球面収差補正による微細電子線電子流密度分布の改善

• Project/Area Number: 58750303
• Research Category: Grant-in-Aid for Encouragement of Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: 電子機器工学
• Research Institution: Nagoya University
• Principal Investigator: 花井 孝明 名古屋大学, 工学部, 助手
• Project Period (FY): 1983
• Project Status: Completed (Fiscal Year 1983)
• Budget Amount: ¥700,000 (Direct Cost: ¥700,000); Fiscal Year 1983: ¥700,000 (Direct Cost: ¥700,000)