光照射を併用した有機金属マイクロ波プラズマ CVD 法による酸化亜鉛薄膜の成長

• Project/Area Number: 60750273
• Research Category: Grant-in-Aid for Encouragement of Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: 電子材料工学
• Research Institution: Kyoto University
• Principal Investigator: 清水 勝 京都大学, 工学部, 助手
• Project Period (FY): 1985
• Project Status: Completed (Fiscal Year 1985)
• Budget Amount: ¥900,000 (Direct Cost: ¥900,000); Fiscal Year 1985: ¥900,000 (Direct Cost: ¥900,000)