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Study of Phase Changes and Physical Properties in Iron Nitride Films Prepared by Reactive Sputtering

Research Project

Project/Area Number 63460191
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field Physical properties of metals
Research InstitutionTokyo Institute of Technology, Faculty of Engineering

Principal Investigator

NITTONO Osamu  Tokyo Institute of Technology Faculty of Engineering, Professor, 工学部, 教授 (40016564)

Project Period (FY) 1988 – 1989
Project Status Completed (Fiscal Year 1989)
Budget Amount *help
¥6,900,000 (Direct Cost: ¥6,900,000)
Fiscal Year 1989: ¥2,100,000 (Direct Cost: ¥2,100,000)
Fiscal Year 1988: ¥4,800,000 (Direct Cost: ¥4,800,000)
KeywordsIron film / Iron nitride film / Sputtered film / Reactive sputtering / Magnetic film / Microstructure / Phase change / Phase separation / 鉄薄膜 / スパッタ膜 / 反応性スパッタリング / 微細構造 / 鉄窒化膜 / 磁気構造 / 磁壁 / ローレンツ電子顕微鏡 / 結晶配向性
Research Abstract

Iron nitride films are premising recording materials because of large saturation mangetization with a reasonable coercive force. In order to use these films as practical recording media, however, several problems including phase stability at elevated temperatures must be overcome. Therefore, in this study phase stability of iron nitride films subjected to elevated temperatures was examined together with phase or structural change taking place during heating process. Electric resistivity measurement of as-sputtered films was also done in order to evaluate a nature of film property, together with the measurement of magnetic property .(i.e.VSM curve). Main results are as follows:
(1) Every iron nitride films were found to be prepared by controlling the ratio of nitrogen gas to argon gas, the substrate temperature, discharge voltage and discharge current. It was also found that as-deposited films prepared at elevated substrate temperatures showed very sharp X-ray peaks and consisted of stab … More le iron nitride films such as epsilon-, gamma'- and alpha- phases.
(2) A structural change of as-deposited iron nitride films during heating process was investigated by in-situ electron microscopy observations: as-sputtered films contained a small amount of alpha-phase as locally distributed fine particles. Both nitrogen and iron atoms began to take place an site ordering with increasing temperature, and perfect ordered Fe_3N phase was realized during heating process. Two kinds of structural change from the epsilon phase to gamma' phase were observed for different heating rates: These features are well explained on the basis of both diffusion and shear displacement of nitrogen and iron atoms. Characteristics of VSM curves measured after various heating treatments were well explained by considering phase separation and precipitation occurred during heating process. Electric resistivity measurement of as-deposited films was done for various as-deposited iron films. It was found that as-deposited films prepared under higher sputtering gas pressures showed a slightly higher resistivity. This was well explained by considering that a qualitative change took place around grain boundaries formed in as-deposited films. The electric measurement of as-deposited films was found to be effective for evaluation of film property. Further detailed study is in progress. Less

Report

(3 results)
  • 1989 Annual Research Report   Final Research Report Summary
  • 1988 Annual Research Report
  • Research Products

    (19 results)

All Other

All Publications (19 results)

  • [Publications] Sheng Kai Gong and Osamu Nittono: "Electron Microscopy Observations of Heating Processs of Iron Nitride Films Prepared by Reactive Sputtering" Symposium on Materials Science. 8-9 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 王宝棣、入戸野修: "オ-ステナント系304ステンレス鋼の高周波窒化の研究" 1989年春期日本金属学会講演発表. 130 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 入戸野修: "膜の微細構造の解析法-回抄図形から得られる情報" 表面技術. 40. 1345-1349 (1989)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] 入戸野修: "膜応力とその物理冶金学的現象の影響" 日本金属学会会報(印刷中). 29. (1990)

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] M.Yamaguchi, S.K.Gong, Y.Nakamura & O.Nittono: "Measurement of the Saturation Magnetization of Iron and Iron Nitride Films by means of Lorentz Electron Microscopy" Journal of Materials Research(発表予定).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] S.K.Gong, Y.Nakamura and O.Nittono: "High Resolution Electron Microscopy Observations on Heating Process of Fe-N Films Prepared by Two-facing Type Sputtering" Materials Transaction,JIM(発表予定).

    • Description
      「研究成果報告書概要(和文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Sheng Kai Gong & Osamu Nittono: "Electron Microscopy Observations of Heating Process of Iron Nitride Films Prepared by Reactive Sputtering" Symposium on Materials Science 8, 1989.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] S.K.Gong, Y.Nakamura and O. Nittono: "High Resolution Electron Microscopy Observations on Heating Process of Fe-N Films prepared by Two-facing Type Reactive Sputtering" Materials Transaction, JIM.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Osamu Nittono: "Information of Film-Microstructure from Diffraction Patterns" The Journal of the Surface Finishing Society of Japan, 40 1345, 1989.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Osamu Nittono: "Film Stresses and Their Effects to Metallurgical Phenomena" Bulletin of the Japan Institute of Metals, 29.

    • Description
      「研究成果報告書概要(欧文)」より
    • Related Report
      1989 Final Research Report Summary
  • [Publications] Sheng Kai Gong and Osamu Nittono: "Electron Mocroscopy Observations of Heating Process of Iron Nitride Films Prepared by Reactive Sputtering" Symposium on Materials Science. 8-9 (1988)

    • Related Report
      1989 Annual Research Report
  • [Publications] M.Yamaguchi,S.K.Gong,Y.Nakamura&O.Nittono: "Measurement of the Saturation Magnetization of Iron and Iron Nitride Films by means of Lorentz Electron Microscopy" Journal of Materials Research.

    • Related Report
      1989 Annual Research Report
  • [Publications] S.K.Gong,Y.Nakamura and O.Nittono: "High Resolution Elcctron Microscopic Observations on Heating Process of Fe-N Films Prepared by Two-facing Sputtering Apparatus" Materials Transaction,JIM.

    • Related Report
      1989 Annual Research Report
  • [Publications] 入戸野修: "膜の微細構造の解析法-回析図形から得られる情報-" 表面技術. 40. 1345-1349 (1989)

    • Related Report
      1989 Annual Research Report
  • [Publications] 入戸野修: "反応スパッタ法で作製した膜の膜応力と構造について" 1990年春期日本金属学会講演発表予定.

    • Related Report
      1989 Annual Research Report
  • [Publications] 入戸野修: "膜応力とその物理治金学的理家への影響" 日本金属学会会報. 29. (1990)

    • Related Report
      1989 Annual Research Report
  • [Publications] Sheng,Kai Gong;Osamu,Nittono: Transaction of the Japan Institute of Metals. 29. 89-98 (1988)

    • Related Report
      1988 Annual Research Report
  • [Publications] Muneaki,Yamaguchi;Sheng Kai Gong;Yoshio,Nakamura;Osamu,Nittono: Materials Transaction, Japan Institute of Metals. 30. (1989)

    • Related Report
      1988 Annual Research Report
  • [Publications] Sheng,Kai Gong;Yoshio,Nakamura;Osamu Nittono: Materials Transaction, Japan Institute of Metals. 30. (1989)

    • Related Report
      1988 Annual Research Report

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Published: 1988-04-01   Modified: 2016-04-21  

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