| 研究実績の概要 |
With the support from JSPS during two years, the Thousand-bit sensor array has been successfully fabricated, and great progress in exhaled breath performance has been observed with high accuracy with reliability.
In the fabrication process of the sensor array, we have noticed the structure design and the materials selection of the unit in a thousand-bit sensor array can gigantically alter the performance of the device. To avoid the drawback of conventional laser-lithography, we have proposed a two-layer photoresist-assisted method to improve the reproducibility of our device performance. To avoid the contact problem between the sensing element and electrode, we used metallic metal oxide instead of conventional Ti contact. We successfully avoid the thermal oxidization on contact via using metallic Antimony doped Tin Oxide as electrode, meanwhile, we also observed that the anomalous behavior of the interface between ITO electrode and SnO2 single crystalline structure, which indicated that not all metallic oxide is suitable as electrode to avoid thermal degradation.
In the sensing unit design, we comprehensively did literature survey based on metal oxide nanomaterials based gas sensors to maximize the merit of our device. With the guidance from our literature review, we observed the disparity in individual based on the resistance variation from our original system by measuring the exhaled breath. Moreover, we successfully distinguished people who has drunk or not.
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