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[文献書誌] M.Takai: "Application of Medium Energy Nuclear Microprobe to Semiconductor Process Steps" Nucl.Instr.and Methods. B118. 418-422 (1996)
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[文献書誌] M.Takai: "Surface Structure of Sulfur-Terminated GaAs by Medium Energy Ion Scattering" Nucl.Instr.and Methods. B118. 552-555 (1996)
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[文献書誌] T.Kishimoto: "Well Structure by High Energy Boron Implantation for Soft Error Reduction in DRAMs" Jpn.J.Appl.Phys.34. 6899-6902 (1996)
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[文献書誌] M.Takai: "Applications of Nuclear Microprobes in Semiconductor Industry" Nucl.Instr.and Meth.B113. 330-335 (1996)
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[文献書誌] M.Takai: "Modification of Field Emitter Array(FEA)Tip Shape by Focused Ion Beam Irradiation" J.Vac.Sci.Techn.B14. 1973-1976 (1996)
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[文献書誌] M.Takai: "Soft Error Susceptibility and Immune Structures in Dynamic Random Access Memories(DRAMs)Investigated by Nuclear Microprobes" IEEE Trans.Nucl.Sci.43. 696-704 (1996)
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[文献書誌] H.Morimoto: "Electron Beam Induced Deposition of Pt for Field Emitter Arrays" Jan.J.Appl.Phys.35. 6623-6625 (1996)
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[文献書誌] T.Kishimoto: "Control of Carrier Collection Efficiency in n+p Diode with Retrograde Well and Epitaxial Layers" Jan.J.Appl.Phys.(in press).
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[文献書誌] M.Takai: "Recent Applications of Nuclear Microprobe Techniques to Microelectronics" Nucl.Instr.and Meth.B. (in press).
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[文献書誌] Y.K.Park: "Detectors for Microprobe Applications at Medium Ion Energy" Nucl.Instr.and Meth.B. (in press).
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[文献書誌] Y.K.Park: "Ir and Rh Silicide Formation Investigated by Microbeam RBS" Nucl.Instr.and Meth.B. (in press).
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[文献書誌] T.Kishimoto: "Suppression of Carrier Collection Efriciency in Diode with Retrograde Well and Epitaxial Layers for Soft-Error Immunity" Nucl.Instr.and Meth.B. (in press).