超音速フリージェットによるシリコンカーバイド薄膜の形成に関する基礎的研究

Research Project

Project/Area Number	96J00720
Research Category	Grant-in-Aid for JSPS Fellows
Allocation Type	Single-year Grants
Section	国内
Research Field	Applied materials science/Crystal engineering
Research Institution	Kyushu University
Principal Investigator	生駒嘉史
Project Period (FY)	1998
Project Status	Completed (Fiscal Year 1998)
Budget Amount *help	¥900,000 (Direct Cost: ¥900,000) Fiscal Year 1998: ¥900,000 (Direct Cost: ¥900,000)