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[文献書誌] Yunlong Li: "Plasma structure in a moditied magnetron-typed RF discharge" Proc. of 13Hth Sympo. on Plasma Processing. 53-56 (1996)
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[文献書誌] Kohgi Kato: "Ion-energy control in a low electron-temperature plasma" Proc. of 13Hth Sympo. on Plasma Processing. 183-186 (1996)
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[文献書誌] Yunlong Li: "Electron temperature control in large-diameter radio-frequency plasma" Proc. of 3rd ASIA-PACIFIC Conf. Plasma Science & Technology. 2. 435-439 (1996)
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[文献書誌] Satoru Inzuka: "Ion energy control in ECR Plasma" Proc. of 3rd ASIA-PACIFIC Conf. Plasma Science & Technology. 2. 429-434 (1996)
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[文献書誌] Yunlong Li: "Plasma-density control in the magnetron-typed RF plasma" Plasma Sources Science & Technology. 5. 241-244 (1996)
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[文献書誌] Takashi Ono: "A large-diameter uniform plasma produced by a plane slotted ECR antenna" Plasma Sources Science & Technology. 5. 293-298 (1996)
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[文献書誌] Shin Hiyama: "Wide-area uniform plasma processing in an ECR plasma" Plasma Sources Science & Technology. 5. 299-304 (1996)
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[文献書誌] 李雲龍: "変形マグネトロン高周波放電における大面積プラズマ生成" 電気学会プラズマ研究会資料. EP-96-97. 21-30 (1996)
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[文献書誌] 佐藤徳芳: "大面積均一プラズマ生成技術" Challenge of Intelligence for Future BREAK THROUGH. 11. 11-15 (1996)
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[文献書誌] Yunlong Li: "Production of large-diameter plasma by modified magnetron-typed RF discharge" Proc. of 3rd Int. Conf. on Reactive Plasmas and 14th Sympo. Plasma Processing. 211-212 (1997)
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[文献書誌] Noriyoshi Sato: "Sputtering control in a modified RF plasma" Proc. of Int. Workshop on Basic Aspects of Nonequilibrium Plasmas Interacting with Surfaces. 27-28 (1997)
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[文献書誌] Yunlong Li: "Control of Plasma structure in modified magnetron-typed radio-frequency discharge" 1996 Int. Conf. on Plasma Physics. (in press). (1997)
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[文献書誌] Jung-Hyung Kim: "M=+1 mode Helicon wave excitation using solenoid antenna" Phys. Lett.A221. 94-96 (1996)
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[文献書誌] P.W.Lee: "Interpretation of neutral distribution thngh spatial profile of plasma emission" Phys. Lett.A213. 186-188 (1996)
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[文献書誌] Jung-Hyung Kim: "The deposition of SiOF film with low dielectric constant in a Helicon plasma" Appl. Phys. Lett.68. 1507-1509 (1996)
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[文献書誌] 佐藤徳芳: "大面積α-Si膜形成用プラズマの生成と制御" 電子情報通信学会技術研究報告. 95. 101-106 (1996)
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[文献書誌] 佐藤徳芳: "プロセス用大口径プラズマの生成と制御" 電子情報通信学会技術研究報告. 96. 43-50 (1996)
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[文献書誌] 佐藤徳芳: "プロセス用プラズマの制御" '96青梅市フロンティアサイエンス会議(時間と空間)予稿集. 113-119 (1996)
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[文献書誌] 佐藤徳芳: "成膜用プラズマの制御" 第6回ファインプロセステクノロジー・ジャパン′96セミナー要録. R5. 4-8 (1996)