化学蒸着法によるシリサイド生成反応の電界イオン顕微鏡観察

• Project/Area Number: 58540256
• Research Category: Grant-in-Aid for General Scientific Research (C)
• Allocation Type: Single-year Grants
• Research Field: 物理化学一般
• Research Institution: Nagoya University
• Principal Investigator: 森川 浩志 名古屋大学, 工学部, 講師
• Project Period (FY): 1983
• Project Status: Completed (Fiscal Year 1983)
• Budget Amount: ¥1,000,000 (Direct Cost: ¥1,000,000); Fiscal Year 1983: ¥1,000,000 (Direct Cost: ¥1,000,000)