集積回路の三次元化に関する基礎研究

• Project/Area Number: 57550187
• Research Category: Grant-in-Aid for General Scientific Research (C)
• Allocation Type: Single-year Grants
• Research Field: 電子材料工学
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: 松村 正清 東京工業大学, 工学部, 助教授
• Project Period (FY): 1982
• Project Status: Completed (Fiscal Year 1982)
• Budget Amount: ¥1,900,000 (Direct Cost: ¥1,900,000); Fiscal Year 1982: ¥1,900,000 (Direct Cost: ¥1,900,000)