低エネルギー粒子による損傷のない界面評価用電顕試料の作成法の開発

• Project/Area Number: 63750020
• Research Category: Grant-in-Aid for Encouragement of Young Scientists (A)
• Allocation Type: Single-year Grants
• Research Field: Applied materials
• Research Institution: Osaka University
• Principal Investigator: 川原田 洋 大阪大学, 工学部, 助手
• Project Period (FY): 1988
• Project Status: Completed (Fiscal Year 1988)
• Budget Amount: ¥800,000 (Direct Cost: ¥800,000); Fiscal Year 1988: ¥800,000 (Direct Cost: ¥800,000)