化合物半導体の新しい酸化法の研究

• Project/Area Number: 59550005
• Research Category: Grant-in-Aid for General Scientific Research (C)
• Allocation Type: Single-year Grants
• Research Field: Applied materials
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: 松村 正清 東京工業大学, 工学部, 助教授
• Project Period (FY): 1984
• Project Status: Completed (Fiscal Year 1984)
• Budget Amount: ¥1,800,000 (Direct Cost: ¥1,800,000); Fiscal Year 1984: ¥1,800,000 (Direct Cost: ¥1,800,000)