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Development of 300GHz FW-TWT using MEMS technology

Research Project

Project/Area Number 26289101
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionShizuoka University

Principal Investigator

Mimura Hidenori  静岡大学, 電子工学研究所, 教授 (90144055)

Co-Investigator(Kenkyū-buntansha) 根尾 陽一郎  静岡大学, 電子工学研究所, 准教授 (50312674)
長尾 昌善  国立研究開発法人産業技術総合研究所, その他部局等, 研究員 (80357607)
Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥15,990,000 (Direct Cost: ¥12,300,000、Indirect Cost: ¥3,690,000)
Fiscal Year 2016: ¥4,550,000 (Direct Cost: ¥3,500,000、Indirect Cost: ¥1,050,000)
Fiscal Year 2015: ¥5,460,000 (Direct Cost: ¥4,200,000、Indirect Cost: ¥1,260,000)
Fiscal Year 2014: ¥5,980,000 (Direct Cost: ¥4,600,000、Indirect Cost: ¥1,380,000)
Keywords進行波管 / 300GHz / Folded Waveguide 遅波回路 / MEMS / FoldedWaveguide遅波回路 / 電子デバイス・機器 / テラヘルツ波 / 電界放出微小電子源 / Folded Waveguide遅波回路
Outline of Final Research Achievements

To develop the Folded WaveGuide-Travelling Wave Tube(FWG-TWT)which has the output power greater than 1 W and gain larger than 20 dB over the bandwidth from 280 GHz to 300 GHz, we have designed the FWG which is fabricated by micro electro mechanical systems (MEMS). We have fabricated a FWG-TWT using our designed FWG, and we have confirmed that our design methods correctly designs the FWG. However, the first fabrication of the FWG-TWT showed that the FWG with a rectangular shaped beam hole caused the large RF loss. Therefore, we have designed the FWG with a circular shaped beam hole. We have confirmed from the calculation that the FWG-TWT with a circular shaped beam hole satisfies the required performances of the FWG-TWT. In addition to these results, we have developed the volcano-structured double gated Spindt field emitter, and semiconductor photocathodes such as GaAs and Si, aiming at the development a compact FWG-TWT with high efficiency in the future.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • Research Products

    (17 results)

All 2016 2015 2014

All Journal Article (3 results) (of which Peer Reviewed: 3 results,  Acknowledgement Compliant: 1 results) Presentation (14 results) (of which Int'l Joint Research: 6 results)

  • [Journal Article] Design of a 300 GHz Band TWT with a Folded Waveguide Fabricated by Microelectromechanical Systems2016

    • Author(s)
      K. Tsutaki, Y. Neo, H. Mimura, N. Masuda, and M. Yoshida
    • Journal Title

      J. Infrared Milli, Terahz. Waves

      Volume: 37 Issue: 12 Pages: 1166-1172

    • DOI

      10.1007/s10762-016-0306-5

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Beam profile measurement of volcano-structured double-gate Spindt-type field emitter arrays2016

    • Author(s)
      M. Nagao, Y. Gotoh, Y. Neo, and H. Mimura
    • Journal Title

      J. Vac. Sci. Technol. B

      Volume: 34 Issue: 2

    • DOI

      10.1116/1.4944453

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Journal Article] Electron emission properties of gated silicon field emitter array driven by laser pulses2016

    • Author(s)
      H. Shimawaki, Y. Neo, H. Mimura, M. Nagao, F. Wakaya, and M. Takai
    • Journal Title

      Appl. Phys. Lett.

      Volume: 109 Issue: 18

    • DOI

      10.1063/1.4967008

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed
  • [Presentation] シリコンフィールドエミッタの光応答特性の評価(その2)2016

    • Author(s)
      嶋脇秀隆、長尾昌善、根尾陽一郎、三村秀典、若家冨士夫、高井幹夫
    • Organizer
      電子情報通信学会技術報告
    • Place of Presentation
      三重大学(三重県津市)
    • Year and Date
      2016-10-25
    • Related Report
      2016 Annual Research Report
  • [Presentation] NEA-GaASホトカソードからのパルスビーム診断2016

    • Author(s)
      吉武亮、光野圭吾、増澤 智昭、畑中 義式、細田誠、根尾 陽一郎、三村 秀典
    • Organizer
      電子情報通信学会技術研究報告
    • Place of Presentation
      三重大学(三重県津市)
    • Year and Date
      2016-10-25
    • Related Report
      2016 Annual Research Report
  • [Presentation] Characterization of GaAs photocathode utilizing negative electron affinity2016

    • Author(s)
      T. Matsuzawa, K. Mitsuno, Y. Hatanaka, Y. Neo, and H. Mimura
    • Organizer
      15th International Conference Global Research and Education
    • Place of Presentation
      Warsaw University of Technology(Warsaw, Poland)
    • Year and Date
      2016-09-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fast pulse electron beam generated from NEA-GaAs photocathode2016

    • Author(s)
      R. Yoshitake, Y. Neo, Y. Hatanaka, M. Hosoda, and H. Mimura
    • Organizer
      15th International Conference Global Research and Education
    • Place of Presentation
      Warsaw University of Technology(Warsaw, Poland)
    • Year and Date
      2016-09-26
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] GaAs負性親和力カソードの応答特性2016

    • Author(s)
      光野圭吾、増澤智昭、畑中義式、根尾陽一郎、三村秀典
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟県新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] Field emission from gated silicon field emitter array induced by sub-nanosecond laser pulses2016

    • Author(s)
      H. Shimawaki, Y. Neo, H. Mimura, M. Nagao, F. Wakaya, and M. Takai
    • Organizer
      29th International Vacuum Nanoelectronics Conference
    • Place of Presentation
      University of British Columbia(Vancouver, Canada)
    • Year and Date
      2016-07-11
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] GaAs 負性電子親和力カソードの応答速度について2016

    • Author(s)
      光野圭悟、増澤智昭、畑中義式、根尾陽一郎、三村秀典
    • Organizer
      第63回応用物理学関係連合講演会
    • Place of Presentation
      東京工業大学(東京都目黒区)
    • Year and Date
      2016-03-19
    • Related Report
      2015 Annual Research Report
  • [Presentation] Revised Fabrication of Volcano-Structured Double-Gate Spindt-Type FEA2015

    • Author(s)
      M. Nagao, Y. Goto, T. Matsuzawa, Y. Neo and H. Mimura
    • Organizer
      22th International Display Workshop
    • Place of Presentation
      大津プリンスホテル(滋賀県大津市)
    • Year and Date
      2015-12-09
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 300GHz帯MEMS-FWG-TWTの設計検討(その2)2015

    • Author(s)
      蔦木邦夫、根尾陽一郎、三村秀典、吉田満、増田則夫、松岡順一
    • Organizer
      電子情報通信学会技術報告
    • Place of Presentation
      名城大学名古屋駅サテライト(愛知県名古屋市)
    • Year and Date
      2015-10-22
    • Related Report
      2015 Annual Research Report
  • [Presentation] ボルケーノ構造ダブルゲートスピント型フィールドエミッタアレイのビーム集束特性2015

    • Author(s)
      長尾昌善, 後藤康仁, 増澤智昭, 根尾陽一郎, 三村秀典
    • Organizer
      第76回応用物理学会学術講演会
    • Place of Presentation
      名古屋国際会議場(愛知県名古屋市)
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] Design of a 300GHz band TWT with a folded waveguide fabricated by micro electro mechanical systems2015

    • Author(s)
      K. Tsutaki, Y. Neo, H. Mimura, Y. Fujisita, M. Yoshida and J. Matsuoka
    • Organizer
      2nd International Symposium on Frontiers in Thz Technology 2015
    • Place of Presentation
      アクトシティ(静岡県浜松市)
    • Year and Date
      2015-08-30
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Beam profile measurement of vocano-structured double-gated Spint-type field emitter arrays2015

    • Author(s)
      M, Nagao, Y. Gotoh, Y. Neo and H. Mimura
    • Organizer
      28th International Vacuum Nanoelectronics Conference
    • Place of Presentation
      Yingbin Hotel (Guangzhou, China)
    • Year and Date
      2015-07-13
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 300GHz帯MEMS-FWG-TWTの設計検討2014

    • Author(s)
      吉田満、松岡順一、蔦木邦夫、根尾陽一郎、三村秀典
    • Organizer
      電子情報通信学会電子デバイス研究会
    • Place of Presentation
      北海道大学(北海道札幌市)
    • Year and Date
      2014-10-22
    • Related Report
      2014 Annual Research Report
  • [Presentation] ボルケーノ構造スピント型エミッタの電子放出特性2014

    • Author(s)
      長尾昌善
    • Organizer
      電子情報通信学会電子デバイス研究会
    • Place of Presentation
      北海道大学(北海道札幌市)
    • Year and Date
      2014-10-21
    • Related Report
      2014 Annual Research Report

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Published: 2014-04-04   Modified: 2018-03-22  

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