イオンスパッタ超精密加工用制御装置の試作

Research Project

Project/Area Number	X00120----185031
Research Category	Grant-in-Aid for Developmental Scientific Research
Allocation Type	Single-year Grants
Research Institution	Tokyo University of Science
Principal Investigator	谷口紀男東京理大, 理工, 教授
Project Period (FY)	1976
Project Status	Completed (Fiscal Year 1976)
Budget Amount *help	¥2,950,000 (Direct Cost: ¥2,950,000) Fiscal Year 1976: ¥2,950,000 (Direct Cost: ¥2,950,000)