1994 年度実績報告書

次世代ドライエッチ用、狭ギャップVHFエッチャの物理とプロセス最適制御

研究課題

研究課題/領域番号	05452106
研究機関	慶応義塾大学
研究代表者	真壁利明慶應義塾大学, 理工学部, 教授 (60095651)
研究分担者	山口由岐夫三菱化成総合研究所, 主任研究員神成文彦慶應義塾大学, 理工学部, 助教授 (40204804) 中村義春慶應義塾大学, 理工学部, 教授 (90051763) 小原実慶應義塾大学, 理工学部, 教授 (90101998)
キーワード	ドライエッチング / プラズマプロセス / 狭ギャップ・RIE / VHFプラズマ / 非平衡プラズマ / モデリング / 微粒子成長 / rfプラズマ
研究概要	1.VHFプラズマエッチャについて; 高密度プラズマ、強狭シース幅、ビーム状イオン生成、ラジカル分子の大面積一様生成等の諸点からVHFプラズマの優位点を実証した。具体的には、(a).プロセスで多用されるH_2プラズマの時空間分布をSTROESから診断し、慣用的な13.56MHzの結果と定量的な比較考察を上記の諸量について行なった。VHFでは維持電圧の低下と、同一電圧でネット発生レートに1桁以上の増加が期待できることを実証した(詳細は文献Jpn.J.Appl.Phys.33,4335(1994)参照)。(b).さらに、エッチング、アッシング用のRF-,VHF-O_2プラズマについて同様な診断からVHFエッチャーの優位性を議論した。 2.狭ギャップRIEにおける微粒子効果の観測; (a).RIEリアクター内で生成・成長・消滅する微粒子の時空間挙動を、非反応性Arプラズマ中に混入したCF_2分子のその後の発展から判断するために、Ar^+イオンレーザ光のMie散乱強度とSTROESから両像の相関を観測し、粒径,密度分布とプラズマ構造の時空間相関を把握した。微粒子成長と負イオン化がカギとなることを示した(成果は5.1の文献Plasma Sources Sci.Technol.3,310(1994)に詳説)。 (b).緩和連続モデルを発展させ、微粒子RFプラズマをモデル化し、(a)の外部プラズマ条件のもと、微粒子生成と時空間挙動をシミュレーションから実現し、定量的理解を深めた。(成果は投稿中)

研究成果

(18件)

すべてその他

すべて文献書誌 (18件)

[文献書誌] Z.Lj.Petrovic,F.Tochikubo,S.Kakuta,T.Makabe: "Spatiotemporal optical emission spectroscopy of rf discharges in SF_6," J.Appl.Phys.73. 2163-2172 (1993)
[文献書誌] T.Kitamura,N.Nakano,T.Makabe and Y.Yamaguchi: "A computational investigation of the RF plasma structures and their production efficiency in the frequency range from HF to VHF" Plasma Sources Sci.Technol.2.40-45 (1993)
[文献書誌] S.Kakuta,Z.Lj.Petrovic,F.Tochikubo,T.Makabe: "Influence of frequency,pressure,and mixture ratio of electronegative gas on electrical characteristics of rf discharges in N_2-SF_6 mixtures," J.Appl.Phys.74,. 4923-4931 (1993)
[文献書誌] S.Kakuta,T.Makabe F.Tochikubo: "Frequency dependence on the structure of radio frequency glow discharges in Ar," J.Appl.Phys.74. 4907-4914. (1993)
[文献書誌] T.Kamata,S.Kakuta,Y.Yamaguchi,T.Makabe: "A correlation between particle growth and spatiotemporal RF plasma structure," Plasma Source Sci.Technol.3. 310-313. (1994)
[文献書誌] R.E.Robson and T.Makabe: "Transport coefficients and velocity distribution function of an ion swarm in an A.C.electric field obtained from the BGK kinetic equation," Aust.J.Phys.47. 305-314. (1994)
[文献書誌] N.Nakano,Z.Lj.Petrovic,T.Makabe: "The radical transport in the narrow-gap-reactive-ion etcher in SF_6 by the relaxation continuum model," Jpn.J.Appl.Phys.33(4B). 2223-2230. (1994)
[文献書誌] N.Nakano,N.Shimura,Z.Lj.Petrovic,T.Makabe: "Simulation of rf glow discharge in SF_6 by the relaxation continuum Physical structure and function of the narrow-gap reactive-ion etcher," Phys.Rev.E49. 4455-4465. (1994)
[文献書誌] K.Kondo,H.Kuroda T.Makabe: "Spatiotemporal characteristics determined by a relaxation continuum model of an inductively coupled plasma," Appl.Phys.Lett.65. 31-33. (1994)
[文献書誌] K.Maeda and T.Makabe;: "Time dependent RF swarm transport by direct numerical procedure of the Boltzmann ewuation," Jpn.J.App.Phys.33(7b). 4173-4176. (1994)
[文献書誌] K.Kondo,H.Kuroda T.Makabe;: "A study of the sustaining mechanism in an inductively coupled plasma," Jpn.J.Appl.Phys.33(7B). 4254-4257. (1994)
[文献書誌] F.Tochikubo,Z.Petrovic,S.Kakuta,N.Nakano,T.Makabe: "Influence of Ar metastable on the discharge structure in Ar and N_2 mixture in RF discharges at 13.56 MHz," Jpn.J.Appl.Phys.33(7B). 4271-4275. (1994)
[文献書誌] S.Kakuta,T.Kitajima,Y.Okabe and T.Makabe;: "Experimental study of very-high-frequency plasma in H_2 by spatiotemporally resolved optical emission spectroscopy" Jpn.J.Appl.Phys.33(7B). 4335-4339. (1994)
[文献書誌] K.Maeda and T.Makabe;: "Radiofrewuency electron swarm transport in reactive gases and plasmas," Physica.Scripta. 1(T53). 61-69. (1994)
[文献書誌] T.Makabe and K.Maeda;: "Radiofrequency electron swarm transport in gases," Prog.Astro.& Aeronautics. 160. 333-343. (1994)
[文献書誌] N.Nakano and T.Makabe;: "Influence of driving frequency on narrow-gap reactive-ion etching in SF_6," J.Phys.D28. 31 39. (1995)
[文献書誌] S.Kakuta,T.Kamata,T.Makabe,S.Kobayashi: "Study of surface charges on dielectric electrodes in an rf glow discharge," J.Appl.Phys. 77. 985-991. (1995)
[文献書誌] M.Shibata,N.Nakano T.Makabe;: "O_2 rf discharge structure in parallel plates reactor at 13.56 MHz for material processing," J.Appl.Phys.(accepted for publication).

1994 年度 実績報告書

次世代ドライエッチ用、狭ギャップVHFエッチャの物理とプロセス最適制御

研究代表者

真壁 利明 慶應義塾大学, 理工学部, 教授 (60095651)

研究成果

[文献書誌] Z.Lj.Petrovic,F.Tochikubo,S.Kakuta,T.Makabe: "Spatiotemporal optical emission spectroscopy of rf discharges in SF_6," J.Appl.Phys.73. 2163-2172 (1993)

[文献書誌] T.Kitamura,N.Nakano,T.Makabe and Y.Yamaguchi: "A computational investigation of the RF plasma structures and their production efficiency in the frequency range from HF to VHF" Plasma Sources Sci.Technol.2.40-45 (1993)

[文献書誌] S.Kakuta,Z.Lj.Petrovic,F.Tochikubo,T.Makabe: "Influence of frequency,pressure,and mixture ratio of electronegative gas on electrical characteristics of rf discharges in N_2-SF_6 mixtures," J.Appl.Phys.74,. 4923-4931 (1993)

[文献書誌] S.Kakuta,T.Makabe F.Tochikubo: "Frequency dependence on the structure of radio frequency glow discharges in Ar," J.Appl.Phys.74. 4907-4914. (1993)

[文献書誌] T.Kamata,S.Kakuta,Y.Yamaguchi,T.Makabe: "A correlation between particle growth and spatiotemporal RF plasma structure," Plasma Source Sci.Technol.3. 310-313. (1994)

[文献書誌] R.E.Robson and T.Makabe: "Transport coefficients and velocity distribution function of an ion swarm in an A.C.electric field obtained from the BGK kinetic equation," Aust.J.Phys.47. 305-314. (1994)

[文献書誌] N.Nakano,Z.Lj.Petrovic,T.Makabe: "The radical transport in the narrow-gap-reactive-ion etcher in SF_6 by the relaxation continuum model," Jpn.J.Appl.Phys.33(4B). 2223-2230. (1994)

[文献書誌] N.Nakano,N.Shimura,Z.Lj.Petrovic,T.Makabe: "Simulation of rf glow discharge in SF_6 by the relaxation continuum Physical structure and function of the narrow-gap reactive-ion etcher," Phys.Rev.E49. 4455-4465. (1994)

[文献書誌] K.Kondo,H.Kuroda T.Makabe: "Spatiotemporal characteristics determined by a relaxation continuum model of an inductively coupled plasma," Appl.Phys.Lett.65. 31-33. (1994)

[文献書誌] K.Maeda and T.Makabe;: "Time dependent RF swarm transport by direct numerical procedure of the Boltzmann ewuation," Jpn.J.App.Phys.33(7b). 4173-4176. (1994)

[文献書誌] K.Kondo,H.Kuroda T.Makabe;: "A study of the sustaining mechanism in an inductively coupled plasma," Jpn.J.Appl.Phys.33(7B). 4254-4257. (1994)

[文献書誌] F.Tochikubo,Z.Petrovic,S.Kakuta,N.Nakano,T.Makabe: "Influence of Ar metastable on the discharge structure in Ar and N_2 mixture in RF discharges at 13.56 MHz," Jpn.J.Appl.Phys.33(7B). 4271-4275. (1994)

[文献書誌] S.Kakuta,T.Kitajima,Y.Okabe and T.Makabe;: "Experimental study of very-high-frequency plasma in H_2 by spatiotemporally resolved optical emission spectroscopy" Jpn.J.Appl.Phys.33(7B). 4335-4339. (1994)

[文献書誌] K.Maeda and T.Makabe;: "Radiofrewuency electron swarm transport in reactive gases and plasmas," Physica.Scripta. 1(T53). 61-69. (1994)

[文献書誌] T.Makabe and K.Maeda;: "Radiofrequency electron swarm transport in gases," Prog.Astro.& Aeronautics. 160. 333-343. (1994)

[文献書誌] N.Nakano and T.Makabe;: "Influence of driving frequency on narrow-gap reactive-ion etching in SF_6," J.Phys.D28. 31 39. (1995)

[文献書誌] S.Kakuta,T.Kamata,T.Makabe,S.Kobayashi: "Study of surface charges on dielectric electrodes in an rf glow discharge," J.Appl.Phys. 77. 985-991. (1995)

[文献書誌] M.Shibata,N.Nakano T.Makabe;: "O_2 rf discharge structure in parallel plates reactor at 13.56 MHz for material processing," J.Appl.Phys.(accepted for publication).

1994 年度実績報告書

真壁利明慶應義塾大学, 理工学部, 教授 (60095651)