基本光デバイスの高機能化

1992 年度 実績報告書

• 研究課題/領域番号: 03244106
• 研究機関: 大阪大学
• 研究代表者: 西原 浩 大阪大学, 工学部, 教授 (00029018)
• 研究分担者: 宮崎 保光 豊橋技術科学大学, 工学部, 教授 (00023169) ; 古屋 一仁 東京工業大学, 工学部, 教授 (40092572) ; 内藤 喜之 東京工業大学, 工学部, 教授 (70016335) ; 多田 邦雄 東京大学, 工学部, 教授 (00010710) ; 末田 正 大阪大学, 基礎工学部, 教授 (20029408)
• キーワード: 光導波路 / 光集積回路 / 光情報処理デバイス / 超高速光制御デバイス / 半導体レーザ / 光アイソレータ / 半導体光変調デバイス / 演算用光デバイス

研究概要

本年度に得られた主な成果は以下のとおりである、1.LiNbO_3、ガラス/Si、半導体、ポリマー等の各種光導波路を用いて、光波長フィルタ、情報読取り用光集積回路、光集積変位センサ、非線形光学波長変換デバイスなどの光集積デバイスを設計・試作して特性を評価し、実現可能性を実証した。[西原]2.30〜40GHz帯光制御デバイスの設計作製法確立のため導波路・制御電極の材料・作製加工法を重点的に研究した。また光波一光波制御デバイス実現のため非線形光導波路作製の研究を進めた。[末田]3.傾斜周期回折格子波長可変DFBレーザの波長可変性能の理論的検討・試作開発を行い、0〜90℃で7.3nmの波長可変幅を得た。またヘテロバイボーラトランジスタ構造キャリア注入型光スイッチを集積化するためのGaAsへの二重拡散プロセスを研究し、トランジスタ動作を確認した。[多田]4.非相反移相効果を用いた導波路型アイソレータの実現のため面内磁化特性をもつ磁気光学材料の開発を行い、面内磁化飽和に必要な外部磁界を50eまで低減した。[内藤]5.高性能光デバイス用量子構造形成法としてX線露光の最小転写線幅を解明し、単原子操作加工に向け半導体表面安定化によりSTM観察法を確立し加工を開始し、MOVPEとECR-RIBE法で歪多重量子構造を形成し光デバイス高性能化の見通しを得た。[古屋]6.演算用光デバイス超高速並列化のためのMSSW光スイッチ、ニューロスイッチ・回路、増幅素子、SHG素子、コリニア音響光学素子、テーパ導波路結合素子の集積化を検討し理論解析・基礎実験結果を得た。[宮崎]7.空乏層厚変化によるGaAs/AlGaAs光変調器/スイッチの特性改善を行った。導波路型ではGHz以上での動作確認を行い、平面型では10×4=40個の素子を2次元アレー状に集積し5.5Vの電圧変化で43%の消光比を得た。[山田]8.有機EL素子を用いた新光機能デバイスの可能性探索のため効率支配因子を解析した。また微小共振器EL素子で金属電極を反射鏡に用いても大幅な発光特性制御が可能なことを示した。[筒井]

研究成果

• [文献書誌] M.Haruna: "Laser-beam direct writing of TiO2 channels for fabrication of Ti:LiNbO3 waveguides" Jpn.J.Appl.Phys.31. 1593-1596 (1992)
• [文献書誌] M.Haruna: "Nondestructive and simple method of optical-waveguide loss measurement with optimixation of end-fire coupling" Electronics Lett.28. 1612-1613 (1992)
• [文献書誌] T.Suhara: "Theoretical analysis of super-resolution read-out of disc data by semiconfocal pickup heads" Jpn.J.Appl.Phys.31. 534-541 (1992)
• [文献書誌] S.Ura: "Coplanar grating lens in AlGaAs waveguide" Int.J.Optoelectronics. 7. 437-441 (1992)
• [文献書誌] S.Ura: "Electro-optic functional waveguide using new polymer p-NAn-PVA for integrated photonic devices" Jpn.J.Appl.Phys.31. 1378-1381 (1992)
• [文献書誌] M.Fufimura: "LiNbO3 waveguide SHG device with ferroelectric-domain-inverted grating formed by electron-beam scanning" Electron.Lett.28. 721-722 (1992)
• [文献書誌] H.Nishihara: "Integrated-optic disc pickups" Proc.SPIE. 1663. 26-36 (1992)
• [文献書誌] T.Suhara: "Focusing grating coupler in AlGaAs optical waveguide" IEEE Photonics Tech.Lett.4. 903-905 (1992)
• [文献書誌] M.Fujimura: "Blue light generation in LiNbO3 waveguide SHG device with first-order domain-inverted grating formed by EB scanning" Electron.Lett.28. 1868-1869 (1992)
• [文献書誌] T.Suhara: "General coupled-mode analysis of Cerenkov-radiation-type second-harmonic generation in channel and fiber waveguides" IEEE J.Quantum Electron.29. (1993)
• [文献書誌] M.Fujimura: "LiNbO3 waveguide quasi-phase-matching second harmonic generation devices using ferroelectric-domain-inverted gratings formed by EB csanning" IEEE J.Lightwave Tech.11. (1993)
• [文献書誌] J.T.Gallo: "Method for characteriaing poled-polymer waveguides for electro-optic integrated optical circuit applications" Opt.Lett.18. (1993)
• [文献書誌] T.Sueta: "High-speed electrooptic deflector and its application to picosecond pulse generation" IEEE J.Quantum Electron. 28. 1739-1744 (1992)
• [文献書誌] T.Sueta: "Uelocity matohed electrooptic phase modulator for wide optical sidebnd generation" Electron.Lett. 28. 330-332 (1992)
• [文献書誌] T.Sueta: "A new lightwave-microwave signal conversion method" IEEE Microwave Theory Tech Symp. (1993)
• [文献書誌] T.Sueta: "A study on transmission properties of YBa_2Cu_3Dy coplanar waveguide on LiNbO_3 substrate" IEICE Trans on Electron. E57-C. 888-893 (1992)
• [文献書誌] 末田 正: "非線形光導波路分岐による光スイッチ" 第46回微小光学研究会資料. 10. 73-78 (1992)
• [文献書誌] 末田 正: "LPE成長MgO:LiNbO_3薄膜光導波路の作製と諸特性の評価" 信学会光・量エレ研・信学技報. OQE92-139. 19-24 (1992)
• [文献書誌] Y.Nakano: "¨Highly efficient single longitudinal-mode oscillation capability of gain couple distriduted feedbakc semiconductro lasers advantage of asymmetric facet coating.¨" IEEE Photon.technol.Lett.4. 308-311 (1992)
• [文献書誌] Y.Luo: "¨Gain-coupled distributed feedback seni conductor lasers with an absorptive conduction type inverted grating.¨" IEEE photonics Technology Letters.4. 692-695 (1992)
• [文献書誌] T.Yamaguchi: "¨Vertical multiple-quantum-well directonal-coupler swich with low switching voltage.¨" IEEE Photonics Technology Letters.4. 723-725 (1992)
• [文献書誌] H.L.Cao: "¨Cptimization of grating duty factor in gain-coupled DFB laser with adsorptive grating-Analysis and fabrication-.¨" IEEE Photon.Tech.Lett.4. 1099-1102 (1992)
• [文献書誌] Y.C.Chan: "¨A study on electroabsorbtion effects in coupled quantum wells.¨" Jpn.J.Appl.Phys.32. 536-539 (1993)
• [文献書誌] Y.Nakano: "¨Absorptive-grating gain-coupled MQW DFB lasers with low threshold current and high single longitudina-mode yield.¨" Jpn.J.Appl.Phys.32. 825-829 (1993)
• [文献書誌] N.Chen: "¨Chirped grating tunable DFB lasers-Novel laser diode with broaber tuning range,¨" to appear in Proceedings of SPIE.
• [文献書誌] D.K.Gautam: "“Impurity diffusion into GaAs through the SiO_2 protective layers,"" Materials.Science Forum (国際会議). 117-118. 417-422 (1993)
• [文献書誌] 多田 邦雄: "“半導体系光スイッチ"" 光学. 21. 527-534 (1992)
• [文献書誌] 中野 義昭: "“光集積回路に向けた半導体レーザー技術"" 光学. 21. 605-611 (1992)
• [文献書誌] T.Mizumoto.et al.: "Observation of Nonlenear Transmission in CdS_XSe_<1-X> doped glass waveguide optical resonators" Technical Digest of Fourth Optoelectronics Conference.OEC'92. 116-117 (1992)
• [文献書誌] T.Mizumoto,et al.: "On the design of a waveguide optical isolator employing nonreciprocal phase shift" Technical Digest of Fourth Optoelectronics Conference.OEC'92. 140-141 (1992)
• [文献書誌] T.Mizumoto.et al.: "Analytical and experimental study of waveguide optical polarization splitter with Langmuir-Blodgett cladding layer" J.Lightwave Technology.10. (1992)
• [文献書誌] T.Mizumoto,et al.: "The design of a waveguide optical isolator employing nonreciprocal phase shift" Proceedings of 6-th International Conference on Ferrites. (1993)
• [文献書誌] Y.Miyamoto: "Fabrication of ultrafine x-ray mask using procise crystal growth technique" Jpn.J.Appl.Phys.31. L432-435 (1992)
• [文献書誌] K.Shimomura: "2V Drive-Voltage Switching Operation in 1.55μm GaInAs/InP MQW Intersectional Waveguide Optical Switch" Electron.Lett.28. 955-956 (1992)
• [文献書誌] K.Shimomura: "Low-Drive Voltage Intersectional Waveguide Optical Switch using GaInAs/InP MQW Structure" IEEE Photon.Technol.Lett.4. 360-362 (1992)
• [文献書誌] S.Baba: "A Novel integrated-Twin-Guide (ITG) Optical Switch with a Built-in TIR Region" IEEE Photon.Technol.Lett.4. 486-488 (1992)
• [文献書誌] M.Takakuwa: "The analysis of waveguiding efficts on the minimum transfereable linewidth of an ultrafine x-ray mask" To be published in IEICE Trans.on Information and Systems.
• [文献書誌] K.Kurihara: "Observation of InP surfaces after (NH4)_2S_X treatment by a scanning tunneling microscope" To be published in Jpn.Appl.Phys.
• [文献書誌] Y.Miyazaki,W.Asano: "Electromagnetic Compatibility Problem of Wave Propagation and Scattering in Mobile Communication and Broadcasting Systems" Proc.1992 International Symp.on EMC,beijing. (1992)
• [文献書誌] N.Goto,Y.Miyazaki: "WDM optical switching characteristics in collinear acousto-optic module for photonic switching system" Jpn.J.Appl.Phys.supple.31-1. 227-229 (1992)
• [文献書誌] K.Hasegawa,Y.Miyazaki: "Magneto-Optic Devices using Interaction between Magnetostatic Surface Wave and Optical Guided Wave" Jpn.J.Appl.Phys.supple.31-1. 230-233 (1992)
• [文献書誌] 宮崎 保光: "半導体レーザを用いた高効率SHG" 電子情報通信学会誌. 75. 596-600 (1992)
• [文献書誌] J.Minamoto,Y.Miyazaki: "Thin film waveguide type optical neural devices by controlled Index distridution" 4th Optoelectronics Conference (OEC'92),Chiba. 16D2-17. 222-223 (1992)
• [文献書誌] K.Kudo,Y.Miyazaki: "Optical SHG waveguide devices with phase-matching using coupled mode dispersion" 4th Optoelectronics Conference (OEC'92),Chiba. 16D2-23. 234-235 (1992)
• [文献書誌] Y.Miyazaki,K.Kudo: "Optical SHG in MgO:LiNbO_3 Waveguides using Phase-Matching of Coupled Mode Dispersions for LD" Technical Digest of Non-linear Optics,Hawaii. 391-394 (1992)
• [文献書誌] 長谷川 和男,宮崎 保光: "多層導波路中の静磁表面波による光モード変換特性" 電子情報通信学会論文誌C-I. J75-C-I. 622-629 (1992)
• [文献書誌] Y.Miyazaki: "Signal Processing in Integrated Optical Devices using MSSW" Proc.of The 6th International Conference on Ferrites (ICF 6). (1993)
• [文献書誌] Y.Miyazaki,J.Minamoto: "Index Distributions of Optical Neural Computing Devices Using Graded Index Waveguides" Optoelectronics-Devices and Technologies. 8. (1993)
• [文献書誌] M.Yamada,K.Noda,Y.Kuwamura,H.Nakanishi,K.Imai: "Semiconductor Optical Modulator by Using Electron Depleting Absorption Control" IEICE Trans.ELECTRON. E75-C. 1063-1070 (1992)
• [文献書誌] K.Kuwamura,M.Yamada and M.Suzumi: "Panel-Type Semiconductor Optical Modulatu Using Electron Depleting Adsorption Control" Jpn.J.Appl.Phys.32. 578-582 (1993)
• [文献書誌] M.Yamada: "A Theoretical Analysis of Self-Sustained Pulsution Phenomena in Narrow-Stripe Semiconductor Lessrs" IEEE J.of Oaumtum Electron. 29. (1993)
• [文献書誌] M.Suhara: "Analysis of Exce intensity Noise due to External Optical Feedback in DFB Semicon duc for Lasers on the Basis of Mode Competition Theory" IEICE Trans.Electron. E75-C. (1993)
• [文献書誌] Y.Hamada,C.Adachi,T.Tsutsui,S.Saito: "Blue-Light-Emitting Oraganic Electroluminescert Devices with Oxadiazole Dyes as an Emitter" Jpn.J.Appl.Phys.31. 1812-1816 (1992)
• [文献書誌] Y.Hamada,C.Adachi,T.Tsutsui,S.Saito: "Organic-Electroluminescent Devices with Bright Blue Emission" Optoelectronics-Divices and Technologies. 7. 83-93 (1992)
• [文献書誌] M.Era,C.Adachi,T.Tsutsui,S.Saito: "Orgamic Electroluminescent Devices with Cyamine Dye Langmuir-Blodgett Film as an Emitter" Thin Solid Films. 210/211. 468-470 (1992)
• [文献書誌] N.Takada,T.Tsutsui,S.Saito: "Controlled Spontaneous Emission in Orgamic Electraluminescent Devices" Optoelectronics-Devices and Technologies.