多結晶Si結晶粒界に及ぼすプラズマ熱処理効果

• Project/Area Number: X00090----555006
• Research Category: Grant-in-Aid for General Scientific Research (C)
• Allocation Type: Single-year Grants
• Research Field: Applied materials
• Research Institution: Kanazawa University
• Principal Investigator: 長谷川 誠一 金沢大学, 工学部, 助教授
• Project Period (FY): 1980 – 1981
• Project Status: Completed (Fiscal Year 1981)
• Budget Amount: ¥2,500,000 (Direct Cost: ¥2,500,000); Fiscal Year 1981: ¥500,000 (Direct Cost: ¥500,000); Fiscal Year 1980: ¥2,000,000 (Direct Cost: ¥2,000,000)