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Ultraprecision cutting of single-crystal silicon using electrically conductive nano-crystal diamond tools under electromagnetic fields

Research Project

Project/Area Number 26289021
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Production engineering/Processing studies
Research InstitutionKeio University

Principal Investigator

YAN JIWANG  慶應義塾大学, 理工学部, 教授 (40323042)

Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥17,160,000 (Direct Cost: ¥13,200,000、Indirect Cost: ¥3,960,000)
Fiscal Year 2016: ¥2,080,000 (Direct Cost: ¥1,600,000、Indirect Cost: ¥480,000)
Fiscal Year 2015: ¥2,340,000 (Direct Cost: ¥1,800,000、Indirect Cost: ¥540,000)
Fiscal Year 2014: ¥12,740,000 (Direct Cost: ¥9,800,000、Indirect Cost: ¥2,940,000)
Keywords超精密加工 / 切削 / ダイヤモンド工具 / 摩耗 / 電磁場 / 光照射 / 超精密切削 / 単結晶シリコン / 硬脆材料 / 光電効果 / シリコン
Outline of Final Research Achievements

Single-crystal silicon is required as the substrates for complex-shaped infrared lenses which are used widely in car night-vision systems, security systems, and thermography systems. However, when cutting silicon using a single-crystal diamond tool, the tool wear is extremely severe, which causes the degradation of form accuracy and the increase in production cost. In this research, an electrically conductive diamond tool was used to cut silicon under electrical voltage and light irradiation in electromagnetic fields. By inducing a small electrical current between the tool and the workpiece, the back-bond electron flow from diamond was suppressed, and the life of the diamond tool was extended.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • Research Products

    (20 results)

All 2017 2016 2015 2014

All Journal Article (8 results) (of which Int'l Joint Research: 2 results,  Peer Reviewed: 5 results,  Acknowledgement Compliant: 1 results) Presentation (12 results) (of which Int'l Joint Research: 4 results,  Invited: 8 results)

  • [Journal Article] Ultraprecision surface flattening of porous silicon by diamond turning2017

    • Author(s)
      M. Heidari, J. Yan
    • Journal Title

      Precision Engineering

      Volume: 49 Pages: 262-277

    • DOI

      10.1016/j.precisioneng.2017.02.015

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] Ductile machining of single-crystal silicon for microlens arrays by ultraprecision diamond turning using a slow tool servo2017

    • Author(s)
      M. Mukaida, J. Yan
    • Journal Title

      International Journal of Machine Tools and Manufacture

      Volume: 115 Pages: 2-14

    • DOI

      10.1016/j.ijmachtools.2016.11.004

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research
  • [Journal Article] 光学結晶材料の超精密切削加工および表面品位計測2015

    • Author(s)
      閻 紀旺
    • Journal Title

      光技術コンタクト

      Volume: 53 Pages: 27-35

    • Related Report
      2015 Annual Research Report
  • [Journal Article] Sintered diamond as a hybrid EDM and grinding tool for the micromachining of single-crystal SiC2015

    • Author(s)
      J. Yan, T. H. Tan
    • Journal Title

      CIRP Annals - Manufacturing Technology

      Volume: 64 Issue: 1 Pages: 221-224

    • DOI

      10.1016/j.cirp.2015.04.069

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 超硬合金および反応焼結SiC の延性モード切削2015

    • Author(s)
      閻 紀旺
    • Journal Title

      砥粒加工学会誌

      Volume: 59 Pages: 6-9

    • Related Report
      2015 Annual Research Report
  • [Journal Article] New insights into phase transformations in single crystal silicon by controlled cyclic nanoindentation2015

    • Author(s)
      H. Huang and J. Yan
    • Journal Title

      Scripta Materialia

      Volume: 102 Pages: 35-38

    • DOI

      10.1016/j.scriptamat.2015.02.008

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] 単結晶シリコンの超精密切削における元素ドーピングの影響2014

    • Author(s)
      楠 雄策,閻 紀旺
    • Journal Title

      砥粒加工学会誌

      Volume: 58 Pages: 699-704

    • NAID

      130004835696

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed
  • [Journal Article] 半導体および光学結晶の超精密切削加工技術2014

    • Author(s)
      閻 紀旺
    • Journal Title

      機械技術

      Volume: 62 Pages: 31-35

    • Related Report
      2014 Annual Research Report
  • [Presentation] Ultraprecision surface flattening of porous single-crystal silicon by diamond turning2016

    • Author(s)
      M. Heidari, J. Yan
    • Organizer
      International Symposium on Micro-Nano Science and Technology 2016
    • Place of Presentation
      東京大学本郷キャンパス(東京都・文京区)
    • Year and Date
      2016-12-16
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] State-of-the-art technologies for fabricating free-form microstructures2016

    • Author(s)
      J. Yan
    • Organizer
      International Symposium on Micro-Nano Science and Technology 2016
    • Place of Presentation
      東京大学本郷キャンパス(東京都・文京区)
    • Year and Date
      2016-12-16
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 単結晶シリコンの超精密切削による赤外線マイクロレンズアレイの加工2016

    • Author(s)
      向田茉央,奥内拓海,閻 紀旺
    • Organizer
      第17回国際工作機械技術者会議
    • Place of Presentation
      東京ビッグサイト(東京都・江東区)
    • Year and Date
      2016-11-20
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 単結晶シリコンのスローツールサーボ旋削によるマイクロレンズアレイ加工2016

    • Author(s)
      向田茉央,閻 紀旺
    • Organizer
      日本機械学会第11回生産加工・工作機械部門講演会
    • Place of Presentation
      名古屋大学(愛知県・名古屋市)
    • Year and Date
      2016-10-22
    • Related Report
      2016 Annual Research Report
  • [Presentation] 硬脆材料の微細加工技術の構築2016

    • Author(s)
      閻 紀旺
    • Organizer
      2016年度第2回(第63回)最新加工技術に関する研究会
    • Place of Presentation
      金沢工業大学(石川県・白山市)
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] 光学分野における難削材の精密ナノ加工2016

    • Author(s)
      閻 紀旺
    • Organizer
      砥粒加工学会平成28年度オープンセミナー
    • Place of Presentation
      金沢工業大学東京虎ノ門キャンパス(東京都・港区)
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] 硬脆材料の超精密切削における工具摩耗とその抑制技術2016

    • Author(s)
      閻 紀旺
    • Organizer
      精密工学会切削専門委員会
    • Place of Presentation
      東京電機大学(東京都・足立区)
    • Related Report
      2016 Annual Research Report
    • Invited
  • [Presentation] Ductile machining of hard brittle materials- applications and challenges2015

    • Author(s)
      J. Yan
    • Organizer
      The 2nd International Forum on Modern Optics Manufacturing Engineering and Science
    • Place of Presentation
      Shenzhen (China)
    • Year and Date
      2015-09-01
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] 硬脆材料の超精密切削における主な問題点とその対策2015

    • Author(s)
      閻 紀旺
    • Organizer
      砥粒加工学会CBN&ダイヤモンド先進加工研究専門委員会第10回研究講演会
    • Place of Presentation
      埼玉大学東京ステーションカレッジ(東京都千代田区)
    • Year and Date
      2015-03-26
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 高硬度・高脆性材料の超精密切削加工の基本と応用2014

    • Author(s)
      閻 紀旺
    • Organizer
      精密工学会関西支部講習会-生産技術特別セミナー
    • Place of Presentation
      大阪市立大学文化交流センター(大阪府大阪市)
    • Year and Date
      2014-12-10
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 半導体・光学結晶の超精密切削加工2014

    • Author(s)
      閻 紀旺
    • Organizer
      ニューダイヤモンドフォーラム平成26年度第2回研究会
    • Place of Presentation
      東京工業大学(東京都目黒区)
    • Year and Date
      2014-10-03
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] 単結晶シリコンの超精密切削における元素ドーピングの影響2014

    • Author(s)
      楠 雄策,閻 紀旺
    • Organizer
      2014年度砥粒加工学会学術講演会(ABTEC2014)
    • Place of Presentation
      岩手大学(岩手県盛岡市)
    • Year and Date
      2014-09-11
    • Related Report
      2014 Annual Research Report

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Published: 2014-04-04   Modified: 2018-03-22  

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