• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to previous page

Study on heterogeneous integration of graphene device

Research Project

Project/Area Number 26289107
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypePartial Multi-year Fund
Section一般
Research Field Electron device/Electronic equipment
Research InstitutionThe University of Tokushima

Principal Investigator

Nagase Masao  徳島大学, 大学院理工学研究部, 教授 (20393762)

Co-Investigator(Kenkyū-buntansha) 関根 佳明  日本電信電話株式会社NTT物性科学基礎研究所, 機能物質科学部, 研究主任 (70393783)
影島 博之  島根大学, 総合理工学研究科(研究院), 教授 (70374072)
大野 恭秀  徳島大学, ソシオテクノサイエンス研究部, 准教授 (90362623)
日比野 浩樹  日本電信電話株式会社NTT物性科学基礎研究所, 機能物質科学研究部, 部長 (60393740)
Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥16,770,000 (Direct Cost: ¥12,900,000、Indirect Cost: ¥3,870,000)
Fiscal Year 2016: ¥2,210,000 (Direct Cost: ¥1,700,000、Indirect Cost: ¥510,000)
Fiscal Year 2015: ¥2,990,000 (Direct Cost: ¥2,300,000、Indirect Cost: ¥690,000)
Fiscal Year 2014: ¥11,570,000 (Direct Cost: ¥8,900,000、Indirect Cost: ¥2,670,000)
Keywordsグラフェン / 集積化デバイス / 赤外線加熱 / 表面構造制御 / 環境制御チャンバー / 電子デバイス / ナノ材料 / 異種機能集積化 / ナノコンタクト / 電子デバイス・機器
Outline of Final Research Achievements

Heterogeneous integrated technology for graphene devices was studied. A large area single-crystal single-layer graphene was successfully grown on SiC substrate. High quality graphene was fabricated by controlling the surface structure of the SiC substrate using ultra high-speed high-temperature infrared rapid thermal annealer. Furthermore, various kinds of fabrication processes for integrated devices were examined. The effects of the processes for graphene properties were evaluated using the large area graphene samples without the influences of lithographic processes. A remarkable achievement is a finding of a specific water doping effect for graphene on SiC substrate.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Annual Research Report
  • 2014 Annual Research Report
  • Research Products

    (42 results)

All 2017 2016 2015 2014 Other

All Journal Article (7 results) (of which Peer Reviewed: 7 results,  Acknowledgement Compliant: 7 results) Presentation (34 results) (of which Int'l Joint Research: 8 results,  Invited: 6 results) Remarks (1 results)

  • [Journal Article] Planar cold cathode based on a multilayer-graphene/SiO2/Si heterodevice2016

    • Author(s)
      K. Nishiguchi, D. Yoshizumi, Y. Sekine, K. Furukawa, A. Fujiwara and M. Nagase
    • Journal Title

      Appl. Phys. Express

      Volume: 9 Issue: 10 Pages: 105101-105101

    • DOI

      10.7567/apex.9.105101

    • NAID

      210000138070

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Microscopic Raman Study of Graphene on 4H-SiC Two-Dimensionally Enhanced by Surface Roughness and Gold Nanoparticles2016

    • Author(s)
      H. Matsumura, S. Yanagiya, M. Nagase, H. Kishikawa and N. Goto
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 55 Issue: 6S1 Pages: 06GL05-06GL05

    • DOI

      10.7567/jjap.55.06gl05

    • NAID

      120006380969

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Top-gated graphene field-effect transistors by low-temperature synthesized SiNx insulator on SiC substrates2016

    • Author(s)
      Y. Ohno, Y. Kanai, Y. Mori, M. Nagase and K. Matsumoto
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 55 Issue: 6S1 Pages: 06GF09-06GF09

    • DOI

      10.7567/jjap.55.06gf09

    • NAID

      210000146619

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Epitaxial graphene on SiC formed by the surface structure control technique2016

    • Author(s)
      T. Aritsuki, T. Nakashima, K. Kobayashi, Y. Ohno, and M. Nagase
    • Journal Title

      10.7567/JJAP.55.Jpn. J. Appl. Phys.

      Volume: 55

    • NAID

      120006365858

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Effects of UV light intensity on electrochemical wet etching of SiC for the fabrication of suspended graphene2015

    • Author(s)
      R. O, M. Takamura, K. Furukawa, M. Nagase and H. Hibino
    • Journal Title

      Jpn. J. Appl. Phys.

      Volume: 54 Issue: 3 Pages: 036502-036502

    • DOI

      10.7567/jjap.54.036502

    • NAID

      120006365859

    • Related Report
      2015 Annual Research Report 2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Resistivity anisotropy measured using four probes in epitaxial graphene on silicon carbide2015

    • Author(s)
      Kobayashi Keisuke, Tanabe Shinichi, Tao Takuto, Okumura Toshio, Nakashima Takeshi, Aritsuki Takuya, O Ryong-Sok and Masao Nagase
    • Journal Title

      Appl. Phys. Express

      Volume: 8 Issue: 3 Pages: 036602-036602

    • DOI

      10.7567/apex.8.036602

    • NAID

      120006365861

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] 金微粒子によるSiC上グラフェンの表面増強ラマン散乱2014

    • Author(s)
      関根 佳明, 日比野 浩樹, 小栗 克弥, 岩本 篤, 永瀬 雅夫, 影島 博之, 佐々木 健一, 赤崎 達志
    • Journal Title

      レーザー研究

      Volume: 42 Pages: 652-657

    • NAID

      130007897554

    • Related Report
      2014 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Presentation] 分子修飾機能化によるSiC上グラフェンの非特異吸着の抑制2017

    • Author(s)
      谷口嘉昭,三木翼,光野琢仁,大野恭秀,永瀬雅夫,南川慶二,安澤幹人
    • Organizer
      第64回応用物理学会春季学術講演会(応物2017春)
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Year and Date
      2017-03-15
    • Related Report
      2016 Annual Research Report
  • [Presentation] SiC上グラフェンの水吸着によるキャリア密度変化2017

    • Author(s)
      北岡 誠, 永濱 拓也, 中村 晃大, 有月 琢哉, 高嶋 和也, 大野 恭秀, 永瀬 雅夫
    • Organizer
      第64回応用物理学会春季学術講演会(応物 2017春)
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Year and Date
      2017-03-15
    • Related Report
      2016 Annual Research Report
  • [Presentation] 集束イオンビームを用いたステンシルリソグラフィ技術のためのSub10nmパターンの作製2017

    • Author(s)
      朴 理博, 永瀬 雅夫, 大野 恭秀
    • Organizer
      第64回応用物理学会春季学術講演会(応物2017 春)
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Year and Date
      2017-03-15
    • Related Report
      2016 Annual Research Report
  • [Presentation] SiC上グラフェンのタンパク質吸着特性 ~分子 修飾による高性能バイオセンサの実現に向けて~2016

    • Author(s)
      谷口 嘉昭, 大野 恭秀, 永瀬 雅夫
    • Organizer
      サイエンスプラザ2016
    • Place of Presentation
      NTT物性科学基礎研究所(神奈川県厚木市)
    • Year and Date
      2016-11-23
    • Related Report
      2016 Annual Research Report
  • [Presentation] Carrier doping effect of humidity for single-crystal graphene on SiC2016

    • Author(s)
      M. Kitaoka, T. Nagahama, K. Nakamura, K. Takashima, Y. Ohno and M. Nagase
    • Organizer
      9th International Microprocesses and Nanotechnology Conference (MNC2016)
    • Place of Presentation
      ANAクラウンプラザホテル京都(京都府京都市)
    • Year and Date
      2016-11-11
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Protein adsorption characteristics on bare and phosphorylcholine- modified graphene films on SiC substrate2016

    • Author(s)
      Y. Taniguchi, T. Miki, T. Mitsuno, Y. Ohno, M. Nagase, K. Minagawa and M. Yasuzaw
    • Organizer
      9th International Microprocesses and Nanotechnology Conference (MNC2016)
    • Place of Presentation
      ANAクラウンプラザホテル京都(京都府京都市)
    • Year and Date
      2016-11-11
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 新規合成分子を用いた表面修飾による単結晶グラフェンの親水化2016

    • Author(s)
      谷口 嘉昭, 三木 翼, 光野 琢仁, 大野 恭秀, 永瀬 雅夫, 南川 慶二, 安澤 幹人
    • Organizer
      第8回集積化MEMSシンボジ ウム
    • Place of Presentation
      平戸文化センター(長崎県平戸市)
    • Year and Date
      2016-10-25
    • Related Report
      2016 Annual Research Report
  • [Presentation] SiC上グラフェンのシート抵抗の湿度依存性2016

    • Author(s)
      北岡 誠, 永濱 拓也, 中村 晃大, 有月 琢哉, 高嶋 和也, 大野 恭秀, 永瀬 雅夫
    • Organizer
      第8回集積化MEMSシンボジウム
    • Place of Presentation
      平戸文化センター(長崎県平戸市)
    • Year and Date
      2016-10-25
    • Related Report
      2016 Annual Research Report
  • [Presentation] グラフェン本来のイオンセンシング特性2016

    • Author(s)
      大野 恭秀, 光野 琢仁, 谷口 嘉昭, 永瀬 雅夫
    • Organizer
      第77回応用物理学会秋季学術講演会(応物2016秋)
    • Place of Presentation
      朱鷺メッセ(新潟県新潟市)
    • Year and Date
      2016-09-15
    • Related Report
      2016 Annual Research Report
  • [Presentation] SiC上グラフェンの水脱離による導電率変化2016

    • Author(s)
      北岡 誠, 永濱 拓也, 中村 晃大, 有月 琢哉, 高嶋 和也, 大野 恭秀, 永瀬 雅夫
    • Organizer
      第77回応用物理学会秋季学術講演会(応物2016秋)
    • Place of Presentation
      朱鷺メッセ(新潟県新潟市)
    • Year and Date
      2016-09-15
    • Related Report
      2016 Annual Research Report
  • [Presentation] 走査プローブ顕微鏡を用 いたSiC上グラフェンの実効ヤング率計測2016

    • Author(s)
      山田 祐輔, 有月 琢哉, 高嶋 和也, 大野 恭秀, 永瀬 雅夫
    • Organizer
      第77回応用物理学会秋季学術講演会(応物2016 秋)
    • Place of Presentation
      朱鷺メッセ(新潟県新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] 顕微ラマン分光法によるSiC上グラフェンの応力とキャリア密度の面内分布評価2016

    • Author(s)
      森本 征士, 有月 琢哉, 青木 翔, 大野 恭秀, 永瀬 雅夫
    • Organizer
      第77回応用物理学会秋季学術講演会(応 物2016秋)
    • Place of Presentation
      朱鷺メッセ(新潟県新潟市)
    • Year and Date
      2016-09-13
    • Related Report
      2016 Annual Research Report
  • [Presentation] Intrinsic pH Sensitivity of Graphene Field-Effect Transistor2016

    • Author(s)
      T. Mitsuno, Y. Taniguchi, Y. Ohno and M. Nagase
    • Organizer
      The 43rd International Symposium on Compound Semiconductor
    • Place of Presentation
      富山国際会議場(富山県富山市)
    • Year and Date
      2016-06-27
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Hydrophilic Graphene Film by Molecular Functionalization2016

    • Author(s)
      Y. Taniguchi, T. Miki, T. Mitsuno, Y. Ohno, M. Nagase, K. Minagawa and M. Yasuzawa
    • Organizer
      The 43rd International Symposium on Compound Semiconductor
    • Place of Presentation
      富山国際会議場(富山県富山市)
    • Year and Date
      2016-06-27
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Single-crystal graphene growth on SiC by infrared rapid thermal annealing2016

    • Author(s)
      M. Nagase
    • Organizer
      2016 Collaborative Conference on 3D and Materials Research(CC3DMR)
    • Place of Presentation
      Songdo Convensia, Inchon, Korea
    • Year and Date
      2016-06-22
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] エピタキシャルグラフェン上の吸着水層2016

    • Author(s)
      中村 晃大, 有月 琢哉, 高嶋 和也, 永濱 拓也, 北岡 誠, 永瀬 雅夫, 大野 恭秀
    • Organizer
      第63回応用物理学会春季学術講演会(応物2016春)
    • Place of Presentation
      東京工業大学(東京都目黒区)
    • Year and Date
      2016-03-22
    • Related Report
      2015 Annual Research Report
  • [Presentation] ロジウム - 二硫化モリブデン - グラフェンヘテロ接合の電気特性に関する研究2016

    • Author(s)
      楊 順涵, 有月 琢哉, 高嶋 和也, 大野 恭秀, 永瀬 雅夫
    • Organizer
      第63回応用物理学会春季学術講演会(応物2016春)
    • Place of Presentation
      東京工業大学(東京都目黒区)
    • Year and Date
      2016-03-22
    • Related Report
      2015 Annual Research Report
  • [Presentation] SiC 上グラフェンに堆積した金ナノ粒子の SERS 効果2016

    • Author(s)
      松村 尚知, 柳谷 伸一郎, 古部 昭広, 岸川 博紀, 後藤 信夫, 永瀬 雅夫
    • Organizer
      第63回応用物理学会春季学術講演会(応物2016春)
    • Place of Presentation
      東京工業大学(東京都目黒区)
    • Year and Date
      2016-03-21
    • Related Report
      2015 Annual Research Report
  • [Presentation] Electron emission using multilayered-graphene/SiO2/Si heterodevice driven with low-voltage supply in low vacuum2015

    • Author(s)
      D. Yoshizumi, K. Nishiguchi, Y. Sekine, K. Furukawa, A. Fujiwara and M. Nagase
    • Organizer
      28th International Microprocesses and Nanotechnology Conference (MNC2015)
    • Place of Presentation
      富山国際会議場(富山県富山市)
    • Year and Date
      2015-11-13
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Top-gated graphene field-effect transistors by low-temperature synthesized SiNx insulator on SiC substrates2015

    • Author(s)
      Y. Ohno, M. Nagase and M. Kazuhiko
    • Organizer
      28th International Microprocesses and Nanotechnology Conference (MNC2015)
    • Place of Presentation
      富山国際会議場(富山県富山市)
    • Year and Date
      2015-11-12
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] High quality graphene on SiC formed by the surface structure control technique2015

    • Author(s)
      T. Aritsuki, T. Nakashima, K. Kobayashi, Y. Ohno and M. Nagase
    • Organizer
      28th International Microprocesses and Nanotechnology Conference (MNC2015)
    • Place of Presentation
      富山国際会議場(富山県富山市)
    • Year and Date
      2015-11-12
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Cat-CVD 法による SiNx 絶縁膜を用いた SiC グラフェン FET の作製2015

    • Author(s)
      大野 恭秀, 永瀬 雅夫, 松本 和彦
    • Organizer
      第76回応用物理学会秋季学術講演会(応物2015秋)
    • Place of Presentation
      名古屋国際会議場(愛知県名古屋市)
    • Year and Date
      2015-09-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] 雰囲気制御による SiC 上グラフェンの抵抗値変化2015

    • Author(s)
      永濱 拓也, 小林 慶祐, 有月 琢哉, 高嶋 和也, 青木 翔, 大野 恭秀, 永瀬 雅夫
    • Organizer
      第76回応用物理学会秋季学術講演会(応物2015秋)
    • Place of Presentation
      名古屋国際会議場(愛知県名古屋市)
    • Year and Date
      2015-09-15
    • Related Report
      2015 Annual Research Report
  • [Presentation] SiC上グラフェンのナノ物性評価2015

    • Author(s)
      永瀬 雅夫
    • Organizer
      JSM SPM分科会・RIIFセミナー-グリーンエレクトロニクス材料・デバイスのSPM解析技術-
    • Place of Presentation
      NIMS(茨城県つくば市)
    • Year and Date
      2015-03-19
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] HSQ 塗布による SiC 上グラフェンのキャリア濃度変化2015

    • Author(s)
      小田 達也, 小林 慶祐, 有月 琢哉, 青木 翔, 永濵 拓也, 永瀬 雅夫
    • Organizer
      第62回応用物理学会春季学術講演会(応物2015春)
    • Place of Presentation
      東海大学(神奈川県平塚市)
    • Year and Date
      2015-03-12
    • Related Report
      2014 Annual Research Report
  • [Presentation] Graphene on SiC substrate fabricated by infrared rapid thermal annealer2014

    • Author(s)
      Masao Nagase
    • Organizer
      India-Japan workshop on "Nanotechnology: Synthesis & Sensing Applications",
    • Place of Presentation
      C-MET(Pune, India)
    • Year and Date
      2014-10-16
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Graphene on SiC substrates fabricated by an infrared rapid thermal annealer2014

    • Author(s)
      Masao Nagase
    • Organizer
      3rd International Conference on Nanotechnology (NANOCON 014)
    • Place of Presentation
      Hotel Le Meredien (Pune, India)
    • Year and Date
      2014-10-14
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] SiC(0001) Si 面上第一層目グラフェン成長における [1-100]ステップの役割,2014

    • Author(s)
      影島 博之, 日比野 浩樹, 山口 浩司, 永瀬 雅夫
    • Organizer
      第75回応用物理学会秋季学術講演会(応物2014秋)
    • Place of Presentation
      北海道大学(北海道札幌市)
    • Year and Date
      2014-09-19
    • Related Report
      2014 Annual Research Report
  • [Presentation] 金微粒子によるSiC上グラフェンの表面増強ラマン散乱2014

    • Author(s)
      関根 佳明, 日比野 浩樹, 小栗 克弥, 岩本 篤, 永瀬 雅夫, 影島 博之, 赤崎 達志
    • Organizer
      第75回応用物理学会秋季学術講演会(応物2014秋)
    • Place of Presentation
      北海道大学(北海道札幌市)
    • Year and Date
      2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] SiC 上グラフェンのラマンスペクトルにおける表面成分抽出2014

    • Author(s)
      青木 翔, 呉 龍錫, 井口 宗明, 中島 健志, 永瀬 雅夫
    • Organizer
      第75回応用物理学会秋季学術講演会(応物2014秋)
    • Place of Presentation
      北海道大学(北海道札幌市)
    • Year and Date
      2014-09-18
    • Related Report
      2014 Annual Research Report
  • [Presentation] SiC 上グラフェン表面電位の環境雰囲気効果に関する研究2014

    • Author(s)
      泰地 耕作, 奥村 俊夫, 中島 健志, 永瀬 雅夫
    • Organizer
      第75回応用物理学会秋季学術講演会(応物2014秋)
    • Place of Presentation
      北海道大学(北海道札幌市)
    • Year and Date
      2014-09-17
    • Related Report
      2014 Annual Research Report
  • [Presentation] デバイス化プロセスにおける SiC 上グラフェン電子物性変調2014

    • Author(s)
      有月 琢哉, 奥村 俊夫, 呉 龍錫, 中島 健志, 小林 慶祐, 永瀬 雅夫
    • Organizer
      第75回応用物理学会秋季学術講演会(応物2014秋)
    • Place of Presentation
      北海道大学(北海道札幌市)
    • Year and Date
      2014-09-17
    • Related Report
      2014 Annual Research Report
  • [Presentation] Theoretical studies of graphene on SiC2014

    • Author(s)
      Kageshima Hiroyuki, Hiroki Hibino, Hiroshi Yamaguchi and Masao Nagase
    • Organizer
      The 6th IEEE International Nanoelectronics Conference (INEC2014)
    • Place of Presentation
      北海道大学(北海道札幌市)
    • Year and Date
      2014-07-30
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Presentation] Epitaxial graphene grown by infrared rapid thermal annealing2014

    • Author(s)
      Masao Nagase
    • Organizer
      The 6th IEEE International Nanoelectronics Conference (INEC2014)
    • Place of Presentation
      北海道大学(北海道札幌市)
    • Year and Date
      2014-07-28
    • Related Report
      2014 Annual Research Report
    • Invited
  • [Remarks] 永瀬・大野研究室 科研費報告

    • URL

      http://graphene.ee.tokushima-u.ac.jp/kaken.html

    • Related Report
      2016 Annual Research Report 2015 Annual Research Report

URL: 

Published: 2014-04-04   Modified: 2018-03-22  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi