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化学蒸着法によるシリサイド生成反応の電界イオン顕微鏡観察
Research Project
All
Fiscal Year 1983
grantAwardInfo
Project/Area Number
58540256
Research Category
Grant-in-Aid for General Scientific Research (C)
Allocation Type
Single-year Grants
Research Field
物理化学一般
Research Institution
Nagoya University
Principal Investigator
森川 浩志
名古屋大学, 工学部, 講師
Project Period (FY)
1983
Project Status
Completed (Fiscal Year 1983)
Budget Amount
*help
¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 1983: ¥1,000,000 (Direct Cost: ¥1,000,000)