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[文献書誌] Y.K.Park: "Microanalysis of Masklessly Fabricated Microstructures using Nuclear Microprobe" Nucl.Instr.and Meth.B136-138. 373-378 (1998)
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[文献書誌] M.Takai: "Surface Structure of Hydrogen Terminated (100) Si by Medium Energy Ion Scattering" Nucl.Instr.and Meth.B136-138. 1112-1115 (1998)
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[文献書誌] M.Takai: "Fabrication of Field Emitter Array Using Focused Ion and Electron Beam Induced Reaction" Microelectronic Engineering 41/42. 41/42. 453-456 (1998)
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[文献書誌] Y.K.Park: "Mircroprobe Analysis of Pt Films Deposited by Beam Induced Reaction" Japan.J.Appl.Phys. 37. 7042-7046 (1998)
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[文献書誌] Y.K.Park: "Comparison of FIB-Induced Physical and Chemical Etching" to be published in the Proc.of the Intern.Conf.on Ion Implantation Technology, June 22-26,1998,Kyoto.(1999)
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[文献書誌] Y.K.Park: "Microanalysis of FIB/EB induced deposited Pt films using ion microprobe" to be published in the Proc.of the Intern.Conf.on Ion Implantation Technology, June 22-26,1998,Kyoto.(1999)
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[文献書誌] Y.K.Park: "Comparison of Beam Process-Induced Deposition using Ion Microprobe" to be published in Nucl.Instr.and Methods B. (1999)
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[文献書誌] M.Takai: "Reliability Testing For The Next Generation Of ULSI with SOI MOSFET's" to be published in Nucl.Instr.and Methods B. (1999)
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[文献書誌] Y.K.Park: "Investigation of Focused Ion Beam and Electron Beam Induced Deposition of Cu Films Using Nuclear Microprobe" to be published in Nucl.Instr.and Methods B. (1999)
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[文献書誌] Y.K.Park: "Impurity Incorporation during Beam Assisted Processing Analyzed using Nuclear Microprobe" to be published in Nucl.Instr.and Methods B. (1999)