熱窒化膜を用いたISFETに関する研究

• Project/Area Number: 56750272
• Research Category: Grant-in-Aid for Encouragement of Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: 計測・制御工学
• Research Institution: Tohoku University
• Principal Investigator: 江刺 正喜 東北大学, 工学部, 助手
• Project Period (FY): 1981
• Project Status: Completed (Fiscal Year 1981)
• Budget Amount: ¥800,000 (Direct Cost: ¥800,000); Fiscal Year 1981: ¥800,000 (Direct Cost: ¥800,000)