スキャンニングマイクロプラズマ超微細加工技術の研究

• Project/Area Number: 58850007
• Research Category: Grant-in-Aid for Developmental Scientific Research
• Allocation Type: Single-year Grants
• Research Field: Applied materials
• Research Institution: Osaka University
• Principal Investigator: 難波 進 大阪大学, 基礎工学部, 教授
• Project Period (FY): 1983 – 1984
• Project Status: Completed (Fiscal Year 1984)
• Budget Amount: ¥6,000,000 (Direct Cost: ¥6,000,000); Fiscal Year 1984: ¥1,000,000 (Direct Cost: ¥1,000,000); Fiscal Year 1983: ¥5,000,000 (Direct Cost: ¥5,000,000)