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イオンスパッタ超精密加工用制御装置の試作

Research Project

Project/Area Number X00120----185031
Research Category

Grant-in-Aid for Developmental Scientific Research

Allocation TypeSingle-year Grants
Research InstitutionTokyo University of Science

Principal Investigator

谷口 紀男  東京理大, 理工, 教授

Project Period (FY) 1976
Project Status Completed (Fiscal Year 1976)
Budget Amount *help
¥2,950,000 (Direct Cost: ¥2,950,000)
Fiscal Year 1976: ¥2,950,000 (Direct Cost: ¥2,950,000)

URL: 

Published: 1987-03-30   Modified: 2016-04-21  

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