検出深さの大きい光電子分光法に用いた極微細構造における電子状態の非破壊測定の研究

Research Project

Project/Area Number	57217037
Research Category	Grant-in-Aid for Special Project Research
Allocation Type	Single-year Grants
Research Institution	Musashi Institute of Technology
Principal Investigator	服部健雄武蔵工業大学, 工学部, 教授
Project Period (FY)	1982
Project Status	Completed (Fiscal Year 1982)
Budget Amount *help	¥6,000,000 (Direct Cost: ¥6,000,000) Fiscal Year 1982: ¥6,000,000 (Direct Cost: ¥6,000,000)