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[文献書誌] K.Miyazaki,T.Kajiwara,K.Uchino,K.Muraoka,T.Okada and M.Maeda: "Detection of hydrogen atoms in silane plasmas using laser-induced fluorescence by Lyman-alpha two-photon and simultaneous Balmer-alpha excitations" Journal of Vacuum Science & Technlogy A. Vol.15 No.1. 149-153 (1997)
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[文献書誌] W.Cronrath,M.D.Bowden,K.Uchino,K.Muraoka,H.Muta and M.Yoshida: "Spatial distributions of electrontemperature and density in electron cyclotron resonance discharges" Journal of Applied Physics. Vol.81 No.5. 2105-2113 (1997)
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[文献書誌] Y.Hirakawa,T.Okada,M.Maeda and K.Muraoka: "Coherent extreme-ultraviolet generation at 64 nm by efficient frequency tripling an ArF laser" Journal of Optical Society of America. Vol.14 No.5. 1029-1034 (1997)
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[文献書誌] T.Sakada,T.Miyao,K.Uchino and K.Muraoka: "Studies of a Magnetic Neutral Loop Discharge Based on Laser Diagnostics of Electron Behavior and Atomic Processes" Japanese Journal of Applied Physics. Vol.36 No.11. 6981-6985 (1997)