フッ化物蛍光体を用いた真空紫外発光素子開発

• 研究課題/領域番号: 23560038
• 研究種目: 基盤研究(C)
• 配分区分: 基金
• 応募区分: 一般
• 研究分野: 応用光学・量子光工学
• 研究機関: 名古屋工業大学
• 研究代表者: 小野 晋吾 名古屋工業大学, 工学(系)研究科(研究院), 准教授 (40370126)
• 研究期間 (年度): 2011 – 2013
• 研究課題ステータス: 完了 (2013年度)
• 配分額: 5,330千円 (直接経費: 4,100千円、間接経費: 1,230千円); 2013年度: 1,560千円 (直接経費: 1,200千円、間接経費: 360千円); 2012年度: 1,820千円 (直接経費: 1,400千円、間接経費: 420千円); 2011年度: 1,950千円 (直接経費: 1,500千円、間接経費: 450千円)
• キーワード: 光学素子 / 発光素子 / 真空紫外 / フッ化物 / 薄膜

研究概要

発光素子の蛍光体開発のため、パルスレーザー堆積法により、複合フッ化物の薄膜化を行った。これらの薄膜からは、雰囲気制御を行わない真空中での堆積でも十分な発光が得られた。特にNd3+:LuF3薄膜については、作製条件を最適化し微粒子を堆積させることで、相変化による応力の影響を低減させることで薄膜作製に成功した。さらに、これらの薄膜を蛍光体とし、グラフェン基板上に作製したカーボンナノファイバーの電界電子放出素子を冷陰極として用いた紫外発光素子を試作した。KMgF3およびNd3+:LuF3薄膜を蛍光体として用いた素子から、真空紫外領域での発光を確認した。

研究成果

• [雑誌論文] Vacuum ultraviolet field emission lamp utilizing KMgF3 thin film phosphor (2014)
  • 著者名/発表者名: M. Yanagihara, Z. Yusop, M. Tanemura, S. Ono, T. Nagami, K. Fukuda, T. Suyama, Y. Yokota, T. Yanagida, A. Yoshikawa
  • 雑誌名: APL Mater. 巻: 2 ページ: 46110-46110
  • 査読あり
• [雑誌論文] Vacuum ultraviolet field emission lamp utilizing KMgF3 thin film phosphor (2014)
  • 著者名/発表者名: M. Yanagihara, Z. Yusop, M. Tanemura, S. Ono, T. Nagami, K. Fukuda, T. Suyama, Y. Yokota, T. Yanagida, A. Yoshikawa
  • 雑誌名: APL Materials 巻: 2 ページ: 46110-46110
  • 査読あり
• [雑誌論文] Vacuum Ultraviolet Photoconductive Detector Based on Pulse Laser Deposition-Grown Neodymium Fluoride Thin Film (2013)
  • 著者名/発表者名: T. Ishimaru, M. Ieda, S. Ono, Y. Yokota, T. Yanagida , A. Yoshikawa
  • 雑誌名: Thin Solid Films 巻: 534 ページ: 12-14
  • 査読あり
• [雑誌論文] Structural and optical properties of neodymium-doped lutetium fluoride thin films grown by pulsed laser deposition (2013)
  • 著者名/発表者名: Ieda, T. Ishimaru, S. Ono, K. Yamanoi, M.Cadatal, T. Shimizu, N. Sarukura, Y. Yokota, T. Yanagida, A. Yoshikawa
  • 雑誌名: Opt. Mater. 巻: 35 ページ: 2329-2331
  • 査読あり
• [雑誌論文] Structural and optical properties of neodymium-doped lutetium fluoride thin films grown by pulsed laser deposition (2013)
  • 著者名/発表者名: T. Ishimaru, M. Ieda, S. Ono, Y. Yokota, T. Yanagida, A. Yoshikawa
  • 雑誌名: Optical Materials 巻: 35 ページ: 2329-2331
  • 査読あり
• [雑誌論文] Vacuum ultraviolet photoconductive detector based on pulse laser deposition-grown neodymium fluoride thin film (2013)
  • 著者名/発表者名: T. Ishimaru, M. Ieda, S. Ono, Y. Yokota, T. Yanagida, and A. Yoshikawa
  • 雑誌名: Thin Solid Films 巻: 534 ページ: 12-14
  • 査読あり
• [雑誌論文] Optical characteristic improvement of neodymium-doped lanthaum fluoride thin films grown by plsed laser deposition for vacuum ultraviolet application (2012)
  • 著者名/発表者名: M. Ieda, T. Ishimaru, S. Ono, K. Yamanoi, M. Cadatal, T. Shimizu, N. Sarukura, K. Fukuda, T. Suyama, Y. Yokota, T. Yanagida, A. Yoshikawa
  • 雑誌名: Jpn. J. Appl. Phys. 巻: 51
  • 査読あり
• [雑誌論文] Filterless Ultraviolet Detector Based on Cerium Fluoride Thin Film Grown by Pulsed Laser Deposition (2012)
  • 著者名/発表者名: M. Ieda, T. Ishimaru, S. Ono, N. Kawaguchi, K. Fukuda, T. Suyama, Y. Yokota, T. Yanagida, and A. Yoshikawa
  • 雑誌名: Jpn. J. Appl. Phys. 巻: 51
  • NAID: 40019316999
  • 査読あり
• [雑誌論文] Optical characteristic improvement of neodymium-doped lanthaum fluoride thin films grown by plsed laser deposition for vacuum ultraviolet application (2012)
  • 著者名/発表者名: M. Ieda, T. Ishimaru, Mirai Ieda, S. Ono, K. Yamanoi, M. Cadatal, T. Shimizu, N. Sarukura, K. Fukuda, T. Suyama, Y. Yokota, T. Yanagida, A. Yoshikawa
  • 雑誌名: Jpn. J. Appl. Phys. 巻: 51
  • 査読あり
• [学会発表] Control or microstructures by two interfered femtosecond laser pulses using biprism (2013)
  • 著者名/発表者名: O.Konda, T. Sato, F. Itoigawa, S. Ono, M. Ota
  • 学会等名: The Conference on Laser and Electro-Optics Pacific Rim (CLEO PR)
  • 発表場所: Kyoto(paper WPE-10)
• [学会発表] Luminescence and Lifetime Propaties of Nd3+:LaF3 Thin Film Grown by Pulsed Laser Deposition (2013)
  • 著者名/発表者名: Naoki Yoshida, Mirai Ieda, Shingo Ono, Kohei Yamanoi, Toshiko Shimizu, Nobuhiko Sakura, YuuiYokota, Takayuki Yanagida, Akira Yoshikawa
  • 学会等名: The Conference on Laser and Electro-Optics Pacific Rim (CLEO PR)
  • 発表場所: Kyoto(paper WPE-13)
• [学会発表] Optical Properties of Ce3+:LiCaAIF6 Thin Films Prepared by Pulsed Laser Deposition (2013)
  • 著者名/発表者名: Masahiro Yanagihara, Shingo Ono, Toshihiko Shimizu, Nobuhiko Sarukura, Yuui Yokota, Takayuki Yanagida, Akira Yoshikawa
  • 学会等名: The Conference on Laser and Electro-Optics Pacific Rim (CLEO PR)
  • 発表場所: Kyoto(paper WPE-16)
• [学会発表] Vacuum Ultraviolet Light Emitting Device Consisting of Nd3+:LuF3 Thin Film as Phosphor (2013)
  • 著者名/発表者名: Takayuki Tsuji, Mirai Ieda, Shingo Ono, Yuui Yokota, Takayuki Yanagida, Akira Yoshikawa
  • 学会等名: The Conference on Laser and Electro-Optics Pacific Rim (CLEO PR)
  • 発表場所: Kyoto(paper TuPK-2)
• [学会発表] Basic luminescence and radiation response properties of Ce : LiCaAlF6 crystalline films (2013)
  • 著者名/発表者名: Y. Fujimoto, T. Yanagida, M. Yanagihara, S. Ono, K. Fukuda
  • 学会等名: 12th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-12)
  • 発表場所: Tsukuba(paper 5PN-32)
• [学会発表] Shape control of periodic microstructures by two interfered laser pluses (2013)
  • 著者名/発表者名: Osamu Konda, Takumi Sato, Fumihiro Itoigawa, Shingo Ono, Michiharu Ota
  • 学会等名: The International Congress on Laser Advanced Materials Processing (LAMP)
  • 発表場所: Niigata(paper We2-OL-9)
• [学会発表] Growth of Nd3+-ion doped fluoride thin films by pulsed laser deposition (2013)
  • 著者名/発表者名: Naoki Yoshida, Mirai Ieda, Shingo Ono, Kohei Yamanoi, Toshihiko Shimizu, Nobuhiko Sarukura, Yuui Yokota, Takayuki Yanagida, Akira Yoshikawa
  • 学会等名: The International Congress on Laser Advanced Materials Processing (LAMP)
  • 発表場所: Niigata(paper We3-OL-5)
• [学会発表] The growth of NdF3 and YbF3 thin films by pulsed laser deposition for VUV detectors (2013)
  • 著者名/発表者名: Takayuki Tsuji, Tatsuya Ishimaru, Shingo Ono, Yuui Yokota, Takayuki Yanagida, Akira Yoshikawa
  • 学会等名: The International Congress on Laser Advanced Materials Processing (LAMP)
  • 発表場所: Niigata(paper P-29)
• [学会発表] Evaluation of Ce3+:LiCaAlF6 Single Crystal by Using Femtosecond Laser Pulses (2013)
  • 著者名/発表者名: N. Yoshida, K. Toyama, S. Ono, T. Hayashi, M. Ota,T. Yanagida, Y. Yokota, and A. Yoshikawa
  • 学会等名: International Union of Materials Research Soieties-International Conference in Asia (IUMRS-ICA)
  • 発表場所: Bangalore, India(paper 06-Oral-7)
• [学会発表] Optical properties of Nd3+:LuF3 Thin Films Grown by Pulsed Laser Deposition for Vacuum-Ultraviolet Light Source (2013)
  • 著者名/発表者名: N. Yoshida, T. Tsuji, S. Ono, Y. Yokota, T. Yanagida, and A. Yoshikawa
  • 学会等名: International Union of Materials Research Soieties-International Conference in Asia (IUMRS-ICA)
  • 発表場所: Bangalore, India(paper 06-Poster-17)
• [学会発表] Luminescence and Lifetime Propaties of Nd3+:LaF3 Thin Film Grown by Pulsed Laser Deposition (2013)
  • 著者名/発表者名: Naoki Yoshida, Mirai Ieda, Shingo Ono, Kohei Yamanoi, Toshiko Shimizu, Nobuhiko Sakura, YuuiYokota, Takayuki Yanagida, Akira Yoshikawa
  • 学会等名: The Conference on Laser and Electro-Optics Pacific Rim (CLEO PR)
  • 発表場所: Kyoto, Japan
• [学会発表] Optical Properties of Ce3+:LiCaAIF6 Thin Films Prepared by Pulsed Laser Deposition (2013)
  • 著者名/発表者名: Masahiro Yanagihara, Shingo Ono, Toshihiko Shimizu, Nobuhiko Sarukura, Yuui Yokota, Takayuki Yanagida, Akira Yoshikawa
  • 学会等名: The Conference on Laser and Electro-Optics Pacific Rim (CLEO PR)
  • 発表場所: Kyoto, Japan
• [学会発表] Vacuum Ultraviolet Light Emitting Device Consisting of Nd3+:LuF3 Thin Film as Phosphor (2013)
  • 著者名/発表者名: Takayuki Tsuji, Mirai Ieda, Shingo Ono, Yuui Yokota, Takayuki Yanagida, Akira Yoshikawa
  • 学会等名: The Conference on Laser and Electro-Optics Pacific Rim (CLEO PR)
  • 発表場所: Kyoto, Japan
• [学会発表] Basic luminescence and radiation response properties of Ce:LiCaAlF6 crystalline films (2013)
  • 著者名/発表者名: Y. Fujimoto, T. Yanagida, M. Yanagihara, S. Ono, K. FukudaY. Fujimoto, T. Yanagida, M. Yanagihara, S. Ono, K. Fukuda
  • 学会等名: 12th International Conference on Atomically Controlled Surfaces, Interfaces and Nanostructures (ACSIN-12)
  • 発表場所: Tsukuba, Japan
• [学会発表] Growth of Nd3+-ion doped fluoride thin films by pulsed laser deposition (2013)
  • 著者名/発表者名: Naoki Yoshida, Mirai Ieda, Shingo Ono, Kohei Yamanoi, Toshihiko Shimizu, Nobuhiko Sarukura, Yuui Yokota, Takayuki Yanagida, Akira Yoshikawa
  • 学会等名: The International Congress on Laser Advanced Materials Processing (LAMP)
  • 発表場所: Niigata, Japan
• [学会発表] Evaluation of Ce3+:LiCaAlF6 Single Crystal by Using Femtosecond Laser Pulses (2013)
  • 著者名/発表者名: N. Yoshida, K. Toyama, S. Ono, T. Hayashi, M. Ota,T. Yanagida, Y. Yokota, and A. Yoshikawa
  • 学会等名: International Union of Materials Research Soieties-International Conference in Asia (IUMRS-ICA)
  • 発表場所: Bangalore, India
• [学会発表] Optical properties of Nd3+:LuF3 Thin Films Grown by Pulsed Laser Deposition for Vacuum-Ultraviolet Light Source (2013)
  • 著者名/発表者名: N. Yoshida, T. Tsuji, S. Ono, Y. Yokota, T. Yanagida, and A. Yoshikawa
  • 学会等名: International Union of Materials Research Soieties-International Conference in Asia (IUMRS-ICA)
  • 発表場所: Bangalore, India
• [学会発表] フェムト秒パルスレーザーにより作製したKMgF3ナノ粒子の粒子径制御 (2013)
  • 著者名/発表者名: 柳原雅大，小野晋吾，吉川 彰
  • 学会等名: 第 74回応用物理学会秋季学術講演会
  • 発表場所: 同志社大学
• [学会発表] Ultraviolet Field emission lamp using non-doped, Ce-doped and Pr-doped CaF2 Thin Films (2012)
  • 著者名/発表者名: T. Ishimaru, M. Ieda, Z. Yusop, M. Tanemura, S. Ono, T. Nagami, kawaguchi, S. Ishizu, K. Fukuda, T. Suyama, Y. Yokota, T. Yanagida, A. Yoshikawa
  • 学会等名: International Union of Materials Research Soieties-International Conference in Asia (IUMRS-ICA)
  • 発表場所: Korea(paper MoP089)
• [学会発表] Evaluation of Nd3+:LuLiF4 Single Crystal by Measurement of Two Photon Absorption Coefficient (2012)
  • 著者名/発表者名: N. Yoshida, S. Ono, M. Ota, K. Fukuda, T. Suyama, Y. Yokota, T. Yanagida, A. Yoshikawa
  • 学会等名: International Union of Materials Research Soieties-International Conference in Asia (IUMRS-ICA)
  • 発表場所: Korea(paper MoP652)
• [学会発表] Luminescence and Lifetime Properties of Nd3+:LaF3 Thin Films Grown by Pulsed Laser Deposition for Vacuum Ultraviolet Application (2012)
  • 著者名/発表者名: M. Ieda, T. Ishimaru, S. Ono, K. Yamanoi, M. Cadatal-Raduban, T. Shimizu, N. Sarukura, K. Fukuda, T. Suyama, Y. Yokota, T. Yanagida, A. Yoshikawa
  • 学会等名: International Union of Materials Research Soieties-International Conference in Asia (IUMRS-ICA)
  • 発表場所: Korea(paper MoP676)
• [学会発表] Photoconductive Properties of CeF3 and YbF3 Thin Films as UV Sensor (2012)
  • 著者名/発表者名: N. Yoshida, M. Ieda, T. Ishimaru, S. Ono, N. Kawaguchi, K. Fukuda, T. Suyama, Y. Yokota, T. Yanagida, A. Yoshikawa
  • 学会等名: International Union of Materials Research Soieties-International Conference in Asia (IUMRS-ICA)
  • 発表場所: Korea(paper TuP082)
• [学会発表] Filterless Vacuum Ultraviolet Photoconductive Detector Fabricated on NdF3 Thin Film (2012)
  • 著者名/発表者名: M. Ieda, T. Ishimaru, S. Ono, Y. Yokota, T. Yanagida, A. Yoshikawa
  • 学会等名: The Institute of Electrical and Electronics Engineers Photonics Conference (IPC)
  • 発表場所: California(paper TuT3)
• [学会発表] Ultraviolet Field emission lamp using non-doped, Ce-doped and Pr-doped CaF2 Thin Films (2012)
  • 著者名/発表者名: T. Ishimaru, M. Ieda, Z. Yusop, M. Tanemura, S. Ono, T. Nagami, N. kawaguchi, S. Ishizu, K. Fukuda, T. Suyama, Y. Yokota, T. Yanagida, A. Yoshikawa
  • 学会等名: International Union of Materials Research Soieties-International Conference in Asia
  • 発表場所: Korea
• [学会発表] Evaluation of Nd3+:LuLiF4 Single Crystal by Measurement of Two Photon Absorption Coefficient (2012)
  • 著者名/発表者名: N. Yoshida, S. Ono, M. Ota, K. Fukuda, T. Suyama, Y. Yokota, T. Yanagida, A. Yoshikawa
  • 学会等名: International Union of Materials Research Soieties-International Conference in Asia
  • 発表場所: Korea
• [学会発表] Luminescence and Lifetime Properties of Nd3+:LaF3 Thin Films Grown by Pulsed Laser Deposition for Vacuum Ultraviolet Application (2012)
  • 著者名/発表者名: M. Ieda, T. Ishimaru, S. Ono, K. Yamanoi, M. Cadatal-Raduban, T. Shimizu, N. Sarukura, K. Fukuda, T. Suyama, Y. Yokota, T. Yanagida, A. Yoshikawa
  • 学会等名: International Union of Materials Research Soieties-International Conference in Asia
  • 発表場所: Korea
• [学会発表] Photoconductive Properties of CeF3 and YbF3 Thin Films as UV Sensor (2012)
  • 著者名/発表者名: N. Yoshida, M. Ieda, T. Ishimaru, S. Ono, N. Kawaguchi, K. Fukuda, T. Suyama, Y. Yokota, T. Yanagida, A. Yoshikawa
  • 学会等名: International Union of Materials Research Soieties-International Conference in Asia
  • 発表場所: Korea
• [学会発表] Filterless Vacuum Ultraviolet Photoconductive Detector Fabricated on NdF3 Thin Film (2012)
  • 著者名/発表者名: M. Ieda, T. Ishimaru, S. Ono, Y. Yokota, T. Yanagida, A. Yoshikawa
  • 学会等名: The Institute of Electrical and Electronics Engineers Photonics Conference
  • 発表場所: California
• [学会発表] Vacuum Ultraviolet Field Emission Lamp based on a KMgF3 Thin Film Phosphor (2011)
  • 著者名/発表者名: T. Ishimaru, M. Ieda, H. Kamisaka, Z. Yusop, M. Tanemura, S. Ono, T. Nagami, N. Kawaguchi, S. Ishizu, K. Fukuda, T. Suyama, Y. Yokota, T. Yanagida, A. Yoshikawa
  • 学会等名: Conference on Laser and Electro-Optics Pacific Rim
  • 発表場所: Sydney
• [学会発表] Evaluation of NdF3 Thin Films as a Vacuum Ultraviolet Photoconductive detector (2011)
  • 著者名/発表者名: M. Ieda, T. Ishimaru, S. Ono, N. Kawaguchi, K. Fukuda, T. Suyama, Y. Yokota, T. Yanagida, A. Yoshikawa
  • 学会等名: Conference on Laser and Electro-Optics Pacific Rim
  • 発表場所: Sydney
• [学会発表] Filterless Vacuum Ultraviolet Photoconductive Detector using NdF3 Thin Film (2011)
  • 著者名/発表者名: T. Ishimaru, M. Ieda, S. Ono, N. Kawaguchi, K. Fukuda, T. Suyama, Y. Yokota, T. Yanagida, A. Yoshikawa
  • 学会等名: International Union of Materials Research Soieties-International Conference in Asia
  • 発表場所: Taipei
• [学会発表] Vacuum Ultraviolet Light Emitting Device using a KMgF3 Thin Film Phosphor (2011)
  • 著者名/発表者名: M. Ieda, T. Ishimaru, S. Ono, N. Kawaguchi, K. Fukuda, T. Suyama, Y. Yokota, T. Yanagida, A. Yoshikawa
  • 学会等名: International Union of Materials Research Soieties-International Conference in Asia
  • 発表場所: Taipei
• [学会発表] Nd3+:LaF3 Thin Films Grown by Pulsed Laser Deposition as Vacuum Ultraviolet Light Emitting Device Material and Scintillator (2011)
  • 著者名/発表者名: T. Ishimaru, M. Ieda, Y. Ichikawa, S. Ono, K. Yamanoi, M. Cadatal-Raduban, T. Shimizu, N. Sarukura, K. Fukuda, T. Suyama, Y. Yokota, T. Yanagida, A. Yoshikawa
  • 学会等名: International Conference on Inorganic Scintillators and their Applications
  • 発表場所: Germany
• [学会発表] Vacuum Ultraviolet Photoconductive Detector Fabricated on NdF3 Thin Film (2011)
  • 著者名/発表者名: M. Ieda, T. Ishimaru, S. Ono, N. Kawaguchi, K. Fukuda, T. Suyama, Y. Yokota, T. Yanagida, A. Yoshikawa
  • 学会等名: International Conference on Inorganic Scintillators and their Applications
  • 発表場所: Germany
• [図書] 「先端個体レーザー」第2章固体レーザーの基礎(社団法人レーザー学会編) (2011)
  • 出版者: オーム社
• [備考]
  • URL: http://ono-lab.web.nitech.ac.jp/pages/books.html
• [備考] 名古屋工業大学大学院工学研究科機能工学専攻 小野研究室ホームページ
  • URL: http://ono-lab.web.nitech.ac.jp/
• [備考] 名古屋工業大学 小野研究室
  • URL: http://ono-lab.web.nitech.ac.jp/index.html
• [産業財産権] レーザ加工方法 (2014)
  • 発明者名: 太田道春、高橋秀知、榊原伸哉、糸魚川文広、小野晋吾
  • 権利者名: アイシン精機
  • 産業財産権種類: 特許
  • 出願年月日: 2014-02-18
  • 外国
• [産業財産権] レーザ加工方法 (2014)
  • 発明者名: 太田道春、高橋秀知、榊原伸哉、糸魚川文広、小野晋吾
  • 権利者名: 太田道春、高橋秀知、榊原伸哉、糸魚川文広、小野晋吾
  • 産業財産権種類: 特許
  • 出願年月日: 2014-02-18
• [産業財産権] 殺菌用光源 (2013)
  • 発明者名: 小野晋吾、須山敏尚
  • 権利者名: 国立大学法人名古屋工業大学、株式会社トクヤマ
  • 産業財産権種類: 特許
  • 取得年月日: 2013-02-01
  • 外国