SOR軟X線露光法による回折格子の試作

• Project/Area Number: X00120----385005
• Research Category: Grant-in-Aid for Developmental Scientific Research
• Allocation Type: Single-year Grants
• Research Field: 物理計測・光学
• Research Institution: Osaka University
• Principal Investigator: 難波 進 大阪大学, 基礎工学部, 教授
• Project Period (FY): 1978 – 1979
• Project Status: Completed (Fiscal Year 1979)
• Budget Amount: ¥3,800,000 (Direct Cost: ¥3,800,000); Fiscal Year 1979: ¥1,300,000 (Direct Cost: ¥1,300,000); Fiscal Year 1978: ¥2,500,000 (Direct Cost: ¥2,500,000)