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Morphology and surface controlled growth of metal oxides nanowires by atmospheric pressure CVD and Their high sensitive gas-sensing applications

Research Project

Project/Area Number 26390029
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Nanomaterials engineering
Research InstitutionEhime University

Principal Investigator

Terasako Tomoaki  愛媛大学, 理工学研究科(工学系), 准教授 (70294783)

Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2016: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2015: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Fiscal Year 2014: ¥1,040,000 (Direct Cost: ¥800,000、Indirect Cost: ¥240,000)
Keywordsガスセンサ / SnO2 / β-Ga2O3 / CuO / Cu2O / 化学気相堆積法 / 気相-液相-固相っ成長 / 化学溶液析出法 / 酸化スズ / 酸化ガリウム / ナノワイヤー / VLS成長 / 交互原料供給法 / フォトルミネッセンス / 酸化銅 / 酸化スズナノワイヤー / 酸化ガリウムナノワイヤー / 気相-液相-固相成長 / 気相-固相成長 / 大気圧CVD法 / 溶液成長 / 透過電子顕微鏡
Outline of Final Research Achievements

Nanowires (NWs) of SnO2 and β-Ga2O3 were successfully grown by atmospheric-pressure CVD utilizing vapor-liquid-solid growth under alternate source supply (ASS) of metal (Sn or Ga) and H2O. The SnO2 NWs average diameter increased slightly with increasing growth temperature (Tg). However, the SnO2 NWs average diameter was found to be almost independent of the cycle number of the source supply sequence. This fact suggests that the enhancement of the NWs average diameter due to vapor-solid growth is effectively suppressed by introducing ASS. As with the case of the SnO2 NWs, the β-Ga2O3 NWs average diameter tended to increase slightly with increasing Tg under the ASS. Photoluminescence from both the SnO2 and β-Ga2O3 NWs were dominated by the broad visible emissions associated with the structural defects. It was also found that both sensitizer CuO and Cu2O films can be selectively grown from the same Cu precursor by chemical bath deposition with the assistance of a Fe plate.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • 2014 Research-status Report
  • Research Products

    (26 results)

All 2017 2016 2015

All Journal Article (4 results) (of which Peer Reviewed: 2 results,  Acknowledgement Compliant: 4 results) Presentation (22 results) (of which Int'l Joint Research: 8 results)

  • [Journal Article] Growth and morphology control of β-Ga2O3 nanostructures by atmospheric-pressure CVD2016

    • Author(s)
      Tomoaki Terasako, Yuki Kawasaki, Masakazu Yagi
    • Journal Title

      Thin Solid Films

      Volume: 620 Pages: 23-29

    • DOI

      10.1016/j.tsf.2016.07.074

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Growth of β-gallium oxide films and nanostructures by atmospheric-pressure CVD using gallium and water as source materials2015

    • Author(s)
      Tomoaki Terasako, Hikaru Ichinotani, Masakazu Yagi
    • Journal Title

      Physica Status Solidi (c)

      Volume: 12 Issue: 7 Pages: 985-988

    • DOI

      10.1002/pssc.201510012

    • Related Report
      2015 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] 大気圧CVD法による酸化スズ及び酸化ガリウムナノワイヤーの成長2015

    • Author(s)
      寺迫智昭、倉重利規、矢木正和
    • Journal Title

      電子情報通信学会技術研究報告 CPM2015-21-CPM2015-30

      Volume: 115 Pages: 17-22

    • Related Report
      2015 Research-status Report
    • Acknowledgement Compliant
  • [Journal Article] 気相-液相-固相成長機構による酸化ガリウムナノ構造の成長と形態制御2015

    • Author(s)
      寺迫智昭、大森裕也、河﨑雄樹、佐伯拓哉、門田直己、矢木正和
    • Journal Title

      電子情報通信学会技術研究報告 R2015-22-R2015-51

      Volume: 115 Pages: 63-68

    • Related Report
      2015 Research-status Report
    • Acknowledgement Compliant
  • [Presentation] Possibility of Selective and Morphology-Controlled Growth of CuO and Cu2O Films2017

    • Author(s)
      Tomoaki Terasako, Kohki Ohnishi, Hideyuki Okada, Shohei Obara, Masakazu Yagi
    • Organizer
      44th International Conference on Metallurgical Coatings & Thin Films
    • Place of Presentation
      Town & Country Resort Hotel (San Diego, USA)
    • Year and Date
      2017-04-27
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Vapor-Liquid-Solid Growth of SnO2 Nanowires Utilizing Alternate Source Supply and Their Photoluminescence Properties2017

    • Author(s)
      Tomoaki Terasako, Kohki Kohno, Masakazu Yagi
    • Organizer
      44th International Conference on Metallurgical Coatings & Thin Films
    • Place of Presentation
      Town & Country Resort Hotel (San Diego, USA)
    • Year and Date
      2017-04-24
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 原料交互供給によるSnO2ナノワイヤーのVLS成長とフォトルミネッセンス特性2017

    • Author(s)
      寺迫智昭、河野幸輝、矢木正和
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Year and Date
      2017-03-16
    • Related Report
      2016 Annual Research Report
  • [Presentation] Cu(NO3)2・3H2OをCu原料に用いたFe支援CBD法によるCuO薄膜とCu2O薄膜の選択成長2017

    • Author(s)
      寺迫智昭、大西航暉、岡田英之、小原翔平
    • Organizer
      第64回応用物理学会春季学術講演会
    • Place of Presentation
      パシフィコ横浜(神奈川県横浜市)
    • Year and Date
      2017-03-16
    • Related Report
      2016 Annual Research Report
  • [Presentation] Vapor-Liquid-Solid Growth of SnO2and Ga2O3 Nanowires by Atmospheric-pressure CVD Utilizing Alternate Source Supply2016

    • Author(s)
      Tomoaki Teraako, Kohki Kohno, MasakazuYagi
    • Organizer
      第26回日本MRS年次大会 A-3 先進機能性酸化物マテリアル
    • Place of Presentation
      横浜情報文化センター(神奈川県横浜市)
    • Year and Date
      2016-12-20
    • Related Report
      2016 Annual Research Report
  • [Presentation] Selective Growth of CuO and Cu2O Films and Fabrication of Their Heterojunctions with ZnO Nanorods by Chemical Bath Deposition2016

    • Author(s)
      Tomoaki Terasako, Kohki Ohnishi, Hideyuki Okada, Shohei Obara, Masakazu Yagi
    • Organizer
      第26回日本MRS年次大会 A-3 先進機能性酸化物マテリアル
    • Place of Presentation
      横浜情報文化センター(神奈川県横浜市)
    • Year and Date
      2016-12-20
    • Related Report
      2016 Annual Research Report
  • [Presentation] Vapor-Liquid-Solid Growth of Metal Oxide Nanowires Utilizing Alternate Source Supply2016

    • Author(s)
      Tomoaki Terasako1, Kohki Kohno, Masakazu Yagi
    • Organizer
      The 9th International Workshop on Zinc Oxide and Related Materials
    • Place of Presentation
      National Taiwan University (Taipei, Taiwan)
    • Year and Date
      2016-11-01
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 原料交互供給によるSnO2ナノワイヤーの気相-液相-固相成長2016

    • Author(s)
      寺迫智昭、大西航輝、岡田英之、小原翔平、河野幸輝、矢木正和
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟県新潟市)
    • Year and Date
      2016-09-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] Cu(NO3)23H2OをCu原料に用いたCBD法によるCuO薄膜とCu2O薄膜の選択成長と表面モフォロジー2016

    • Author(s)
      寺迫智昭、大西航輝、岡田英之、小原翔平、河野幸輝
    • Organizer
      第77回応用物理学会秋季学術講演会
    • Place of Presentation
      朱鷺メッセ(新潟県新潟市)
    • Year and Date
      2016-09-14
    • Related Report
      2016 Annual Research Report
  • [Presentation] 原料交互供給法による酸化スズナノワイヤーの成長と形状制御2016

    • Author(s)
      寺迫智昭、矢木正和
    • Organizer
      電子情報通信学会CPM研究会
    • Place of Presentation
      愛媛大学工学部 (愛媛県松山市)
    • Year and Date
      2016-07-23
    • Related Report
      2016 Annual Research Report
  • [Presentation] Selective preparations of CuO and Cu2O and formations of their heterojunctions with ZnO nanorods by chemical bath deposition2016

    • Author(s)
      Terasako, Yuya Ohmori, Takuya Saeki, Naoki Monden, Masakazu Yagi
    • Organizer
      Thin Films 2016
    • Place of Presentation
      Holiday Inn Atrium (Singapore)
    • Year and Date
      2016-07-14
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 溶液成長法によるCuO及びCu2O薄膜の成長と表面モフォロジー2016

    • Author(s)
      寺迫智昭、門田直己、大森裕也、佐伯拓哉
    • Organizer
      電子情報通信学会 材料デバイスサマーミーティング
    • Place of Presentation
      機械振興会館(東京都港区)
    • Year and Date
      2016-06-17
    • Related Report
      2016 Annual Research Report
  • [Presentation] Preparation of Cu2O Films by Fe-assisted Chemical Bath Deposition Technique2016

    • Author(s)
      Tomoaki Terasako, Yuya Ohmori, Takuya Saeki, Naoki Monden, Masakazu Yagi
    • Organizer
      43rd International Conference on Metallurgical Coatings and Thin Films
    • Place of Presentation
      Town & Country Resort Hotel (San Diego, USA)
    • Year and Date
      2016-04-28
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Growth and Morphology Control of β-Ga2O3Nanostructures by Atmospheric-pressure CVD2016

    • Author(s)
      Tomoaki Terasako, Yuki Kawasaki, Masakazu Yagi
    • Organizer
      43rd International Conference on Metallurgical Coatings and Thin Films
    • Place of Presentation
      Town & Country Resort Hotel (San Diego, USA)
    • Year and Date
      2016-04-25
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Fe支援CBD法によるCu2O薄膜の成長2016

    • Author(s)
      寺迫智昭、大森裕也、佐伯拓哉、門田直己、宮田晃
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学大岡山キャンパス(東京都目黒区大岡山)
    • Year and Date
      2016-03-19
    • Related Report
      2015 Research-status Report
  • [Presentation] β-Ga2O3ナノワイヤーの形状制御とフォトルミネッセンス特性2016

    • Author(s)
      寺迫智昭、河﨑雄樹、矢木正和
    • Organizer
      第63回応用物理学会春季学術講演会
    • Place of Presentation
      東京工業大学大岡山キャンパス(東京都目黒区大岡山)
    • Year and Date
      2016-03-19
    • Related Report
      2015 Research-status Report
  • [Presentation] Shape-Controllability of β-Ga2O3 Nanostructures Grown by Atmospheric-pressure CVD2015

    • Author(s)
      Tomoaki Terasako, Yuya Ohmori, Yuki Kawasaki, Takuya Saeki, Naoki Monden, Masakazu Ygai
    • Organizer
      第25回日本MRS年次大会 Symposium A-1 Functional Oxide Materials (国際セッション)
    • Place of Presentation
      横浜情報文化センター (神奈川県横浜市)
    • Year and Date
      2015-12-06
    • Related Report
      2015 Research-status Report
  • [Presentation] Atmospheric-pressure CVD Growth of SnO2 and Ga2O3 Nanostructures2015

    • Author(s)
      Tomoaki Terasako, Toshiki Kurashige, Yuya Ohmori, Yuki Kawasaki, Takuya Saeki, Naoki Monden, Masakazu Yagi
    • Organizer
      International Workshop on Gallium Oxide and Related Materials 2015 (IWGO 2015)
    • Place of Presentation
      京都大学桂キャンパス (京都府京都市左京区)
    • Year and Date
      2015-11-04
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research
  • [Presentation] 大気圧CVD法によるβ-Ga2O3ナノ構造の成長とフォトルミネッセンス特性2015

    • Author(s)
      寺迫智昭、大森裕也、河﨑雄樹、佐伯拓哉、門田直己、宮田晃、矢木正和
    • Organizer
      第76回応用物理学会秋季学術講演会
    • Place of Presentation
      名古屋国際会議場(愛知県名古屋熱田区)
    • Year and Date
      2015-09-13
    • Related Report
      2015 Research-status Report
  • [Presentation] 気相-液相-固相成長機構による酸化ガリウムナノ構造の成長と形態制御2015

    • Author(s)
      寺迫智昭、大森裕也、河﨑雄樹、佐伯拓哉、門田直己、矢木正和
    • Organizer
      電子情報通信学会電子部品・材料(CPM)研究会
    • Place of Presentation
      青森県観光物産館アスパム(青森県青森市)
    • Year and Date
      2015-08-27
    • Related Report
      2015 Research-status Report
  • [Presentation] 大気圧CVD法による酸化スズ及び酸化ガリウムナノワイヤーの成長2015

    • Author(s)
      寺迫智昭、倉重利規、矢木正和
    • Organizer
      電子情報通信学会・材料デバイスサマーミーティング
    • Place of Presentation
      機械振興会館(東京都港区)
    • Year and Date
      2015-06-19
    • Related Report
      2015 Research-status Report
  • [Presentation] Growth of β-gallium oxide films and nanostructures by atmospheric-pressure CVD using gallium and water as source materials2015

    • Author(s)
      Tomoaki Terasako, Hikaru Ichinotani, Masakazu Yagi
    • Organizer
      EuroCVD20
    • Place of Presentation
      Sempach (Switzerland)
    • Year and Date
      2015-06-15
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research

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Published: 2014-04-04   Modified: 2018-03-22  

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