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Study on light-emitting Si-based thin films

Research Project

Project/Area Number 26390073
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeMulti-year Fund
Section一般
Research Field Optical engineering, Photon science
Research InstitutionGunma University

Principal Investigator

MIURA Kenta  群馬大学, 大学院理工学府, 准教授 (40396651)

Project Period (FY) 2014-04-01 – 2017-03-31
Project Status Completed (Fiscal Year 2016)
Budget Amount *help
¥4,940,000 (Direct Cost: ¥3,800,000、Indirect Cost: ¥1,140,000)
Fiscal Year 2016: ¥1,170,000 (Direct Cost: ¥900,000、Indirect Cost: ¥270,000)
Fiscal Year 2015: ¥1,300,000 (Direct Cost: ¥1,000,000、Indirect Cost: ¥300,000)
Fiscal Year 2014: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
KeywordsSi / SiO2 / 多層膜 / スパッタリング / 発光 / 微細周期構造 / 光取り出し効率 / シリコン / 周期構造
Outline of Final Research Achievements

We investigated the effects of Si-layer-thickness ratios on ultraviolet (UV) peak intensities of Si/SiO2 multilayered films produced by alternately stacking several-nanometer-thick Si and SiO2 layers using radio-frequency sputtering for the first time. The Si-layer-thickness ratio of the Si/SiO2 film is a very important parameter for enhancing the peak intensity because the ratio is concerned with the size of Si nanocrystals in the film, which might affect the intensity of the UV light emission from the film. We prepared seven samples with various estimated Si-layer-thickness ratios, and measured the photoluminescence spectra of the samples after annealing at 1150, 1200, and 1250 deg C for 25 min. From our experiments, we estimate that the proper Si-layer-thickness ratio to obtain the strongest UV peaks from the Si/SiO2 multilayered films is around 0.29. Such a UV-light emitting thin film is expected to be used in future higher-density optical-disk systems.

Report

(4 results)
  • 2016 Annual Research Report   Final Research Report ( PDF )
  • 2015 Research-status Report
  • 2014 Research-status Report
  • Research Products

    (10 results)

All 2017 2016 2015

All Journal Article (4 results) (of which Peer Reviewed: 3 results,  Open Access: 3 results,  Acknowledgement Compliant: 2 results) Presentation (6 results) (of which Int'l Joint Research: 6 results,  Invited: 2 results)

  • [Journal Article] Photoluminescence and X-ray diffraction properties of europium and silver co-doped tantalum-oxide thin films deposited by co-sputtering2017

    • Author(s)
      K. Shimada, K. Miura, R. Fujii, M. Kanakubo, W. Kada, and O. Hanaizumi
    • Journal Title

      J. Mater. Sci. Chem. Eng.

      Volume: 5 Issue: 02 Pages: 35-40

    • DOI

      10.4236/msce.2017.52004

    • Related Report
      2016 Annual Research Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Luminescent periodic microstructures for medical applications2016

    • Author(s)
      K. Miura
    • Journal Title

      J. Mater. Sci. Eng.

      Volume: 5 Issue: 07 Pages: 74-74

    • DOI

      10.4172/2169-0022.c1.046

    • Related Report
      2016 Annual Research Report
    • Open Access
  • [Journal Article] Size and dopant-concentration dependence of photoluminescence properties of ion-implanted phosphorus- and boron-codoped Si nanocrystals2015

    • Author(s)
      T. Nakamura, S. Adachi, M. Fujii, H. Sugimoto, K. Miura, and S. Yamamoto
    • Journal Title

      Phys. Rev. B

      Volume: 91 Issue: 16 Pages: 165424-165424

    • DOI

      10.1103/physrevb.91.165424

    • Related Report
      2015 Research-status Report
    • Peer Reviewed
  • [Journal Article] Effects of Si-layer-thickness ratio on UV-light-emission intensity from Si/SiO2 multilayered thin films prepared using radio-frequency sputtering2015

    • Author(s)
      K. Miura, H. Hoshino, M. Honmi, and O. Hanaizumi
    • Journal Title

      Materials Sciences and Applications

      Volume: 6 Issue: 03 Pages: 215-219

    • DOI

      10.4236/msa.2015.63025

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Presentation] Fabrication of ZnO periodic microstructures and evaluation of their luminescence2016

    • Author(s)
      M. Saito, O. Matsumoto, D. Yamazaki, Y. Hirano, K. Noguchi, W. Kada, K. Miura, and O. Hanaizumi
    • Organizer
      3rd International Symposium of Gunma University Medical Innovation and 8th International Conference on Advanced Micro-Device Engineering
    • Place of Presentation
      Kiryu, Japan
    • Year and Date
      2016-12-09
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Photoluminescence properties of Eu and Ag co-doped Ta2O5 thin films deposited by co-sputtering2016

    • Author(s)
      K. Shimada, M. Kanakubo, S. Segawa, M. Machida, K. Miura, W. Kada, K. Noguchi, and O. Hanaizumi
    • Organizer
      3rd International Symposium of Gunma University Medical Innovation and 8th International Conference on Advanced Micro-Device Engineering
    • Place of Presentation
      Kiryu, Japan
    • Year and Date
      2016-12-09
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Light-emission properties of Yb and Ag co-doped Ta2O5 thin films fabricated by sputtering2016

    • Author(s)
      M. Kanakubo, K. Shimada, S. Segawa, M. Machida, K. Miura, W. Kada, K. Noguchi, and O. Hanaizumi
    • Organizer
      3rd International Symposium of Gunma University Medical Innovation and 8th International Conference on Advanced Micro-Device Engineering
    • Place of Presentation
      Kiryu, Japan
    • Year and Date
      2016-12-09
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Luminescent thin films for solar cell applications2016

    • Author(s)
      K. Miura and O. Hanaizumi
    • Organizer
      7th Annual Global Congress of Catalysis
    • Place of Presentation
      Goyang, Korea
    • Year and Date
      2016-07-01
    • Related Report
      2016 Annual Research Report
    • Int'l Joint Research / Invited
  • [Presentation] Periodic structures for Si optoelectronics2015

    • Author(s)
      K. Miura, W. Kada, and O. Hanaizumi
    • Organizer
      5th International Symposium on Element Innovation
    • Place of Presentation
      Kiryu, Japan
    • Year and Date
      2015-11-30
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research / Invited
  • [Presentation] Simple fabrication of ZnO periodic structures for Si-based thin-film solar cells2015

    • Author(s)
      O. Matsumoto, M. Saito, K. Noguchi, W. Kada, K. Miura, and O. Hanaizumi
    • Organizer
      5th International Symposium on Element Innovation
    • Place of Presentation
      Kiryu, Japan
    • Year and Date
      2015-11-30
    • Related Report
      2015 Research-status Report
    • Int'l Joint Research

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Published: 2014-04-04   Modified: 2018-03-22  

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