電子レンズの球面収差補正による走査透過電子顕微鏡の性能向上に関する研究

• Project/Area Number: 60750348
• Research Category: Grant-in-Aid for Encouragement of Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: 電子機器工学
• Research Institution: Nagoya University
• Principal Investigator: 花井 孝明 名古屋大学, 工学部, 助手
• Project Period (FY): 1985
• Project Status: Completed (Fiscal Year 1985)
• Budget Amount: ¥900,000 (Direct Cost: ¥900,000); Fiscal Year 1985: ¥900,000 (Direct Cost: ¥900,000)