集積回路の三次元化に関する基礎研究

• Project/Area Number: X00090----555123
• Research Category: Grant-in-Aid for General Scientific Research (C)
• Allocation Type: Single-year Grants
• Research Field: 電子材料工学
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: 松村 正清 東京工業大学, 工学部, 助教授
• Project Period (FY): 1980
• Project Status: Completed (Fiscal Year 1980)
• Budget Amount: ¥2,200,000 (Direct Cost: ¥2,200,000); Fiscal Year 1980: ¥2,200,000 (Direct Cost: ¥2,200,000)