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濃度分布を高精度で測定するための高周波バック・スパッタリング法の開発と薄膜拡散研究への応用
Research Project
All
Fiscal Year 1976
Fiscal Year 1975
grantAwardInfo
Project/Area Number
X00120----085026
Research Category
Grant-in-Aid for Developmental Scientific Research
Allocation Type
Single-year Grants
Research Field
Physical properties of metals
Research Institution
Tohoku University
Principal Investigator
平野 賢一
東北大, 工, 教授
Project Period (FY)
1975 – 1976
Project Status
Completed (Fiscal Year 1976)
Budget Amount
*help
¥3,000,000 (Direct Cost: ¥3,000,000)
Fiscal Year 1976: ¥1,000,000 (Direct Cost: ¥1,000,000)
Fiscal Year 1975: ¥2,000,000 (Direct Cost: ¥2,000,000)