1998 年度実績報告書

スピン偏極電子トンネル型大容量・高速ランダムアクセスメモリー

研究課題

研究課題/領域番号	09305024
研究機関	東京工業大学
研究代表者	直江正彦東京工業大学, 工学部, 教授 (40016465)
研究分担者	松下伸広東京工業大学, 工学部, 助手 (90229469) 金田久美子東京工業大学, 工学部, 助手 (10108227) 中川茂樹東京工業大学, 工学部, 助教授 (60180246)
キーワード	スピン偏極電子 / スピンバルブ / トンネル効果 / 交換バイアス磁界 / 反強磁性層 / デュアルスピンバルブ / Si下地層 / 不揮発性メモリー
研究概要	本年度はトンネル型スピンバルブ素子の交換バイアス磁界印加用反強磁性FeMn層の作製条件の最適化を行った。また、共鳴トンネル効果による大幅な感度の向上が期待できるデュアルスピンバルブ素子の構造に不可欠なボトム型スピンバルブ構造の最適化を行なった。 (1) 反強磁性層の結晶子配向性制御による特性改善 FeMn層の配向制御用下地層としてSiとSi_3N_4を比較した。電子線回折により膜成長初期段階での結晶子配向を比較したところ、[Si_3N_4/Ni-Fe]膜ではNi-Feは配向姓がないが、Siを下地層に用いた[Si/Ni-Fe]膜では、(111)面配向が優勢であることがわかった。Si下地層上ではNi-Feが(111)面配向し、その上に格子間隔の近いFeMnの(111)面がヘテロエキタピシャル的に成長することが確認できSi下地層が非常に有効な配向制御層として機能することがわかった。Si膜厚は約20Åが最も効果的であり、約90 Oeの交換バイアス磁界H_<CX>を得ることに成功した。 (2) デュアルスピンバルブ用ボトム型スピンバルブの反強磁性層の特性改善トンネル電流型スピンバルブ素子を高感度にする試みとして、フリー層を挟んだ上下のピン層に反強磁性層を用いて磁化を固定するデュアルスピンバルブ構造の二重トンネル接合が考えられる。この中で必要となるボトム型スピンバルブのFeMn層の配向制御に[Si/Ni-Fe]複合下地層を用いたところ、FeMn層の結晶配向性が向上し、Ni-Fe層に誘導磁気異方性が発現することが確認できた。このように本研究で見出されたSi下地層による結晶子配向制御法を用いて(111)配向のFeMn層を作製することができ,トップ型の構造においてSi層厚20Åにおいて90 OeのH_<CX>を得ることに成功した。また,[Si/Ni-Fe]二層膜を下地層に用いてボトム型の構造のFeMnにおいて70 OeのH_<CX>を得ることに成功した。

研究成果
(31件)

すべてその他

すべて文献書誌 (31件)

[文献書誌] Eisuke Suzuki: "Mechanism of Composition Change in Sputter Deposition of Barium Ferrite Films with Sputtering Gas Pressure" Journal of Applied Physics. 83巻・11号. 6250-6252 (1998)
[文献書誌] Satoshi Iwatsubo: "Magnetic Properties of Fe Films Deposited by Ar,Kr,and Xe Ion Beam Sputtering" Journal of Applied Physics. 83巻・11号. 6667-6669 (1998)
[文献書誌] Masahiko Naoe: "Preparation of Soft Magnetic Films of Nanocrystalline Fe-Cu-Nb-Si-B Alloy by Facing Targets" Journal of Applied Physics. 83巻・11号. 6673-6675 (1998)
[文献書誌] Yasuyoshi Miyamoto: "Improvement of GMR Characteristics in[Ni81Fe19/Cu]Multilayers by Interfacial Modulation Technique Using Kr Ions" IEEE Trans.on Magn.MAG34巻・4号. 921-923 (1998)
[文献書誌] Susumu Abe: "Dependence of Large Barkhausen Jump on Length of a Vicalloy Fine Wire with Torsion Stress" IEEE Trans.on Magn.MAG34巻・4号. 1318-1320 (1998)
[文献書誌] Takayuki Ichihara: "Three-Demensional Analysis of Dual Track Complementary Type of Heads for Perpendicular Magnetic Recording" IEEE Trans.on Magn.MAG34巻・4号. 1489-1491 (1998)
[文献書誌] Akimitsu Morisako: "Read Write Characteristics of Hexagonal Barium Ferrite Sputtered Films Prepared by Post Deposition Annealing" IEEE Trans.on Magn.MAG34巻・4号. 1630-1632 (1998)
[文献書誌] Nobuhiro Matsushita: "Preparation and Characteristics of Co-Zn Ferrite Rigid Disks without Protective Layers for High Density Recording" IEEE Trans.on Magn.MAG34巻・4号. 1639-1641 (1998)
[文献書誌] Sadao Kadokura: "Nano-size Magnetic Crystallite Formation in Co-Cr Thin Films for Perpendicular Recording Media" IEEE Trans.on Magn.MAG34巻・4号. 1642-1644 (1998)
[文献書誌] Kohki Noda: "Deposition of High-Durability Protective Layers with a Composite Structure of DLC and GLC by Facing-Targets Sputtering" IEEE Trans.on Magn.MAG34巻・4号. 1750-1752 (1998)
[文献書誌] Nobuhiro Matsushita: "Control of Magnetocrystalline Anisotropy of Co-Zn Ferrite Sputtered Films" Journal of the Magnetics Society of Japan. 22,[S1]. 117-119 (1998)
[文献書誌] Kenji Noma: "Control of Microcrystal Structure of BaM Ferrite Films with Perpendicular Magnetic Anisotropy Deposited Using Plasma-Free Sputtering System" Journal of the Magnetics Society of Japan. 22,[S1]. 120-122 (1998)
[文献書誌] Tomoyoshi Siosawa: "Preparation of Ba Ferrite Film with Well c-axis Orientation Using Pt Underlayer" Journal of the Magnetics Society of Japan. 22,[S1]. 123-125 (1998)
[文献書誌] Tatsuo Namikawa: "Crystal Structure and Magnetic Characteristics of(La,Sr)MnO_3 Films Deposited by Kr Sputtering" Journal of the Magnetics Society of Japan. 22,[S1]. 203-205 (1998)
[文献書誌] 松下伸広: "垂直磁気記録用高保持力・大角形比Baフェライト薄膜" 日本応用磁気学会誌. 22,[S3]. 27-31 (1998)
[文献書誌] 松下伸広: "Baフェライト磁気ディスクの低温作製と記録再生特性" 日本応用磁気学会誌. 22,[4-2]. 229-232 (1998)
[文献書誌] 中川茂樹: "スパッタ法による磁性膜作製におけるガス種の検討" 表面技術. 49巻10号. 1078-1082 (1998)
[文献書誌] Jie Feng: "Al Substituted Ba Ferrite Films with High Coercivity and Excellent Squareness for Low Noise Perpendicular Recording Layer" Journal of Applied Physics. 85巻・8号(掲載予定). (1999)
[文献書誌] Shigeki Nakagawa: "Ultra-Thin Si Buffer Layers to Imptove the Exchange Bias Between Ni-Fe and Fe-Mn Layers" Journal of Applied Physics. 85巻・8号(掲載予定). (1999)
[文献書誌] Shigeki Nakagawa: "Study of Magnetization Reversal Mechanism of Very Thin Film with Perpendicular Magnetic Anisotropy by Means of the Anomalous Hall Effect" Journal of Applied Physics. 85巻・8号(掲載予定). (1999)
[文献書誌] Yasuyoshi Miyamoto: "Effects of Ion Bombardment to Interfaces on Residual Internal Stress and Crystallite Structure of Multilayered Films" Vacuum. (掲載予定). (1999)
[文献書誌] Takayuki Ichihara: "Analysis of Stray Magnetic Field at the Substrate and Effect of Applying External Magnetic Field in Facing Targets Sputtering" Vacuum. (掲載予定). (1999)
[文献書誌] Nobuhiro Matsushita: "Plasma Diagnosis and Low-Substrate-Temperature Deposition of Ba Ferrite Films in a Damage-Free Sputtering Apparatus with Mixed Gases" Vacuum. (掲載予定). (1999)
[文献書誌] Masahiko Naoe: "Preparation of Co-Cr-Ta Films with Nano-Size Magnetic Domains for 1000 kfci Media" J.Magn.Magn.Materials. (掲載予定). (1999)
[文献書誌] Jie Feng: "Effect of Al Substitution for Fe in Ba Ferrite Thin Films" J.Magn.Magn.Materials. (掲載予定). (1999)
[文献書誌] Nobuhiro Matsushita: "Co-Zn Ferrite Films Prepared by Facing Targets Sputtering System for Longitudinal Recording Layer" J.Magn.Magn.Materials. (掲載予定). (1999)
[文献書誌] Nobuhiro Matsushita: "Relationship Between Coercivity and Deposition Conditions of Ba Ferrite Films Prepared by Facing Targets Sputtering Apparatus" J.Magn.Magn.Materials. (掲載予定). (1999)
[文献書誌] Nobuhiro Matsushita: "Relationship Between Coercivity and Deposition Conditions of Ba Ferrite Films Prepared by Facing Targets Sputtering Apparatus" J.Magn.Magn.Materials. (掲載予定). (1999)
[文献書誌] Shigeki Nakagawa: "Study of Initial Growth Region of Co_<83>Cr_<17> in Co_<83>Cr_<17>/Co_<67>Cr_<33>/Cr Trilayered Films for Longitudinal Recording Media" J.Magn.Magn.Materials. (掲載予定). (1999)
[文献書誌] 一瀬誠: "PtおよびAu下地層を使用したBaフェライト薄膜の作製" 日本応用磁気学会誌. (掲載予定). (1999)
[文献書誌] 馮潔: "Al置換BaMフェライト薄膜の磁気特性" 日本応用磁気学会誌. (掲載予定). (1999)

1998 年度 実績報告書

スピン偏極電子トンネル型大容量・高速ランダムアクセスメモリー

研究代表者

直江 正彦 東京工業大学, 工学部, 教授 (40016465)

研究成果

[文献書誌] Eisuke Suzuki: "Mechanism of Composition Change in Sputter Deposition of Barium Ferrite Films with Sputtering Gas Pressure" Journal of Applied Physics. 83巻・11号. 6250-6252 (1998)

[文献書誌] Satoshi Iwatsubo: "Magnetic Properties of Fe Films Deposited by Ar,Kr,and Xe Ion Beam Sputtering" Journal of Applied Physics. 83巻・11号. 6667-6669 (1998)

[文献書誌] Masahiko Naoe: "Preparation of Soft Magnetic Films of Nanocrystalline Fe-Cu-Nb-Si-B Alloy by Facing Targets" Journal of Applied Physics. 83巻・11号. 6673-6675 (1998)

[文献書誌] Yasuyoshi Miyamoto: "Improvement of GMR Characteristics in[Ni81Fe19/Cu]Multilayers by Interfacial Modulation Technique Using Kr Ions" IEEE Trans.on Magn.MAG34巻・4号. 921-923 (1998)

[文献書誌] Susumu Abe: "Dependence of Large Barkhausen Jump on Length of a Vicalloy Fine Wire with Torsion Stress" IEEE Trans.on Magn.MAG34巻・4号. 1318-1320 (1998)

[文献書誌] Takayuki Ichihara: "Three-Demensional Analysis of Dual Track Complementary Type of Heads for Perpendicular Magnetic Recording" IEEE Trans.on Magn.MAG34巻・4号. 1489-1491 (1998)

[文献書誌] Akimitsu Morisako: "Read Write Characteristics of Hexagonal Barium Ferrite Sputtered Films Prepared by Post Deposition Annealing" IEEE Trans.on Magn.MAG34巻・4号. 1630-1632 (1998)

[文献書誌] Nobuhiro Matsushita: "Preparation and Characteristics of Co-Zn Ferrite Rigid Disks without Protective Layers for High Density Recording" IEEE Trans.on Magn.MAG34巻・4号. 1639-1641 (1998)

[文献書誌] Sadao Kadokura: "Nano-size Magnetic Crystallite Formation in Co-Cr Thin Films for Perpendicular Recording Media" IEEE Trans.on Magn.MAG34巻・4号. 1642-1644 (1998)

[文献書誌] Kohki Noda: "Deposition of High-Durability Protective Layers with a Composite Structure of DLC and GLC by Facing-Targets Sputtering" IEEE Trans.on Magn.MAG34巻・4号. 1750-1752 (1998)

[文献書誌] Nobuhiro Matsushita: "Control of Magnetocrystalline Anisotropy of Co-Zn Ferrite Sputtered Films" Journal of the Magnetics Society of Japan. 22,[S1]. 117-119 (1998)

[文献書誌] Kenji Noma: "Control of Microcrystal Structure of BaM Ferrite Films with Perpendicular Magnetic Anisotropy Deposited Using Plasma-Free Sputtering System" Journal of the Magnetics Society of Japan. 22,[S1]. 120-122 (1998)

[文献書誌] Tomoyoshi Siosawa: "Preparation of Ba Ferrite Film with Well c-axis Orientation Using Pt Underlayer" Journal of the Magnetics Society of Japan. 22,[S1]. 123-125 (1998)

[文献書誌] Tatsuo Namikawa: "Crystal Structure and Magnetic Characteristics of(La,Sr)MnO_3 Films Deposited by Kr Sputtering" Journal of the Magnetics Society of Japan. 22,[S1]. 203-205 (1998)

[文献書誌] 松下伸広: "垂直磁気記録用高保持力・大角形比Baフェライト薄膜" 日本応用磁気学会誌. 22,[S3]. 27-31 (1998)

[文献書誌] 松下伸広: "Baフェライト磁気ディスクの低温作製と記録再生特性" 日本応用磁気学会誌. 22,[4-2]. 229-232 (1998)

[文献書誌] 中川茂樹: "スパッタ法による磁性膜作製におけるガス種の検討" 表面技術. 49巻10号. 1078-1082 (1998)

[文献書誌] Jie Feng: "Al Substituted Ba Ferrite Films with High Coercivity and Excellent Squareness for Low Noise Perpendicular Recording Layer" Journal of Applied Physics. 85巻・8号(掲載予定). (1999)

[文献書誌] Shigeki Nakagawa: "Ultra-Thin Si Buffer Layers to Imptove the Exchange Bias Between Ni-Fe and Fe-Mn Layers" Journal of Applied Physics. 85巻・8号(掲載予定). (1999)

[文献書誌] Shigeki Nakagawa: "Study of Magnetization Reversal Mechanism of Very Thin Film with Perpendicular Magnetic Anisotropy by Means of the Anomalous Hall Effect" Journal of Applied Physics. 85巻・8号(掲載予定). (1999)

[文献書誌] Yasuyoshi Miyamoto: "Effects of Ion Bombardment to Interfaces on Residual Internal Stress and Crystallite Structure of Multilayered Films" Vacuum. (掲載予定). (1999)

[文献書誌] Takayuki Ichihara: "Analysis of Stray Magnetic Field at the Substrate and Effect of Applying External Magnetic Field in Facing Targets Sputtering" Vacuum. (掲載予定). (1999)

[文献書誌] Nobuhiro Matsushita: "Plasma Diagnosis and Low-Substrate-Temperature Deposition of Ba Ferrite Films in a Damage-Free Sputtering Apparatus with Mixed Gases" Vacuum. (掲載予定). (1999)

[文献書誌] Masahiko Naoe: "Preparation of Co-Cr-Ta Films with Nano-Size Magnetic Domains for 1000 kfci Media" J.Magn.Magn.Materials. (掲載予定). (1999)

[文献書誌] Jie Feng: "Effect of Al Substitution for Fe in Ba Ferrite Thin Films" J.Magn.Magn.Materials. (掲載予定). (1999)

[文献書誌] Nobuhiro Matsushita: "Co-Zn Ferrite Films Prepared by Facing Targets Sputtering System for Longitudinal Recording Layer" J.Magn.Magn.Materials. (掲載予定). (1999)

[文献書誌] Nobuhiro Matsushita: "Relationship Between Coercivity and Deposition Conditions of Ba Ferrite Films Prepared by Facing Targets Sputtering Apparatus" J.Magn.Magn.Materials. (掲載予定). (1999)

[文献書誌] Nobuhiro Matsushita: "Relationship Between Coercivity and Deposition Conditions of Ba Ferrite Films Prepared by Facing Targets Sputtering Apparatus" J.Magn.Magn.Materials. (掲載予定). (1999)

[文献書誌] Shigeki Nakagawa: "Study of Initial Growth Region of Co_<83>Cr_<17> in Co_<83>Cr_<17>/Co_<67>Cr_<33>/Cr Trilayered Films for Longitudinal Recording Media" J.Magn.Magn.Materials. (掲載予定). (1999)

[文献書誌] 一瀬 誠: "PtおよびAu下地層を使用したBaフェライト薄膜の作製" 日本応用磁気学会誌. (掲載予定). (1999)

[文献書誌] 馮 潔: "Al置換BaMフェライト薄膜の磁気特性" 日本応用磁気学会誌. (掲載予定). (1999)

1998 年度実績報告書

直江正彦東京工業大学, 工学部, 教授 (40016465)

[文献書誌] 一瀬誠: "PtおよびAu下地層を使用したBaフェライト薄膜の作製" 日本応用磁気学会誌. (掲載予定). (1999)

[文献書誌] 馮潔: "Al置換BaMフェライト薄膜の磁気特性" 日本応用磁気学会誌. (掲載予定). (1999)