走査トンネル顕微鏡を用いた微細加工の研究

• Project/Area Number: 63750006
• Research Category: Grant-in-Aid for Encouragement of Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Applied materials
• Research Institution: The University of Tokyo
• Principal Investigator: 深津 晋 東京大学, 助手
• Project Period (FY): 1988
• Project Status: Completed (Fiscal Year 1988)
• Budget Amount: ¥900,000 (Direct Cost: ¥900,000); Fiscal Year 1988: ¥900,000 (Direct Cost: ¥900,000)