-
[文献書誌] M.Takai: "Multi-Dimensional Micro Aralysis of Semicondacter Device Strucfures Using Ion Microproke" 放射線. 23. 15-23 (1997)
-
[文献書誌] T.Kishimoto: "Control of Carrier Collection Efficiency in n^+P Diode with Retrograde Well and Epitaxial layers" Jpn.J.Appl.Phys.36. 3460-3462 (1997)
-
[文献書誌] M.Takai: "Selective Metal Deposition Using Metal-Covered Scanning Tionreling Microscope Tips" J.Microelectronic Eng.35. 353-356 (1997)
-
[文献書誌] T.Kishimoto: "Suppression of Ion.Induced Charge Collection Against Soft Error" Proc.of the llth Interu.Conf.on Ion Iunplantation Technology (IEEE). 9-12 (1997)
-
[文献書誌] F.Paszti: "Detectors for Microprobe Applicatione at Medium Ion Energy" Nucl.Iustr.and Meth.B130. 247-252 (1997)
-
[文献書誌] M.Takai: "Recent Application of Nucl.Microproke Techuigesy to Microectionicy" Nucl,Instr.and nethe.B130. 466-469 (1997)
-
[文献書誌] T.Kishimoto: "Suppression of Carrier Collection Efficiency in Diode with Retrogrodo Well and Epitoyers" Nucl,Iustr.and Meth.B130. 524-527 (1997)
-
[文献書誌] Y.K.Park: "Microanalysis of Submicron Patterned WSix Structure using Nicleor Microproke" Nacl,Iustr.and meth.B130. 534-538 (1997)
-
[文献書誌] Y.K.Park.: "Ir and Rh Silicide Formation Investigated by Microproke RBS" Nucl.Instr.and Meth.B130. 728-733 (1997)
-
[文献書誌] Y.K.Park: "Microanalysis of Impurity Con tomingtion in Maskiossly Etched Avea using FIB" Jpn.J.Appl.Pluys.36. 7712-7716 (1997)
-
[文献書誌] M.Takai: "Surface,Sfrueture,of Hydvogen terminated (100) S : by Medium Energy Ion Scateroy" Nucl.Iustr.and Meth.B(in press). (1998)
-
[文献書誌] Y.K.Park: "Microanalysis of Maskessly Fobricated Microstructuves using Nuclear Microproke" Nucl.Instr.and Meth.B(in press). (1998)
-
[文献書誌] M.Takai: "Fabrication of FEA using Focuged Ion and Electron Beam Indueed Reaction" J.Microelectronic Evy.(in press). (1998)
-
[文献書誌] M.Takai: "Proc.of,Atomic Loyer Charaetesizetion 97" Microavaly sis Usivy Ion Microprokes, 6 (1998)
-
[文献書誌] M.Takai: "Proc of the 7th Rodiative Ray Process Symp." Recent Research Activites of Ion Microproke in the World, 4 (1997)