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[文献書誌] 田頭博昭,北守一隆,伊達亜由美,酒井洋輔: "Modeling of RF Plasma Considering Radical Reaction" Proceedings of the 7th Symposium on Plasma Processing. 1. 333-336 (1990)
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[文献書誌] 佐藤信安,田頭博昭: "A Hybrid Model of RF Plasmas and Reactions in SiH_4/H_2" Proceedings of the 7th Symposium on Plasma Processing. 1. 325-328 (1990)
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[文献書誌] 西村幹郎,中野誠彦,山口由岐夫,真壁利明: "Modeling of the Radical Transport in RF Glow Discharges in CH_4" Proceedings of the 7th Symposium on Plasma Processing. 1. 337-340 (1990)
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[文献書誌] 栃久保文嘉,鈴木晶,角田茂,寺薗裕子,浜田秀史,美濃島邦宏,真壁利明: "Diagonostics of RF Glow Discharges in SiH_4 by the Spatiotemporal Optical Emission Spectroscopy" Proceedings of the 7th Symposium on Plasma Processing. 1. 157-160 (1990)
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[文献書誌] 倉知正,中村義春: "Electron Swarm Parameters in SiH_4-Rare Gas Mixtures and Collision Cross Sections for SiH_4 Molecule" Proceedings of the 7th Symposium on Plasma Processing. 1. 265-268 (1990)
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[文献書誌] 関由美子,六車修二,福徳光師,中島貞之丞,生田信皓: "過渡FTI法による高周波電界下の電子輸送特性解析" 第37回応用物理学関係連合講演会 講演予稿集. 1. 38-38 (1990)