固相拡散・反応を利用した, シリコン単結晶ウエハーと一体構造の超伝導電子素子の製作

• Project/Area Number: 56750194
• Research Category: Grant-in-Aid for Encouragement of Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: 電子材料工学
• Research Institution: Tohoku University
• Principal Investigator: 大矢 銀一郎 東北大学, 電気通信研究所, 助手
• Project Period (FY): 1981
• Project Status: Completed (Fiscal Year 1981)
• Budget Amount: ¥900,000 (Direct Cost: ¥900,000); Fiscal Year 1981: ¥900,000 (Direct Cost: ¥900,000)