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Control of electronic structure by anisotropic strain in semiconducting silicide

Research Project

Project/Area Number 26289093
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Electronic materials/Electric materials
Research InstitutionKyushu Institute of Technology

Principal Investigator

TERAI Yoshikazu  九州工業大学, 大学院情報工学研究院, 教授 (90360049)

Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥16,250,000 (Direct Cost: ¥12,500,000、Indirect Cost: ¥3,750,000)
Fiscal Year 2016: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Fiscal Year 2015: ¥5,720,000 (Direct Cost: ¥4,400,000、Indirect Cost: ¥1,320,000)
Fiscal Year 2014: ¥7,540,000 (Direct Cost: ¥5,800,000、Indirect Cost: ¥1,740,000)
Keywordsシリサイド半導体 / 鉄シリサイド / バンド構造制御 / ひずみ導入 / バンド構造変化 / 半導体物性 / 光物性
Outline of Final Research Achievements

The purpose of this study is to control the band structure of semiconducting iron silicide by introducing anisotropic strain. The evaluation technology of strain, the strain relaxation mechanism, the epitaxial growth of iron silicide on strain relaxed SiGe, and photoluminescence(PL) lifetime were investigated. evaluated. As a result, a strain evaluation technique by polarized Raman spectroscopy was established. The strain relaxation due to Si defects was confirmed. The epitaxial growth of iron silicide on strain relaxed SiGe was succeeded for the first time. In the investigation of photoluminescence lifetime, the intrinsic PL lifetime due to the band-to-band transition of iron silicide was obtained.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • Research Products

    (56 results)

All 2017 2016 2015 2014 Other

All Int'l Joint Research (1 results) Journal Article (9 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 9 results,  Acknowledgement Compliant: 8 results) Presentation (45 results) (of which Int'l Joint Research: 10 results,  Invited: 3 results) Book (1 results)

  • [Int'l Joint Research] Institute of Automation and/Control Processes/FEB RAS(ロシア連邦)

    • Related Report
      2016 Annual Research Report
  • [Journal Article] A room-temperature-operated Si LED with β-FeSi2 nanocrystals in the active layer: μW emission power at 1.5 μm2017

    • Author(s)
      A. V. Shevlyagin, D. L. Goroshko, E. A. Chusovitin, S. A. Balagan, S. A. Dotcenko, K. N. Galkin, N. G. Galkin, T. S. Shamirzaev, A. K. Gutakovskii, A. V. Latyshev, M. Iinuma, and Y. Terai
    • Journal Title

      Journal of Applied Physics

      Volume: 121 Issue: 11

    • DOI

      10.1063/1.4978372

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Dependence of direct transition energy on growth temperature in β-FeSi2 epitaxial films2017

    • Author(s)
      Motoki Iinuma, Hiroaki Tsukamoto, Naoki Murakoso, Haruki Yamaguchi and Yoshikazu Terai
    • Journal Title

      Japanese Journal of Applied Physics : Conference Proceedings

      Volume: 5 Pages: 011106-011106

    • DOI

      10.7567/jjapcp.5.011106

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Structural and electrical properties of β-FeSi2 polycrystalline films with low electron density2017

    • Author(s)
      Yoshikazu Terai, Takahiko Higashi, Tetsu Hattori, Kazuya Ogi, and Shuya Ikeda
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 5S1 Pages: 05DD03-05DD03

    • DOI

      10.7567/jjap.56.05dd03

    • NAID

      210000147768

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Growth of p-type β-FeSi2 polycrystalline films by RF magnetron sputtering2017

    • Author(s)
      Shuya Ikeda, Kazuya Ogi, Tetsu Hattori, Takahiko Higashi, and Yoshikazu Terai
    • Journal Title

      Japanese Journal of Applied Physics : Conference Proceedings

      Volume: 5 Pages: 011204-011204

    • DOI

      10.7567/jjapcp.5.011204

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Polarized Raman spectra of BaSi2 epitaxial film grown by molecular beam epitaxy2017

    • Author(s)
      Yoshikazu Terai, Haruki Yamaguchi, Hiroaki Tsukamoto, Naoki Murakoso, Motoki Iinuma, and Takashi Suemasu
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 56 Issue: 5S1 Pages: 05DD02-05DD02

    • DOI

      10.7567/jjap.56.05dd02

    • NAID

      210000147767

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Ion Channeling Measurements of β-FeSi2 Films Epitaxially Grown on Si(111) and Their Analysis by Multiple Scattering Theory2017

    • Author(s)
      Masaya Fuchi, Mikihiro Arima, Kazumasa Narumi, Yoshikazu Terai, Yoshihito Maeda
    • Journal Title

      Japanese Journal of Applied Physics : Conference Proceedings

      Volume: 印刷中 Pages: 011104-011104

    • DOI

      10.7567/jjapcp.5.011104

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Time-resolved photoluminescence properties of ion-beam-synthesized β-FeSi2 and Si-implanted Si2015

    • Author(s)
      Yoshikazu TERAI and Yoshihito MAEDA
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 54 Issue: 7S2 Pages: 07JB05-07JB05

    • DOI

      10.7567/jjap.54.07jb05

    • Related Report
      2015 Annual Research Report 2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Effects of lattice deformations on Raman spectra in β-FeSi2 epitaxial films2015

    • Author(s)
      Yoshikazu Terai, Haruki Yamaguchi, Hiroaki Tsukamoto, Tetsu Hattori, and Takahiko Higashi
    • Journal Title

      Japanese Journal of Applied Physics

      Volume: 3

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Effects of lattice deformations on Raman spectra in β-FeSi2 epitaxial films2015

    • Author(s)
      Yoshikazu Terai, Haruki Yamaguchi, Hiroaki Tsukamoto, Tetsu Hattori, and Takahiko Higashi
    • Journal Title

      Japanese Journal of Applied Physics : Conference Proceedings

      Volume: 印刷中

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] Sbドーピングによるβ-FeSi2エピタキシャル膜の電子密度制御2017

    • Author(s)
      飯沼元輝,江口 元,村社尚紀,星田裕文,寺井慶和
    • Organizer
      2017年 第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] Si/β-FeSi2/Si 多結晶積層構造における1.5 μm発光の寿命評価2017

    • Author(s)
      池田 修哉,瀬戸島 健太,扇 和也,岡 直大,寺井 慶和
    • Organizer
      2017年 第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] 表面損傷を与えたSi基板におけるSi欠陥発光の寿命評価2017

    • Author(s)
      扇 和也,岡 直大,池田修哉,瀬戸島健太,寺井慶和
    • Organizer
      2017年 第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] BaSi2エピタキシャル膜における近赤外欠陥発光の評価2017

    • Author(s)
      村社尚紀,星田裕文, 飯沼元輝,江口 元, 末益 崇,寺井慶和
    • Organizer
      2017年 第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Year and Date
      2017-03-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] Si/β-FeSi2/Si多結晶積層構造における発光スペクトル評価2016

    • Author(s)
      池田 修哉,扇 和也,飯沼 元輝, 村社 尚紀,寺井 慶和
    • Organizer
      2016年応用物理学会九州支部学術講演会
    • Place of Presentation
      対馬交流センター(長崎県対馬市)
    • Year and Date
      2016-12-03
    • Related Report
      2016 Annual Research Report
  • [Presentation] スパッタリング法により作製したβ-FeSi2多結晶薄膜のPLスペクトル2016

    • Author(s)
      池田修哉,扇 和也,飯沼元輝, 村社尚紀,寺井慶和
    • Organizer
      2016年 第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] 低残留電子密度β-FeSi2/Si多結晶薄膜における光変調反射率スペクトル2016

    • Author(s)
      扇 和也,池田修哉,飯沼元輝,村社尚紀,寺井慶和
    • Organizer
      2016年 第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] β-FeSi2エピタキシャル膜での直接遷移エネルギーと電気特性の相関2016

    • Author(s)
      飯沼元輝,村社尚紀,池田修哉,扇 和也,寺井慶和
    • Organizer
      2016年 第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] 偏光ラマンスペクトル測定によるBaSi2の分子振動モード解析 (II)2016

    • Author(s)
      村社尚紀,飯沼元輝,末益 崇,寺井慶和
    • Organizer
      2016年 第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] イオン多重散乱によるMBE-β-FeSi2/Siヘテロエピタキーの評価2016

    • Author(s)
      淵 雅也,有馬 幹尋, 寺井 慶和,鳴海 一雅,前田 佳均
    • Organizer
      2016年 第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] Dependence of Direct Transition Energies on Growth Temperature in β-FeSi2 Epitaxial Films2016

    • Author(s)
      Motoki Iinuma, Hiroaki Tsukamoto, Naoki Murakoso, Haruki Yamaguchi and Yoshikazu Terai
    • Organizer
      Asia-Pacific Conference on Green Technology with Silicides and Related Materials (APAC-SILICIDE 2016)
    • Place of Presentation
      Nishijin Plaza, Kyushu University (Fukuoka, JAPAN)
    • Year and Date
      2016-07-16
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Structural and electrical properties of β-FeSi2 polycrystalline films with low electron density2016

    • Author(s)
      Kazuya Ogi, Takahiko Higashi, Shuya Ikeda,Tetsu Hattori and Yoshikazu Terai
    • Organizer
      Asia-Pacific Conference on Green Technology with Silicides and Related Materials (APAC-SILICIDE 2016)
    • Place of Presentation
      Nishijin Plaza, Kyushu University (Fukuoka, JAPAN)
    • Year and Date
      2016-07-16
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Growth of p-type β-FeSi2 Polycrystalline Films by RF Magnetron Sputtering2016

    • Author(s)
      Shuya Ikeda, Kazuya Ogi, Tetsu Hattori, Takahiko Higashi and Yoshikazu Terai
    • Organizer
      Asia-Pacific Conference on Green Technology with Silicides and Related Materials (APAC-SILICIDE 2016)
    • Place of Presentation
      Nishijin Plaza, Kyushu University (Fukuoka, JAPAN)
    • Year and Date
      2016-07-16
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Lattice Vibrational Properties of BaSi2 Epitaxial Film in Polarized Raman Spectra2016

    • Author(s)
      Naoki Murakoso, Haruki Yamaguchi, Motoki Iinuma, Takashi Suemasu, and Yoshikazu Terai
    • Organizer
      Asia-Pacific Conference on Green Technology with Silicides and Related Materials (APAC-SILICIDE 2016)
    • Place of Presentation
      Nishijin Plaza, Kyushu University (Fukuoka, JAPAN)
    • Year and Date
      2016-07-16
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Ion Channeling Measurements of β-FeSi2 Films Epitaxially Grown on Si(111) and Their Analysis by Multiple Scattering Theory2016

    • Author(s)
      Masaya Fuchi, Mikihiro Arima, Kazumasa Narumi, Yoshikazu Terai, and Yoshihito Maeda
    • Organizer
      Asia-Pacific Conference on Green Technology with Silicides and Related Materials (APAC-SILICIDE 2016)
    • Place of Presentation
      Nishijin Plaza, Kyushu University (Fukuoka, JAPAN)
    • Year and Date
      2016-07-16
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] β-FeSi2エピタキシャル膜における直接遷移エネルギーの成長温度依存性2016

    • Author(s)
      塚本裕明,飯沼元輝,山口陽己,村社尚紀,山﨑一輝,寺井慶和
    • Organizer
      2016年 第63回応用物理学会春季学術講演会
    • Place of Presentation
      東工大 大岡山キャンパス
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] スパッタリング法で作製したβ-FeSi2多結晶薄膜内の不純物濃度分析2016

    • Author(s)
      服部 哲,東 貴彦,池田修哉,扇 和也,寺井慶和
    • Organizer
      2016年 第63回応用物理学会春季学術講演会
    • Place of Presentation
      東工大 大岡山キャンパス
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] 偏光ラマンスペクトル測定によるBaSi2の分子振動モード解析2016

    • Author(s)
      山口陽己,村社尚紀,山﨑一輝,尾方済人,塚本裕明,末益 崇,寺井慶和
    • Organizer
      2016年 第63回応用物理学会春季学術講演会
    • Place of Presentation
      東工大 大岡山キャンパス
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] β-FeSi2エピタキシャル膜におけるラマンシフトの成長方位依存性2016

    • Author(s)
      山﨑一輝,山口陽己,寺井慶和
    • Organizer
      2016年 第63回応用物理学会春季学術講演会
    • Place of Presentation
      東工大 大岡山キャンパス
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] 鉄シリサイド半導体の基礎物性と光学応用2015

    • Author(s)
      寺井 慶和,前田 佳均
    • Organizer
      電子情報通信学会 第23回研究会「シリコンフォトニクス集積光源の現状と課題」
    • Place of Presentation
      石川県政記念しいのき迎賓館
    • Year and Date
      2015-12-10
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] β-FeSi2エピタキシャル膜におけるラマンスペクトルの熱処理温度依存性2015

    • Author(s)
      山﨑一輝,山口陽己,寺井慶和
    • Organizer
      2015年 応用物理学会九州支部学術講演会
    • Place of Presentation
      琉球大学工学部
    • Year and Date
      2015-12-05
    • Related Report
      2015 Annual Research Report
  • [Presentation] スパッタリング法によるβ-FeSi2薄膜の作製と電気特性評価2015

    • Author(s)
      東 貴彦,服部 哲,寺井慶和
    • Organizer
      第7回半導体材料・デバイスフォーラム
    • Place of Presentation
      熊本,ネスト熊本
    • Year and Date
      2015-11-14
    • Related Report
      2015 Annual Research Report
  • [Presentation] BaSi2エピタキシャル膜の光変調反射スペクトル2015

    • Author(s)
      塚本裕明,山口陽己,山﨑一輝,末益 崇,寺井慶和
    • Organizer
      2015年 第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] BaSi2エピタキシャル膜における偏光ラマンスペクトル解析2015

    • Author(s)
      山口陽己,尾方済人,塚本裕明,末益 崇,寺井慶和
    • Organizer
      2015年 第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] β-FeSi2多結晶薄膜における電気伝導機構の検証(II)2015

    • Author(s)
      東 貴彦,服部 哲,寺井慶和
    • Organizer
      2015年 第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] Bドープβ-FeSi2多結晶薄膜における不純物の活性化過程2015

    • Author(s)
      服部 哲,三村祐介,東 貴彦,山口陽己,寺井慶和
    • Organizer
      2015年 第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] Modulation spectroscopy of iron silicides2015

    • Author(s)
      Yoshikazu TERAI
    • Organizer
      Third Asian School-Conference on Physics and Technology of Nanostructured Materials
    • Place of Presentation
      Vladivostok, Russia
    • Year and Date
      2015-08-19
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Photoreflectance study of surface Fermi level in β-FeSi2 epitaxial films2015

    • Author(s)
      H. Tsukamoto, H.Yamaguchi, T. Hattori, T. Higashi, Y. Terai
    • Organizer
      Third Asian School-Conference on Physics and Technology of Nanostructured Materials
    • Place of Presentation
      Vladivostok, Russia
    • Year and Date
      2015-08-19
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Polarized Raman spectra of β-FeSi2(100)//Si(001) epitaxial film2015

    • Author(s)
      H. Yamaguchi, H. Tsukamoto, T. Hattori, T. Higashi and Y. Terai
    • Organizer
      Third Asian School-Conference on Physics and Technology of Nanostructured Materials
    • Place of Presentation
      Vladivostok, Russia
    • Year and Date
      2015-08-19
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Formation processes of β-FeSi2 polycrystalline films with low carrier density2015

    • Author(s)
      T. Higashi, T. Hattori, H. Tsukamoto, H. Yamaguchi, Y. Terai
    • Organizer
      Third Asian School-Conference on Physics and Technology of Nanostructured Materials
    • Place of Presentation
      Vladivostok, Russia
    • Year and Date
      2015-08-19
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effects of residual carrier density on I-V curves in β-FeSi2 polycrystalline/Si heterojunctions2015

    • Author(s)
      T. Hattori, T. Higashi, H. Tsukamoto, H. Yamaguchi, Y. Terai
    • Organizer
      Third Asian School-Conference on Physics and Technology of Nanostructured Materials
    • Place of Presentation
      Vladivostok, Russia
    • Year and Date
      2015-08-19
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] β-FeSi2多結晶薄膜における電気伝導機構の検証2015

    • Author(s)
      東 貴彦,中山翔太,服部 哲,三村祐介,塚本裕明,山口陽己,寺井慶和
    • Organizer
      2015年 第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南キャンパス
    • Year and Date
      2015-03-12
    • Related Report
      2014 Annual Research Report
  • [Presentation] スパッタリング法によるβ-FeSi2多結晶薄膜の伝導型制御2015

    • Author(s)
      服部 哲,三村祐介,東 貴彦,中山翔太,塚本裕明,山口陽己,寺井慶和
    • Organizer
      2015年 第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南キャンパス
    • Year and Date
      2015-03-12
    • Related Report
      2014 Annual Research Report
  • [Presentation] SiGe(111)上へのβ-FeSi2エピタキシャル成長とひずみの評価2015

    • Author(s)
      塚本裕明,草原彰吾,山口陽己,尾方済人,服部 哲,東 貴彦,寺井慶和
    • Organizer
      2015年 第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南キャンパス
    • Year and Date
      2015-03-12
    • Related Report
      2014 Annual Research Report
  • [Presentation] β-FeSi2(010)//Si(110)エピタキシャル膜における偏光ラマンスペクトル2015

    • Author(s)
      山口陽己,尾方済人,塚本裕明,草原彰吾,服部 哲,東 貴彦,秋山賢輔,寺井慶和
    • Organizer
      2015年 第62回応用物理学会春季学術講演会
    • Place of Presentation
      東海大学湘南キャンパス
    • Year and Date
      2015-03-12
    • Related Report
      2014 Annual Research Report
  • [Presentation] β-FeSi2多結晶薄膜における結晶欠陥と残留キャリア密度との相関2014

    • Author(s)
      東 貴彦,服部 哲,塚本裕明,山口陽己,寺井慶和
    • Organizer
      2014年 第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学 札幌キャンパス
    • Year and Date
      2014-09-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] n型β-FeSi2多結晶薄膜/p-Siヘテロ接合における電流-電圧特性のキャリア密度依存性2014

    • Author(s)
      服部 哲,東 貴彦,塚本裕明,山口陽己,寺井慶和
    • Organizer
      2014年 第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学 札幌キャンパス
    • Year and Date
      2014-09-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] β-FeSi2 UP+構造におけるFranz-Keldysh oscillationsの温度および励起光強度依存性2014

    • Author(s)
      塚本裕明,山口陽己,服部 哲,東 貴彦,寺井慶和
    • Organizer
      2014年 第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学 札幌キャンパス
    • Year and Date
      2014-09-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] β-FeSi2 (100)//Si(001)エピタキシャル膜における偏光ラマンスペクトル2014

    • Author(s)
      山口陽己,塚本裕明,服部 哲,東 貴彦,寺井慶和
    • Organizer
      2014年 第75回応用物理学会秋季学術講演会
    • Place of Presentation
      北海道大学 札幌キャンパス
    • Year and Date
      2014-09-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] Time-resolved photoluminescence properties of β-FeSi2 thin films2014

    • Author(s)
      Yoshikazu Terai and Yoshihito Maeda
    • Organizer
      International conference and summer school on advanced silicide technology (ICSS-Silicide 2014), July 20, 2014, Tokyo, Japan
    • Place of Presentation
      東京理科大学
    • Year and Date
      2014-07-20
    • Related Report
      2014 Annual Research Report
  • [Presentation] Electrical transport properties of β-FeSi2 epitaxial and polycrystalline films with low residual carrier density2014

    • Author(s)
      Yoshikazu Terai
    • Organizer
      International conference and summer school on advanced silicide technology (ICSS-Silicide 2014), July 19, 2014, Tokyo, Japan
    • Place of Presentation
      東京理科大学
    • Year and Date
      2014-07-19
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Growth of β-FeSi2 polycrystalline thin films with low residual carrier density by magnetron sputtering2014

    • Author(s)
      Tetsu Hattori, Takahiko Higashi, Hiroaki Tsukamoto, Haruki Yamaguchi, and Yoshikazu Terai
    • Organizer
      International conference and summer school on advanced silicide technology (ICSS-Silicide 2014), July 19, 2014, Tokyo, Japan
    • Place of Presentation
      東京理科大学
    • Year and Date
      2014-07-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] Investigation of surface Fermi level in β-FeSi2 epitaxial films by Franz-Keldysh oscillations2014

    • Author(s)
      Hiroaki Tsukamoto, Haruki Yamaguchi, Tetsu Hattori, Takahiko Higashi, and Yoshikazu Terai
    • Organizer
      International conference and summer school on advanced silicide technology (ICSS-Silicide 2014), July 19, 2014, Tokyo, Japan
    • Place of Presentation
      東京理科大学
    • Year and Date
      2014-07-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] Effect of β-FeSi2/Si heterointerface on electrical properties in β-FeSi2 polycrystalline thin films grown by magnetron sputtering2014

    • Author(s)
      Takahiko Higashi, Hattori Tetsu, Hiroaki Tsukamoto, Haruki Yamaguchi, and Yoshikazu Terai
    • Organizer
      International conference and summer school on advanced silicide technology (ICSS-Silicide 2014), July 19, 2014, Tokyo, Japan
    • Place of Presentation
      東京理科大学
    • Year and Date
      2014-07-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] Temperature dependence of Raman spectra in β-FeSi2 epitaxial films2014

    • Author(s)
      Haruki Yamaguchi, Hiroaki Tsukamoto, Tetsu Hattori, Takahiko Higashi, and Yoshikazu Terai
    • Organizer
      International conference and summer school on advanced silicide technology (ICSS-Silicide 2014), July 19, 2014, Tokyo, Japan
    • Place of Presentation
      東京理科大学
    • Year and Date
      2014-07-19
    • Related Report
      2014 Annual Research Report
  • [Book] シリサイド系半導体の科学と技術2014

    • Author(s)
      前田佳均編著 (第5.3章 寺井慶和著)
    • Total Pages
      324
    • Publisher
      裳華房
    • Related Report
      2014 Annual Research Report

URL: 

Published: 2014-04-04   Modified: 2022-02-16  

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