化学気相析出法による酸化物薄膜センサーの作製とその評価

Research Project

Project/Area Number	58208009
Research Category	Grant-in-Aid for Special Project Research
Allocation Type	Single-year Grants
Research Institution	Nagaoka University of Technology
Principal Investigator	鎌田喜一郎長岡技術科学大学, 工学部, 助教授
Project Period (FY)	1983
Project Status	Completed (Fiscal Year 1983)
Budget Amount *help	¥1,200,000 (Direct Cost: ¥1,200,000) Fiscal Year 1983: ¥1,200,000 (Direct Cost: ¥1,200,000)