直線偏光反射チャンネル・スペクトルによる薄膜の屈折率と厚さの精密同時測定

• Project/Area Number: 58550022
• Research Category: Grant-in-Aid for General Scientific Research (C)
• Allocation Type: Single-year Grants
• Research Field: 物理計測・光学
• Research Institution: Tohoku University
• Principal Investigator: 山本 正樹 東北大学, 科学計測研究所, 助手
• Project Period (FY): 1983
• Project Status: Completed (Fiscal Year 1983)
• Budget Amount: ¥1,200,000 (Direct Cost: ¥1,200,000); Fiscal Year 1983: ¥1,200,000 (Direct Cost: ¥1,200,000)