金属/微小空隙/半導体構造の電子応答による生体のエネルギー準位分析デバイスの研究

• 研究課題/領域番号: 18360148
• 研究種目: 基盤研究(B)
• 配分区分: 補助金
• 応募区分: 一般
• 研究分野: 電子・電気材料工学
• 研究機関: 大阪大学
• 研究代表者: 森田 瑞穂 大阪大学, 大学院・工学研究科, 教授 (50157905)
• 研究分担者: 福井 希一 大阪大学, 工学研究科, 教授 (00311770) ; 有馬 健太 大阪大学, 工学研究科, 准教授 (10324807)
• 研究期間 (年度): 2006 – 2009
• 研究課題ステータス: 完了 (2009年度)
• 配分額: 17,500千円 (直接経費: 14,500千円、間接経費: 3,000千円); 2009年度: 2,600千円 (直接経費: 2,000千円、間接経費: 600千円); 2008年度: 5,200千円 (直接経費: 4,000千円、間接経費: 1,200千円); 2007年度: 5,200千円 (直接経費: 4,000千円、間接経費: 1,200千円); 2006年度: 4,500千円 (直接経費: 4,500千円)
• キーワード: シリコン / シリコン酸化膜 / 微小空隙 / 電子応答 / センシングデバイス

研究概要

金属/微小空隙/半導体構造デバイスの容量-電圧測定によるデオキシリボ核酸のセンシングを実証した。デオキシリボ核酸溶液の濃度は、センシングデバイスの容量-電圧曲線の変化から解析した。金属/絶縁体/空隙/絶縁体/半導体構造デバイスは、溶液のイオン濃度を検知でき、高い検出感度をもつことを実証した。容量-電圧特性の変化は、センシングシリコン酸化物表面上の電荷の変化を反映することを示した。

研究成果

• [雑誌論文] Metal-Insulator-Gap-Insulator-Semiconductor Structure for Sensing D e v i c e s (2009)
  • 著者名/発表者名: Takaaki HIROKANE, Hideaki HASHIMOTO, Daisuke KANZAKI, Shinichi URABE, Kenta ARIMA, Junichi UCHIKOSHI, Mizuho MORITA
  • 雑誌名: ANALYTICAL SCIENCES 25(Peer-reviewed) ページ: 101-104
• [雑誌論文] Metal-Insulator-Gap-Insulator-Semiconductor Structure for Sensing Devices (2009)
  • 著者名/発表者名: Takaaki HIROKANE, Hideaki HASHIMOTO, Daisuke KANZAKI, Shinichi URABE, Kenta ARIMA, Junichi UCHIKOSHI and Mizuho MORITA
  • 雑誌名: ANALYTICAL SCIENCES(Peer-reviewed) 25 ページ: 101-104
  • NAID: 10025209631
• [雑誌論文] Characterization of Pinhole in Patterned Oxide Buried in Bonded Silicon-on-Insulator Wafers by Near-Infrared Scattering Topography and Transmission Microscopy (2008)
  • 著者名/発表者名: Xing Wu, Junichi Uchikoshi, Takaaki Hirokane, Ryuta Yamada, Akihiro Takeuchi, Kenta Arima, Mizuho Morita
  • 雑誌名: Journal of The Electrochemical Society 155(11)(Peer-reviewed)
• [雑誌論文] Characterization of Patterned Oxide Buried in Bonded Silicon-on-Insulator Wafers by Near-Infrared Scattering Topography and Microscopy (2008)
  • 著者名/発表者名: Xing WU, Junichi UCHIKOSHI, Takaaki HIROKANE, Ryuta YAMADA, Akihiro TAKEUCHI, Kenta ARIMA, Mizuho MORITA
  • 雑誌名: Japanese Journal of Applied Physics 47(4)(Peer-reviewed.) ページ: 2511-2514
  • NAID: 10022549248
• [雑誌論文] Sensing ofλDNA solutions by metal-gap-semiconductor devices (2008)
  • 著者名/発表者名: Takaaki Hirokane, Daisuke Kanzaki, Hideaki Hashimoto, Shinichi Urabe, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
  • 雑誌名: Surface and Interface Analysis 40(Peer-reviewed.) ページ: 1131-1133
• [雑誌論文] Sensing of λDNA solutions by metal-gap-semiconductor devices (2008)
  • 著者名/発表者名: Takaaki Hirokane, Daisuke Kanzaki, Hideaki Hashimoto, Shinichi Urabe, Kenta Arima, Junichi Uchikoshi and Mizuho Morita
  • 雑誌名: Surface and Interface Analysis(Peer-reviewed) 40 ページ: 1131-1133
• [雑誌論文] Characterization of Tunneling Current through Ultrathin Silicon Dioxide Films by Different-Metal Gates Method (2008)
  • 著者名/発表者名: Takaaki HIROKANE, Naoto YOSHII, Tatsuya OKAZAKI, Shinichi URABE, Kazuo NISHIMURA, Satoru MORITA, Kenta ARIMA, Junichi UCHIKOSHI, Mizuho MORITA
  • 雑誌名: Japanese Journal of Applied Physics 47 ページ: 8317-8320
  • NAID: 40016346939
  • 査読あり
• [雑誌論文] Metal-Insulator-Gap-Insulator-Semiconductor Structure for Sensing Devices (2008)
  • 著者名/発表者名: Takaaki HIROKANE, Hideaki HASHIMOTO Daisuke KANZAKI, Shinichi URABE Kenta ARIMA. Junichi UCHIKOSHI, Mizuho MORITA
  • 雑誌名: ANALYTICAL SCIENCES 25 ページ: 101-104
  • NAID: 10025209631
  • 査読あり
• [雑誌論文] Metal-Insulator-Gap-Insulator-Semiconductor Structure for Biological Sensors (2008)
  • 著者名/発表者名: Hideaki Hashimoto, Takaaki Hirokane, Daisuke Kanzaki, Shinichi Urabe, and Mizuho Morita
  • 雑誌名: ECS Transactions 11(in press)
  • 査読あり
• [雑誌論文] Characterization of Void in Bonded Silicon-on-Insulator Wafers by Controlling Coherence Length of Light Source using Near-Infrared Microscope (2007)
  • 著者名/発表者名: Noritaka AJARI, Junichi UCHIKOSHI, Takaaki HIROKANE, Kenta ARIMA, Mizuho MORITA
  • 雑誌名: Japanese Journal of Applied Physics 46(4B)(Peer-reviewed.) ページ: 1994-1996
• [雑誌論文] Photo current through SnO_2/SiC/p-Si(100) structures (2006)
  • 著者名/発表者名: Syuhei Nishikawa, Hideaki Hashimoto, Motonori Chikamoto, Kosuke Horikoshi, Minoru Aoki, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
  • 雑誌名: Thin Solid Films 508 ページ: 385-388
• [雑誌論文] Characterization of Void in Bonded SOI Wafers by Controlling Coherence Length of Near-Infrared Microscope (2006)
  • 著者名/発表者名: Noritaka Ajari, Junichi Uchikoshi, Takaaki Hirokane, Kenta Arima, Mizuho Morita
  • 雑誌名: Extended Abstracts of the 2006 International Conference on Solid State Devices and Materials ページ: 486-487
  • NAID: 10022545814
• [雑誌論文] Photodetective Characteristics of Metal-Oxide-Semiconductor Tunneling Structure with Aluminum Grid Gate (2006)
  • 著者名/発表者名: Hideaki Hashimoto, Ryuta Yamada, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
  • 雑誌名: Extended Abstracts of the 2006 International Conference on Solid State Devices and Materials ページ: 860-861
  • NAID: 10022546987
• [雑誌論文] Liquid Sensing by Nano-Gap Device with Treated Surface (2006)
  • 著者名/発表者名: Takaaki Hirokane, Hideaki Hashimoto, Daisuke Kanzaki, Tatsuya Takegawa, Satoru Morita, Shinichi Urabe, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
  • 雑誌名: Extended Abstracts of the 2006 International Conference on Solid State Devices and Materials ページ: 900-901
  • NAID: 10022547108
• [雑誌論文] Metal-Gap-Semiconductor Sensing Devices for DNA Solutions (2006)
  • 著者名/発表者名: Takaaki Hirokane, Hideaki Hashimoto, Daisuke Kanzaki, Shinichi Urabe, Mizuho Morita
  • 雑誌名: Abstracts, 210th Meeting of The Electrochemical Society ページ: 1185-1185
• [雑誌論文] Current-Voltage Characteristics of Gap Electrodes with λDNA Molecules on SiO_2/Si Substrate after Elongating Treatment (2006)
  • 著者名/発表者名: Katsuhiro Hashimoto, Takamichi Hanada, Yasuhumi Ochi, Takaaki Hirokane, Shigeki Kawakami, Susumu Uchiyama, Kiichi Fukui, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
  • 雑誌名: Abstracts, 210th Meeting of The Electrochemical Society ページ: 2099-2099
• [学会発表] Direct immobilization of DNA oligomers onto an aminosilane-attached SiO2 surface (2009)
  • 著者名/発表者名: Yoshifumi Okamoto, Takaaki Hirokane, Takashi Furukawa, Junichi Uchikoshi, Kenta Arima, Mizuho Morita
  • 学会等名: Extended Abstracts of Second International Symposium on Atomically Controlled Fabrication Technology
  • 発表場所: Osaka(Not peer-reviewed.)
  • 年月日: 2009-11-25
• [学会発表] Direct immobiliszation of DNA oligomers onto an aminosilane-attached SiO_2 surface (2009)
  • 著者名/発表者名: Yoshifumi Okamoto, Takaaki Hirokane, Takashi Furukawa, Junichi Uchikoshi, Kenta Arima, Mizuho Morita
  • 学会等名: Extended Abstracts of Second International Symposium on Atomicalluy Controlled Fabrication Technology
  • 発表場所: Suita, Osaka
  • 年月日: 2009-11-25
• [学会発表] Electrical Detection of ExtendedλDNA Molecules with Gap Electrodes by Ultraviolet Radiation (2009)
  • 著者名/発表者名: Takamichi Hanada, Yoshifumi Okamoto, Katsuhiro Hashimoto, Yasuhumi Ochi, Takaaki Hirokane, Shinichiro Kajiyama, Susumu Uchiyama, Kiichi Fukui, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
  • 学会等名: Extended Abstracts of First International Symposium on Atomically Controlled Fabrication Technology- Surface and Thin Film Processing-
  • 発表場所: Osaka(Not peer-reviewed.)
  • 年月日: 2009-02-16
• [学会発表] Sensing of DNA solution with Metal-Gap-Insulator-Semiconductor Device, Extended Abstracts of First International Symposium on Atomically Controlled Fabrication Technology (2009)
  • 著者名/発表者名: Takaaki Hirokane, Daisuke Kanzaki, Hideaki Hashimoto, Shinichi Urabe, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
  • 学会等名: - Surface and Thin Film Processing-
  • 発表場所: Osaka(Not peer-reviewed.)
  • 年月日: 2009-02-16
• [学会発表] Sensing of DNA solution with Metal-Gap-Insulator-Semiconductor Device (2009)
  • 著者名/発表者名: Takaaki Hirokane, Daisuke Kanzaki, Hideaki Hashimoto, Shinichi Urabe Kenta Arima, Junichi Uchikoshi, Mizuho Morita
  • 学会等名: First International Symposium on Atomically Controlled Fabrication Technology
  • 発表場所: Osaka
  • 年月日: 2009-02-16
• [学会発表] Sensing Device with Metal-Insulator-Gap-Insulator-Semiconductor for Biological Sensors (2007)
  • 著者名/発表者名: Hideaki Hashimoto, Takaaki Hirokane, Daisuke Kanzaki, Shinichi Urabe, and Mizuho Morita
  • 学会等名: 212th Meeting of The Electrochemical Society
  • 発表場所: Washington, DC
  • 年月日: 2007-11-10
• [学会発表] Electrical Detection of Damage of ExtendedλDNA Molecules by Ultraviolet Radiation (2007)
  • 著者名/発表者名: Takamichi Hanada, Katsuhiro Hashimoto, Yasuhumi Ochi, Takaaki Hirokane, Shinichiro Kajiyama, Susumu Uchiyama, Kiichi Fukui, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
  • 学会等名: Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology 2007
  • 発表場所: Osaka(Not peer-reviewed.)
  • 年月日: 2007-10-15
• [学会発表] Sensing ofλDNA Solutions by Metal-Gap-Semiconductor Device (2007)
  • 著者名/発表者名: Takaaki Hirokane, Daisuke Kanzaki, Hideaki Hashimoto, Shinichi Urabe, Mizuho Morita
  • 学会等名: Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology 2007
  • 発表場所: Osaka(Not peer-reviewed.)
  • 年月日: 2007-10-15
• [学会発表] Metal-Insulator-Gap-Insulator-Semicondu ctor Device for Biosensors (2007)
  • 著者名/発表者名: Takaaki Hirokane, Hideaki Hashimoto, Daisuke Kanzaki, Shinichi Urabe, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
  • 学会等名: Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology 2007
  • 発表場所: Osaka(Not peer-reviewed.)
  • 年月日: 2007-10-15
• [学会発表] Sensing Device with Metal-Insulator-Gap-Insulator- Semiconductor for Biological Sensors, Abstracts (2007)
  • 著者名/発表者名: Hideaki Hashimoto, Takaaki Hirokane, Daisuke Kanzaki, Shinichi Urabe, Mizuho Morita
  • 学会等名: 212th Meeting of The Electrochemical Society
  • 発表場所: Washington, DC(Not peer-reviewed.)
  • 年月日: 2007-10-10
• [学会発表] Sensing Device with Metal-Insulator-Gap-Insulator-Semiconductor for Biological Sensors, Abstracts (2007)
  • 著者名/発表者名: Hideaki Hashimoto, Takaaki Hirokane, Daisuke Kanzaki, Shinichi Urabe and Mizuho Morita
  • 学会等名: 212th Meeting of The Electrochemical Society
  • 発表場所: Washington, DC(Not peer-reviewed)
  • 年月日: 2007-10-10
• [学会発表] Current-Voltage Characteristics of Gap Electrodes withλDNA Molecules on SiO2/Si Substrate after Elongating Treatment, Abstracts (2006)
  • 著者名/発表者名: Katsuhiro Hashimoto, Takamichi Hanada, Yasuhumi Ochi, Takaaki Hirokane, Shigeki Kawakami, Susumu Uchiyama, Kiichi Fukui, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
  • 学会等名: 210th Meeting of The Electrochemical Society
  • 発表場所: Cancun(Not peer-reviewed.)
  • 年月日: 2006-11-01
• [学会発表] Metal-Gap-Semiconductor Sensing Devices for DNA Solutions, Abstracts (2006)
  • 著者名/発表者名: Takaaki Hirokane, Hideaki Hashimoto, Daisuke Kanzaki, Shinichi Urabe, Mizuho Morita
  • 学会等名: 210th Meeting of The Electrochemical Society
  • 発表場所: Not peer-reviewed.
  • 年月日: 2006-10-31
• [学会発表] Current-Voltage Characteristics of Gap Electrodes with ExtendedλDNA Molecules (2006)
  • 著者名/発表者名: Katsuhiro Hashimoto, Takamichi Hanada, Yasuhumi Ochi, Takaaki Hirokane, Shigeki Kawakami, Susumu Uchiyama, Kiichi Fukui, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
  • 学会等名: Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology
  • 発表場所: Osaka(Not peer-reviewed.)
  • 年月日: 2006-10-19
• [学会発表] Metal-Gap-Semiconductor Device for Biosensors (2006)
  • 著者名/発表者名: Takaaki Hirokane, Hideaki Hashimoto, Daisuke Kanzaki, Shinichi Urabe, Mizuho Morita
  • 学会等名: Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology
  • 発表場所: Osaka(Not peer-reviewed.)
  • 年月日: 2006-10-19
• [学会発表] Liquid Sensing by Nano-Gap Device with Treated Surface (2006)
  • 著者名/発表者名: Takaaki Hirokane, Hideaki Hashimoto, Daisuke Kanzaki, Tatsuya Takegawa, Satoru Morita, Shinichi Urabe, Kenta Arima, Junichi Uchikoshi, Mizuho Morita
  • 学会等名: Extended Abstracts of the 2006 International Conference on Solid State Devices and Materials
  • 発表場所: Yokohama(Not peer-reviewed.)
  • 年月日: 2006-09-15
• [備考]
  • URL: http://www-pm.prec.eng.osaka-u.ac.jp/
• [備考]
  • URL: http://www-pm.prec.eng.osaka-u.ac.jp/
• [備考]
  • URL: http://www-pm.prec.eng.osaka-u.ac.jp/
• [備考]
  • URL: http://www-pm.prec.eng.osaka-u.ac.jp/
• [備考]
  • URL: http://www-pm.prec.eng.Osaka-u.ac.jp/
• [産業財産権] 検出素子およびそれを用いた検出装置 (2007)
  • 発明者名: 森田瑞穂, 廣兼孝亮
  • 権利者名: 森田瑞穂
  • 産業財産権番号: 2007-248433
  • 出願年月日: 2007-09-26
  • 取得年月日: 2007-09-26
• [産業財産権] 検出装置 (2007)
  • 発明者名: 森田瑞穂
  • 権利者名: 森田瑞穂
  • 出願年月日: 2007-03-23
  • 取得年月日: 2007-03-23
• [産業財産権] 検出装置 (2007)
  • 発明者名: 森田瑞穂
  • 権利者名: 森田瑞穂
  • 取得年月日: 2007-03-23