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[文献書誌] M.Shikida: "Fabrication of an electrostatic film actuator with an S-shaped film" Tech.Dig.of Transducers'95. 426-429 (1995)
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[文献書誌] K.Sato: "Recent Advances in MEMS Technologies" Proc.of the First International Micromachine Symposium. 73-83 (1995)
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[文献書誌] M.Shikida: "Micromachined S-shaped Actuator" Proc.of IEEE 6th Int.Symp.on Micromachine and Human Science. 167-172 (1995)
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[文献書誌] 佐藤一雄: "エッチングによる微細な3次元構造体の加工" 精密工学会誌. 61・10. 1373-1376 (1995)
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[文献書誌] T.Mori: "Mechanism of Gradient Coating by Means of RF Magnetron Sputtering" Proceedings of IMMM'95. 501-506 (1995)
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[文献書誌] 森敏彦: "硬質膜の傾斜機能コーティング機構の解明" 機械学会論文集A編. 61・591. 2413-2420 (1995)
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[文献書誌] K.Yamaguchi: "Micromachining Using UV Laser Induced Polymerization" Proc.of IMMM'95. 535-542 (1995)
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[文献書誌] K.Sakai: "Improvements in Mechanical Properties of Al-Li Alloy Using High Pressure" High Pressure Research on Solids. 85-98 (1995)
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[文献書誌] 高橋裕: "超高圧による面心立方C60の重合と常圧熱処理における回復過程" 日本金属学会誌. 60・8. 700-707 (1996)
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[文献書誌] K.Sakai: "Variations of Elastic Moduli during Ageing Process of Al-Li Solid Solutions Treated at High Pressure" J.Mater.Sci.31・11. 3009-3013 (1996)
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[文献書誌] K.Sakai: "Elastic Moduli of Al-Li Alloys Treated at a High Pressure of 5.4 GPa" J.Mater.Sci.31・12. 3309-3313 (1996)
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[文献書誌] M.Shikida: "Response Time Measurement of Electrostatic S-shaped Film Actuator Related to Environmental Gas Pressure Conditions" Proc.of IEEE MEMS Workshop. 210-215 (1996)
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[文献書誌] K.Sato: "Micro tensile-test system fabricated on a single crystal silicon ship" Proc.of IEEE MEMS Workshop. 360-364 (1996)
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[文献書誌] 中本剛: "紫外線感光性樹脂を使ったマイクロストラクチュアの製造(第4報、集束ビーム描画法による三次元部品の製作)" 日本機械学会論文集(C編). 62・594. 677-682 (1996)
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[文献書誌] 中本剛: "紫外線感光樹脂を使ったマスクパターン転写法とビーム描画法によるマイクロ部品の作製" 高分子論文集. 53・4. 209-217 (1996)
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[文献書誌] T.Nakamoto: "Manufacturing of Three-dimensional Micro-parts by UV Laser Induced Polymerization" J.Micromech.Microeng.6. 240-253 (1996)
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[文献書誌] K.Yamaguchi: "Manufacturing of High Aspect Ratio Micro Structures Using UV Sensitive Photopolymer" JSME Int.J.39・2. 387-396 (1996)
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[文献書誌] 松室昭仁: "C60バルク体の高圧力成形とその機械的性質" 日本機械学会論文集(A編). (掲載予定). (1997)