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Development of Highly-Durable Surface Textured Forming Die by In-Plane Hetero-Structuring of Diamond Like Carbon Films

Research Project

Project/Area Number 26820327
Research Category

Grant-in-Aid for Young Scientists (B)

Allocation TypeMulti-year Fund
Research Field Material processing/Microstructural control engineering
Research InstitutionTokyo Metropolitan University

Principal Investigator

Shimizu Tetsuhide  首都大学東京, システムデザイン学部, 助教 (70614543)

Project Period (FY) 2014-04-01 – 2016-03-31
Project Status Completed (Fiscal Year 2015)
Budget Amount *help
¥3,900,000 (Direct Cost: ¥3,000,000、Indirect Cost: ¥900,000)
Fiscal Year 2015: ¥1,430,000 (Direct Cost: ¥1,100,000、Indirect Cost: ¥330,000)
Fiscal Year 2014: ¥2,470,000 (Direct Cost: ¥1,900,000、Indirect Cost: ¥570,000)
Keywords表面テクスチャリング / ドライ加工 / ダイヤモンド状炭素 / マイクロ金型 / ヘテロ構造 / 耐摩耗性 / ボールオンディスク試験 / イオン化物理蒸着法 / マイクロ加工 / ダイヤモンド状炭素膜
Outline of Final Research Achievements

To realize release of stress concertation at edge of textured surface under dry sliding friction, the present study porpposed in-plain hetero-structured DLC films, which has a textured structure filled with DLC films with different hardness. By combining ionized vapor deposition, oxygen plasma etching, and plasma enhanced chemical vapor deposition, proposed structure was achieved successfully in an single vacuum system. Tribological properties of fabricated hetero-structured DLC films under dry friction showed the expected function of prior wear of soft phase DLC for the self-construction of textured structure. Structural design in view of wear properties of the in-plain hetero-structured DLC film was theoretically discussed using Archard’s and Bhushan’s wear equations.

Report

(3 results)
  • 2015 Annual Research Report   Final Research Report ( PDF )
  • 2014 Research-status Report
  • Research Products

    (30 results)

All 2016 2015 2014

All Journal Article (8 results) (of which Int'l Joint Research: 1 results,  Peer Reviewed: 8 results,  Acknowledgement Compliant: 5 results,  Open Access: 3 results) Presentation (22 results) (of which Int'l Joint Research: 6 results,  Invited: 2 results)

  • [Journal Article] Process stabilization by peak current regulation in reactive high-power impulse magnetron sputtering of hafnium nitride2016

    • Author(s)
      T. Shimizu, M. Villamayor, D. Lundin, U. Helmersson
    • Journal Title

      Journal of Physics D: Applied Physics

      Volume: 49 Issue: 6 Pages: 065202-065202

    • DOI

      10.1088/0022-3727/49/6/065202

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Int'l Joint Research / Acknowledgement Compliant
  • [Journal Article] Classification of mesoscopic tribological properties under dry sliding friction for microforming operation2015

    • Author(s)
      T. Shimizu, M. Yang, K. Manabe
    • Journal Title

      Wear

      Volume: 330-331 Pages: 49-58

    • DOI

      10.1016/j.wear.2015.01.050

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Surface Texturing on Micro-Die and In-situ Observation of Its Dry Friction and Wear Behavior2015

    • Author(s)
      掛川泰, 清水徹英, 鷺坂芳弘, 楊明
    • Journal Title

      Journal of the Japan Society for Technology of Plasticity

      Volume: 56 Issue: 657 Pages: 891-896

    • DOI

      10.9773/sosei.56.891

    • NAID

      130005104159

    • ISSN
      0038-1586, 1882-0166
    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Development of microforming process combined with thin film transfer printing2015

    • Author(s)
      Kazushi Koshimizu, Qiu Zheng, Tetsuhide Shimizu, Mig Yang
    • Journal Title

      Manufacturing Review

      Volume: 2015,2,6 Pages: 1-6

    • DOI

      10.1051/mfreview/2015009

    • Related Report
      2015 Annual Research Report
    • Peer Reviewed / Open Access
  • [Journal Article] Impact of pulse duration in high power impulse magnetron sputtering on the low-temperature growth of wurtzite phase (Ti,Al)N films with high hardness2015

    • Author(s)
      T. Shimizu, Y. Teranishi, K. Morikawa, H. Komiya, T. Watanabe, H. Nagasaka, M.Yang:
    • Journal Title

      Thin Solid Films

      Volume: 581 Pages: 39-47

    • DOI

      10.1016/j.tsf.2014.11.076

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Acknowledgement Compliant
  • [Journal Article] Micro-texturing of DLC thin film coatings and its tribological performance under dry sliding friction for microforming operation2014

    • Author(s)
      T. Shimizu, T. Kakegawa, M. Yang
    • Journal Title

      Journal of Procedia Engineering

      Volume: 81 Pages: 1884-1889

    • DOI

      10.1016/j.proeng.2014.10.251

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Open Access / Acknowledgement Compliant
  • [Journal Article] Tribological characterization of boron nitride films against pure-titanium for microforming die application2014

    • Author(s)
      Y. Jin, S. Yasuhara, T. Shimizu, M. Yang
    • Journal Title

      Journal of Procedia Engineering

      Volume: 81 Pages: 1909-1914

    • DOI

      10.1016/j.proeng.2014.10.255

    • Related Report
      2014 Research-status Report
    • Peer Reviewed / Open Access
  • [Journal Article] HIPIMS Deposition of TiAlN Films on Inner Wall of Micro-Dies and Its Applicability in Micro-Sheet Metal Forming2014

    • Author(s)
      T. Shimizu, H.Komiya, T.Watanabe, Y. Teranishi, H. Nagasaka, K. Morikawa, M.Yang
    • Journal Title

      Surface and Coatings Technology

      Volume: In Press Pages: 44-51

    • DOI

      10.1016/j.surfcoat.2014.02.008

    • Related Report
      2014 Research-status Report
    • Peer Reviewed
  • [Presentation] Growth of (Ti, Al) N films at inner wall of sub-millimeter scale small holes by high power impulse magnetron sputtering2016

    • Author(s)
      T. Shimizu, Y. Teranishi, K. Morikawa, Y. Kondo, H. Nagasaka, M. Yang
    • Organizer
      1st International Symposium of Vacuum Soceiety of Phillipine
    • Place of Presentation
      Manila, Phillipine
    • Year and Date
      2016-01-14
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effect of HiPIMS peak current regulation in TiO2 thin film deposition2016

    • Author(s)
      M. Villamayor, T. Shmizu, R. Paulo Viloan, D. Lundin, U. Helmersson
    • Organizer
      1st International Symposium of Vacuum Soceiety of Phillipine
    • Place of Presentation
      Manila, Phillipine
    • Year and Date
      2016-01-14
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] 工具摩耗の原因と コーティングや機能面付与の効果2015

    • Author(s)
      清水徹英
    • Organizer
      平成27年度 第63回塑性加工技術フォーラム 「金型の寿命向上に向けた最新技術」
    • Place of Presentation
      諏訪市,長野県
    • Year and Date
      2015-10-16
    • Related Report
      2015 Annual Research Report
    • Invited
  • [Presentation] Application of (Ti,Al)N hard coatings to micro-circular drawing die using high-power impulse magnetron sputtering2015

    • Author(s)
      T. Shimizu, M. Yang
    • Organizer
      The 8th Asian Workshop on Micro/Nano Forming Technology
    • Place of Presentation
      諏訪市、長野県
    • Year and Date
      2015-10-14
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] カーボンオニオン微粒子の固体潤滑特性に及ぼすその添加量および基材表面粗さの影響2015

    • Author(s)
      戸田晶子,清水徹英,楊明
    • Organizer
      日本機械学会2015年度年次大会
    • Place of Presentation
      札幌市,北海道
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] 軟質/硬質相を面内配置した DLC 複合膜の作製とそのトライボロジー特性評価2015

    • Author(s)
      宮本武,清水徹英,楊明
    • Organizer
      日本機械学会2015年度年次大会
    • Place of Presentation
      札幌市,北海道
    • Year and Date
      2015-09-13
    • Related Report
      2015 Annual Research Report
  • [Presentation] Development of in-situ observation system of dynamic contact interface between dies and materials during microforming operation2015

    • Author(s)
      T. Shimizu, T. Kakegawa, M. Yang
    • Organizer
      International Conference on New Forming Technology 2015
    • Place of Presentation
      Glassgow, UK
    • Year and Date
      2015-08-06 – 2015-08-09
    • Related Report
      2014 Research-status Report
  • [Presentation] Development of in-situ observation system of dynamic contact interface between dies and materials during microforming operation2015

    • Author(s)
      T. Shimizu, T. Kakegawa, M. Yang
    • Organizer
      4th International Conference on New Forming Technology (ICNFT2015)
    • Place of Presentation
      Glasgow, UK
    • Year and Date
      2015-08-06
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Growth and mechanical properties of (Ti, Al) N films at inner wall of sub-millimeter scale small holes deposited by HIPIMS2015

    • Author(s)
      T. Shimizu, Y. Teranishi, K. Morikawa, Y. Kondo, H. Nagasaka, M. Yang
    • Organizer
      6th Ineternational Conference on HIPIMS 2015
    • Place of Presentation
      Braunschweig, Germany
    • Year and Date
      2015-06-10
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] マイクロ金型摺動界面のその場観察による表面テクスチャリングの有効性検証2015

    • Author(s)
      清水徹英,掛川泰,宮本武,伊藤國吉,楊明
    • Organizer
      平成27年度塑性加工春季講演会
    • Place of Presentation
      慶應義塾大学 矢上キャンパス,神奈川県横浜市
    • Year and Date
      2015-05-29 – 2015-05-31
    • Related Report
      2014 Research-status Report
  • [Presentation] マイクロ金型摺動界面のその場観察による表面テクスチャリングの有効性検証2015

    • Author(s)
      清水徹英,掛川泰,宮本武、伊藤國吉,楊明
    • Organizer
      平成27年度 日本塑性加工学会 塑性加工春季講演会
    • Place of Presentation
      横浜市,神奈川県
    • Year and Date
      2015-05-29
    • Related Report
      2015 Annual Research Report
  • [Presentation] 熱フィラメントCVD法による窒化ホウ素膜の形成と純チタンに対する耐凝着性評価2015

    • Author(s)
      Jin Yong,安原重雄,清水徹英,楊明
    • Organizer
      平成27年度 日本塑性加工学会春講演会
    • Place of Presentation
      横浜市,神奈川県
    • Year and Date
      2015-05-29
    • Related Report
      2015 Annual Research Report
  • [Presentation] Classification of mesoscopic tribological properties under dry sliding friction for microforming operation2015

    • Author(s)
      T. Shimizu, M. Yang, K. Manabe
    • Organizer
      20th International Conference on Wear of Materials
    • Place of Presentation
      Toronto, Canada
    • Year and Date
      2015-04-12 – 2015-04-16
    • Related Report
      2014 Research-status Report
  • [Presentation] Classification of mesoscopic tribological properties under dry sliding friction for microforming operation2015

    • Author(s)
      Tetsuhide Shimizu, Ming Yang, Ken-ichi Manabe
    • Organizer
      Wear of Materials (WOM)
    • Place of Presentation
      Tronto,Canada
    • Year and Date
      2015-04-12
    • Related Report
      2015 Annual Research Report
    • Int'l Joint Research
  • [Presentation] Effect of HIPIMS pulse frequency on low temperature deposition of TiAlN films2015

    • Author(s)
      T. Shimizu, Y. Teranishi, K. Morikiwa, H. Komiya, H. Nagasaka, M. Yang
    • Organizer
      IS-Plasma2015
    • Place of Presentation
      名古屋大学,愛知県名古屋市
    • Year and Date
      2015-03-26 – 2015-03-31
    • Related Report
      2014 Research-status Report
  • [Presentation] Low temperature deposition of TiAlN thin films by high-power impulse magnetron sputtering2014

    • Author(s)
      T. Shimizu, Y. Teranishi, K. Morikiwa, H. Komiya, H. Nagasaka, Y. Kondo, M. Yang
    • Organizer
      2014 International Conference for Leading and Young Materials Scientists
    • Place of Presentation
      Sanya, China
    • Year and Date
      2014-12-21 – 2014-12-25
    • Related Report
      2014 Research-status Report
    • Invited
  • [Presentation] Micro-texturing of DLC thin film coatings and its tribological performance under dry sliding friction for microforming operation2014

    • Author(s)
      T. Shimizu, T. Kakegawa, M. Yang
    • Organizer
      International Conference on Technology of Plasticity
    • Place of Presentation
      名古屋国際会議場,愛知県名古屋市
    • Year and Date
      2014-10-19 – 2014-10-24
    • Related Report
      2014 Research-status Report
  • [Presentation] 乾燥摩擦の寸法効果モデルによる金属箔材の摺動摩擦挙動解析2014

    • Author(s)
      清水徹英, 楊明, 真鍋健一
    • Organizer
      第65回塑性加工連合講演会
    • Place of Presentation
      岡山大学 津島キャンパス,岡山県岡山市
    • Year and Date
      2014-10-11 – 2014-10-13
    • Related Report
      2014 Research-status Report
  • [Presentation] マイクロ金型への表面テクスチャリングとそのドライ摩擦・摩耗特性評価2014

    • Author(s)
      掛川泰, 清水徹英, 楊明
    • Organizer
      日本機械学会2014年度年次大会
    • Place of Presentation
      東京電機大学 東京千住キャンパス,東京都足立区
    • Year and Date
      2014-09-07 – 2014-09-10
    • Related Report
      2014 Research-status Report
  • [Presentation] HIPIMS法によるTiAlN膜の低温薄膜形成とその膜特性評価2014

    • Author(s)
      清水徹英, 渡部友太郎, 寺西義一, 長坂浩志, 小宮英俊, 楊明
    • Organizer
      日本機械学会2014年度年次大会
    • Place of Presentation
      東京電機大学 東京千住キャンパス,東京都足立区
    • Year and Date
      2014-09-07 – 2014-09-10
    • Related Report
      2014 Research-status Report
  • [Presentation] Effects of HIPIMS Deposition Pressure on (Ti, Al)N Film Properties at Inner Wall of Sub-Millimeter Scale Small Holes2014

    • Author(s)
      T. Shimizu, H. Komiya, T. Watanabe, Y. Teranishi, H. Nagasaka, K. Morikawa, M. Yang,
    • Organizer
      4th International Conference on Fundamental and Application of HIPIMS(HIPIMS2013)
    • Place of Presentation
      Sheffield, UK
    • Year and Date
      2014-06-30 – 2014-07-03
    • Related Report
      2014 Research-status Report
  • [Presentation] Influence of HIPIMS Pulse Duration on the Properties of TiAlN Films Deposited at Low Substrate Temperature2014

    • Author(s)
      T. Shimizu, T. Watanabe, Y. Teranishi, H. Nagasaka, H. Komiya, K. Morikawa, M. Yang
    • Organizer
      E-MRS spring conference
    • Place of Presentation
      Lille, France
    • Year and Date
      2014-05-27 – 2014-05-29
    • Related Report
      2014 Research-status Report

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Published: 2014-04-04   Modified: 2017-05-10  

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