メニュー
Search
Search Research Projects
Search Researchers
How to Use
Japanese
English
Back to previous page
スパッタ法によるSi‐遷移金属系アモルファス窒化物薄膜の合成とその結晶化過程
Research Project
All
Fiscal Year 1983
grantAwardInfo
Project/Area Number
58550500
Research Category
Grant-in-Aid for General Scientific Research (C)
Allocation Type
Single-year Grants
Research Field
無機工業化学
Research Institution
Osaka University
Principal Investigator
延谷 宏治
大阪大学, 産業科学研究所, 助手
Project Period (FY)
1983
Project Status
Completed (Fiscal Year 1983)
Budget Amount
*help
¥1,700,000 (Direct Cost: ¥1,700,000)
Fiscal Year 1983: ¥1,700,000 (Direct Cost: ¥1,700,000)