レーザーによる化合物半導体のマスクレス微細加工

• Project/Area Number: 58750237
• Research Category: Grant-in-Aid for Encouragement of Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: 電子材料工学
• Research Institution: Osaka University
• Principal Investigator: 高井 幹夫 大阪大学, 基礎工学部, 助手
• Project Period (FY): 1983
• Project Status: Completed (Fiscal Year 1983)
• Budget Amount: ¥1,000,000 (Direct Cost: ¥1,000,000); Fiscal Year 1983: ¥1,000,000 (Direct Cost: ¥1,000,000)