スパッタ法によるSi‐遷移金属系アモルファス窒化物薄膜の合成とその結晶化過程

• Project/Area Number: 58550500
• Research Category: Grant-in-Aid for General Scientific Research (C)
• Allocation Type: Single-year Grants
• Research Field: 無機工業化学
• Research Institution: Osaka University
• Principal Investigator: 延谷 宏治 大阪大学, 産業科学研究所, 助手
• Project Period (FY): 1983
• Project Status: Completed (Fiscal Year 1983)
• Budget Amount: ¥1,700,000 (Direct Cost: ¥1,700,000); Fiscal Year 1983: ¥1,700,000 (Direct Cost: ¥1,700,000)