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Compact superconducting magnetic energy storage device fabricated using process technologies of microelectromechanical systems

Research Project

Project/Area Number 26289074
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Power engineering/Power conversion/Electric machinery
Research InstitutionNagoya University

Principal Investigator

Motohiro Tomoyoshi  名古屋大学, 未来社会創造機構, 教授 (20394421)

Co-Investigator(Kenkyū-buntansha) 杉本 憲昭  株式会社豊田中央研究所, 環境・エネルギー1部, 研究員 (60394714)
Co-Investigator(Renkei-kenkyūsha) Kajino Tsutomu  ㈱豊田中央研究所, 研究推進部, 部長 (10394636)
Takeda Yasuhiko  ㈱豊田中央研究所, 環境・エネルギー2部・エネルギー変換材料研究室, 室長 (10394660)
Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥17,160,000 (Direct Cost: ¥13,200,000、Indirect Cost: ¥3,960,000)
Fiscal Year 2016: ¥780,000 (Direct Cost: ¥600,000、Indirect Cost: ¥180,000)
Fiscal Year 2015: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2014: ¥15,210,000 (Direct Cost: ¥11,700,000、Indirect Cost: ¥3,510,000)
Keywords超電導磁気エネルギー貯蔵(SMES) / MEMS / 螺旋コイル / 超電導薄膜・ / シリコンウェハ / 銅めっき / 極低温冷凍機 / 化学機械研磨(CMP) / 蓄電 / コイル / 超電導 / シリコン / 磁気エネルギー / 電気エネルギー / 極低温 / 電気エネルギー工学 / 超電導磁気エネルギー貯蔵 / 電気エネルギー貯蔵 / 超伝導 / 薄膜 / SMES / 電力機器 / Li二次電池
Outline of Final Research Achievements

A novel concept was proposed to scale down gigantic conventional systems for superconducting magnetic energy storage (SMES) into stacks of Si wafers with engraved spiral coils of superconducting thin films. The concept also suited to mass production of SMES. The concept was backed up by pilot estimations for energy storage capacity and mechanical strength to endure electromagnetic stress. The estimated storable energy density was comparable to that of rechargeable batteries and the mechanical strength of Si wafer endures the estimated electromagnetic stress imposed on it. These results support the feasibility of the concept. The experimental proof of concept was successfully performed through several repeated test fabrications. In one of these, the theoretically estimated value of the energy storage was reproduced in a spiral superconducting NbN coil in a spiral trench formed on a 4-inch Si wafer. The results shall open up doors for wider array of applications of SMES.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • Research Products

    (9 results)

All 2017 2016 2015 Other

All Journal Article (1 results) (of which Peer Reviewed: 1 results,  Open Access: 1 results,  Acknowledgement Compliant: 1 results) Presentation (5 results) (of which Int'l Joint Research: 5 results,  Invited: 1 results) Remarks (1 results) Patent(Industrial Property Rights) (2 results)

  • [Journal Article] Compact SMES with a superconducting film in a spiral groove on a Si wafer formed by MEMS technology with possible high-energy storage volume density comparable to that of rechargeable batteries2017

    • Author(s)
      N. Sugimoto, N. Iguchi, Y. Kusano, T. Fukano, T. Hioki, A. Ichiki, T. Bessho, T, Motohiro
    • Journal Title

      Superconductor Science and Technology

      Volume: 30 Issue: 1 Pages: 015014-015014

    • DOI

      10.1088/0953-2048/30/1/015014

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Presentation] Fabrication of a Traversable Thick NbN Film Superconducting Coil of 42m in Length in a Spiral Three-Storied Trench Engraved in a Si Wafer of 76.2 mm in Diameter Formed by MEMS Technology for a Compact Electric Power Storage as a Magnetic Field with High Energy Storage Volume Density2017

    • Author(s)
      T. Motohiro
    • Organizer
      The 1st Seminar on JSPS Core-to-Core Program ( B. Asia-Africa Sxience Platforms) "Establishment of Reaearch Hub for Compact Mobility in the ASEAN Region"
    • Place of Presentation
      Hanoi University of Science and Technology
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Stress control of NbN film on the Si wafer for SMES2017

    • Author(s)
      Yushi Ichiki, Yasuhiro Suzuki, Nobuhiro Iguchi, Tatsumi Hioki, Akihisa Ichiki and Tomoyoshi Motohiro
    • Organizer
      The 1st Seminar on JSPS Core-to-Core Program ( B. Asia-Africa Sxience Platforms) "Establishment of Reaearch Hub for Compact Mobility in the ASEAN Region"
    • Place of Presentation
      Hanoi University of Science and Technology
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Compact SMES with a Superconducting Film in a Spiral Trench on a Si-Wafer Formed by MEMS Technology with Possible High Energy Storage Volume-Density Comparable to Those of Rechargeable Batteries2016

    • Author(s)
      N. Iguchi, Y. Suzuki, K. Adachi, T. Hioki, A. Ichiki, T. Motohiro, N. Sugimoto, C.-H Hsu, R. Sato, S. Kumagai, M. Sasaki, J.-H. Noh, Y. Sakurahara, K. Okabe,O. Takai, H. Honma, H. Watanabe, H.Sakoda, H. Sasagawa, H. Doy, S. Zhou,T. Nozaki, H. Hori, S. Nishikawa
    • Organizer
      1st Asian Int’l Cryogenic Mater. Conf.-50th Anniversary Conf. of Cryogenics and Superconductivity Soc. Jpn
    • Place of Presentation
      Kanazawa-Kagekiza, Kanazawa, Japan
    • Year and Date
      2016-11-07
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Compact SMES with a Superconducting Film in a Spiral Groove on a Si-Wafer Formed by MEMS Technol.with Possible Energy Storage Volume-Density Surpassing that of Li-Ion Batteries (I)2015

    • Author(s)
      N. Sugimoto, N. Iguchi, Y. Kusano, T. Fukano, T. Hioki, A. Ichiki, T. Bessho, T. Motohiro
    • Organizer
      The 28th International Symposium on Superconductivity
    • Place of Presentation
      Tower Hall Funabori, Funabori, Tokyo
    • Year and Date
      2015-11-16
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Compact SMES with a Superconducting Film in a Spiral Groove on a Si-Wafer Formed by MEMS Technol.with Possible Energy Storage Volume-Density Surpassing that of Li-Ion Batteries (II)2015

    • Author(s)
      N. Iguchi, N. Sugimoto, Y. Kusano, T. Fukano, T. Hioki, A. Ichiki, T. Bessho, T.Motohiro
    • Organizer
      The 28th International Symposium on Superconductivity
    • Place of Presentation
      Tower Hall Funabori, Funabori, Tokyo
    • Year and Date
      2015-11-16
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Remarks] 研究室図鑑・元廣研究室、太陽光でレーザー発振、レーザー光からのエネルギー創生・貯蔵

    • URL

      http://cd.engg.nagoya-u.ac.jp/dict/2015/01/post-102.html

    • Related Report
      2016 Annual Research Report
  • [Patent(Industrial Property Rights)] 超伝導コイル2017

    • Inventor(s)
      元廣友美、別所毅、杉本憲昭
    • Industrial Property Rights Holder
      元廣友美、別所毅、杉本憲昭
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2017-073869
    • Filing Date
      2017-04-03
    • Related Report
      2016 Annual Research Report
  • [Patent(Industrial Property Rights)] 超電導エネルギー貯蔵装置2015

    • Inventor(s)
      杉本憲昭、深野達雄、元廣友美
    • Industrial Property Rights Holder
      ㈱豊田中央研究所
    • Industrial Property Rights Type
      特許
    • Industrial Property Number
      2015-198866
    • Filing Date
      2015-10-06
    • Related Report
      2015 Annual Research Report

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Published: 2014-04-04   Modified: 2018-12-17  

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