigator(Kenkyū-buntansha) 横井 裕之  熊本大学, 自然科学研究科, 准教授 (50358305)
久保田 章亀  熊本大学, 自然科学研究科, 准教授 (80404325)
Research Collaborator IWAMOTO Chihiro  茨城大学, 工学部, 教授 (60311635)
Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥16,770,000 (Direct Cost: ¥12,900,000、Indirect Cost: ¥3,870,000)
Fiscal Year 2016: ¥2,860,000 (Direct Cost: ¥2,200,000、Indirect Cost: ¥660,000)
Fiscal Year 2015: ¥5,200,000 (Direct Cost: ¥4,000,000、Indirect Cost: ¥1,200,000)
Fiscal Year 2014: ¥8,710,000 (Direct Cost: ¥6,700,000、Indirect Cost: ¥2,010,000)
Keywordsダイヤモンド / ダイシングブレード / PCD製切削工具 / 鋭利化 / 精密ツルーイング / 作用砥粒数 / 鏡面研削 / 高能率研削加工 / 紫外光励起研磨 / ダイヤモンドウェハ / ダイヤモンド製切削工具 / PCD / ダイヤモンド砥石 / 超硬 / 超精密研磨 / 工具刃先鋭利化 / 精密研削 / ダイヤモンド基板 / 鏡面研磨 / 刃先鋭利化 / 研磨機構(メカニズム) / 切削工具 / 研削砥石
Outline of Final Research Achievements

As experimental results, the polishing mechanism of the diamond substrate was almost elucidated. For the PCD dicing blade, a blade with a thickness of 50 micrometer was perfectly developed, and the chipping-free dicing of SiC substrate was succeeded. In the PCD cutting tool, the tool flank was mirror finished by the UV-polishing and at the same time, the cutting edge was ultra-sharpened. It was confirmed that the finished surface roughness by the sharpened tool was clearly improved. The electrodeposited diamond grinding wheels with small diameter were precisely trued by the UV-polishing. The improvement of the finished surface roughness on the cemented carbide grinding surface and the grinding performance with apparent longer wheel life were confirmed owing to huge increase in the number of precisely working abrasive grains.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • Research Products

    (17 results)

All 2017 2016 2015 2014

All Journal Article (8 results) (of which Peer Reviewed: 8 results,  Open Access: 8 results,  Acknowledgement Compliant: 3 results) Presentation (8 results) (of which Int'l Joint Research: 1 results) Funded Workshop (1 results)

  • [Journal Article] 紫外線照射研磨によるPCD製切削工具の高度化と切削性能2017

    • Author(s)
      和泉康夫,後藤健太,坂本武司,久保田章亀,峠  睦
    • Journal Title

      砥粒加工学会誌

      Volume: 61 Pages: 210-215

    • NAID

      130005679549

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] UVツルーイングした電着ダイヤモンド砥石の研削性能の向上2017

    • Author(s)
      柴元翔太郎,坂本武司,久保田章亀,峠  睦
    • Journal Title

      砥粒加工学会誌

      Volume: 61 Pages: 204-209

    • NAID

      130005679550

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] 石英ツルーイングした小径軸付CBN砥石の研削性能2017

    • Author(s)
      宮本竜成,峠 直樹,坂本武司,久保田章亀,峠  睦
    • Journal Title

      砥粒加工学会誌

      Volume: 61

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] SiC半導体基板用PCDダイシングブレードの開発2016

    • Author(s)
      和泉康夫,藤田 隆,南 久,渡邉純二,峠  睦
    • Journal Title

      砥粒加工学会誌

      Volume: 60 Pages: 597-602

    • NAID

      130005679509

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Abrasive-Free Polishing of Single-Crystal 4H-SiC with Silica Glass Plates2015

    • Author(s)
      Akihisa Kubota, Yuta Hatasako, Takahiro Takita and Mutsumi Touge
    • Journal Title

      ECS Journal of Solid State Science and Technology

      Volume: 4 Pages: 468-475

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Two-step polishing technique for single crystal diamond (100) substrate utilizing a chemical reaction with iron plate2015

    • Author(s)
      Akihisa Kubota, Shin Nagae, Shuya Motoyama and Mutsumi Touge
    • Journal Title

      Diamond & Related Materials

      Volume: 60 Pages: 75-80

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] デバイス用ダイヤモンドウェハのUVアシスト研磨に関する研究2014

    • Author(s)
      田川智彦,峠  睦,坂本武司,鹿田真一,山田英明,加藤有香子
    • Journal Title

      精密工学会誌

      Volume: 80 Pages: 587-591

    • NAID

      130004745482

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] 4インチSiC基板のUVアシスト研磨に関する研究2014

    • Author(s)
      坂本武司,稲木 匠,小田和明,峠  睦,藤田 隆
    • Journal Title

      砥粒加工学会誌

      Volume: 58 Pages: 235-240

    • NAID

      130004835707

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Open Access
  • [Presentation] Development of Ductile mode grooving with PCD(Poly-Crystalline Diamond) Blade2016

    • Author(s)
      Y. Izumi, M. Touge
    • Organizer
      16th International Conference on Precision Engineering (ICPE2016)
    • Place of Presentation
      浜松市
    • Year and Date
      2016-11-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] Cutting Performance of PCD Tools Improved by Ultraviolet-ray Irradiation Polishing2016

    • Author(s)
      K. Goto, Y. Izumi, T. Sakamoto, A. Kubota, M. Touge
    • Organizer
      International Committee for Abrasive Technology,ISAAT 2016
    • Place of Presentation
      Stockholm, Sweden
    • Year and Date
      2016-10-02
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 紫外線照射研磨を用いたPCD製工具の切削性能の改善2016

    • Author(s)
      後藤健太,和泉康夫,坂本武司,久保田章亀,峠 睦
    • Organizer
      2016年度砥粒加工学会学術講演会
    • Place of Presentation
      兵庫県立大学
    • Year and Date
      2016-08-31
    • Related Report
      2016 Annual Research Report
  • [Presentation] 石英ツルーイングしたCBN軸付砥石の研削性能評価とツルーイングメカニズムの解明2016

    • Author(s)
      宮本竜成,峠 直樹,坂本武司,久保田章亀,峠 睦
    • Organizer
      2016年度砥粒加工学会学術講演会
    • Place of Presentation
      兵庫県立大学
    • Year and Date
      2016-08-31
    • Related Report
      2016 Annual Research Report
  • [Presentation] UVツルーイングによるダイヤモンド砥石の研削性能の向上と寿命評価2016

    • Author(s)
      柴元翔太郎,坂本武司,久保田章亀,峠 睦
    • Organizer
      2016年度砥粒加工学会学術講演会
    • Place of Presentation
      兵庫県立大学
    • Year and Date
      2016-08-31
    • Related Report
      2016 Annual Research Report
  • [Presentation] 石英を用いたCBN砥石の精密ツルーイングと研削性能2015

    • Author(s)
      藤林太郎,坂本武司,峠 直樹,峠  睦
    • Organizer
      2015年度砥粒加工学会学術講演会
    • Place of Presentation
      慶應義塾大学
    • Year and Date
      2015-09-11
    • Related Report
      2015 Annual Research Report
  • [Presentation] 紫外線照射研磨によるダイヤモンドホイール研削性能の高度化2014

    • Author(s)
      峠  睦,坂本武司,久保田章亀,川下智幸,峠 直樹
    • Organizer
      砥粒加工学会
    • Place of Presentation
      岩手大学工学部
    • Year and Date
      2014-09-11 – 2014-09-13
    • Related Report
      2014 Annual Research Report
  • [Presentation] 超砥粒軸付砥石の UV ツルーイングに関する研究2014

    • Author(s)
      坂本武司,三角真彦,久保田章亀,峠  睦
    • Organizer
      砥粒加工学会
    • Place of Presentation
      岩手大学工学部
    • Year and Date
      2014-09-11 – 2014-09-13
    • Related Report
      2014 Annual Research Report
  • [Funded Workshop] International Committee for Abrasive Technology2016

    • Place of Presentation
      Stockholm, Sweden
    • Year and Date
      2016-10-02
    • Related Report
      2016 Annual Research Report

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Published: 2014-04-04   Modified: 2018-03-22  

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