RIオージェ電子を利用した薄膜の新しい厚さ測定器の開発

• Project/Area Number: X00120----088011
• Research Category: Grant-in-Aid for Developmental Scientific Research
• Allocation Type: Single-year Grants
• Research Field: Nuclear engineering
• Research Institution: Nagoya University
• Principal Investigator: 森 千鶴夫 名大, 工, 講師
• Project Period (FY): 1975
• Project Status: Completed (Fiscal Year 1975)
• Budget Amount: ¥700,000 (Direct Cost: ¥700,000); Fiscal Year 1975: ¥700,000 (Direct Cost: ¥700,000)