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[文献書誌] M. Tadokoro, N. Nakano, Z. Petrovic and T. Makabe: "Space-and Time-Resolved 3D Profile of Inductively Coupled Plasma in O_2" 191th Meeting of ECS : Symposia, "Prosess control, diagnostics and modeling in semicomductor manufacturing II". (1997)
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[文献書誌] K. Maeda and T. Makabe: "Study of RF electron searm transpor under density gradient by direct numerical procedure of the Boltzmann equation" Europhysics Conference Abstracts, ESCAMPIG 94. 18E. 151-152 (1996)
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[文献書誌] T. Makabe: "Robot assisted optical emission tomography in a CCP and ICP and Related numerical results" Proc. of 18th SPIG. 248 (1996)
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[文献書誌] N. Nakano and T. Makabe: "Modeling of narrow gap reactive ion etcher by the relaxation Continuum Model" Proc. of 18th SPIG. 249 (1996)
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[文献書誌] A. Okigawa, N. Nakano, T. Makabe and Z. Petrovic: "Diagnostics of non-equilibrium inductively coupled plasamas in Ar" Proc. of 18th SPIG. 410-413 (1996)
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[文献書誌] T. Kitajima, M. Izawa, N. Nakano and T. Makabe: "Comparison of net procuction rate between 100MHz and 13.56MHz in CCPin Ar by 2D optical emission spectroscopy" Proc. of 18th SPIG. 414-417 (1996)
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[文献書誌] K. Maeda, T. Makabe, N. Nakano, S. Bzenic and Z. Lj. Petrovic: "Diffusion tensor in electron transport in gases in a radiofrequency field" Phys. Rev. E. 55・56A (in press). (1997)
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[文献書誌] T. Kitajima, M. Izawa, N. Nakano and T. Makabe: "Time resolved 2D structure of a rf ccp" J. pPhys. D. (accepted for publication). (1997)
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[文献書誌] M. Tadokoro, A. Okigawa, A. Itoh, N. Nakano, Z. Lj. Petrovic and T. Makabe: "Three Dimensional Potical Emission Tomography of an Inductively coupled Plasma" Jpn. J. Appl. Phys.(submitted).
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[文献書誌] T. Tadokoro, H. Hirata, A. Okigawa, H. Nabeta, N. Nakano, Z. Petrovic and T. Makabe: "Time resolved Optical Emission Spectroscopy of an Inductively Coupled Plasma in Around O_2" Phys. Rev. E. (submitted).
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[文献書誌] R. Hashido, M. Hasebe, Y. Hosokawa, N. Nakano, Y. Yamaguchi and T. Makabe: "A two dimentional transport of submicron particles in ccp reactor" Jpn. J. Appl. Phys.(submitted).
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[文献書誌] K. F. Ness and T. Makabe: "Electron transport in Ar in crossed Electric and Magnetic Fields when Ionization is significant" Phys. Rev. E. (to submit, May 16. 1997).