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[文献書誌] M.Nagatsu: "Production and Control of Low-Pressure Ar and CF_4 Plasmas Using Surface Waves" Jpn.J.Appl.Phys.(発表予定). (1998)
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[文献書誌] M.Nagatsu: "Production and Control of Large-Diameter Surface Wave Plasmas" Plasma Sources Sci.Technol.(発表予定). (1998)
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[文献書誌] M.Nagatsu: "Mode Identification of Surface Wave Excited in a Planar Microwave Discharge Plasma" Plasma Sources Sci.Technol.Vol.6. 427-434 (1997)
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[文献書誌] M.Nagatsu: "production and Control of Large-Diameter Surface Wave Plasmas" Proc.13th Int.Symp.on Plasma Chemistry. Vol.1. 423-425 (1997)
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[文献書誌] M.Nagatsu: "Time and Space Resolved Measurements of Pulse-Modulated, Planar Surface-Wave Plasma" Proc.3rd Int.Conf.on Reactive Plasma and 14th Symp.on Plasma Processing,. 395-396 (1997)
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[文献書誌] M.Nagatsu: "Production and Control of Low-Pressure CF_4 Plasmas Using Surface Waves" Proc.19th Dry Process Symposium. 103-108 (1997)
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[文献書誌] H.Sugai: "High-Density Flat Plasma Production Based on Surface Waves" Plasma Sources Sci.Technol.(発表予定). (1998)
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[文献書誌] H.Sugai: "Large-Diameter Plasma Production Based on Surface Waves" Proc.3rd Int.Conf.on Reactive Plasma and 14th Symp.on Plasma Processing. 19-20 (1997)
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[文献書誌] H.Sugai: "Diagnostics for Advanced Plasma Control of Materials Processing" Plasma Phys.and Contr.Fusion. Vol.39 No.5A. 445-458 (1997)
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[文献書誌] H.Sugai: "High-Density Plasma Generation by Surface Waves Excited on Metal-Plasma Interface" Abstract 50th Annual Gaseous Electronics Conferenece. (1997)
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[文献書誌] I.Ghanashev: "Surface Wave Eigenmodes in a Finite-Area Plane Microwave Plasma" Jpn.J.Appl.Phys.Vol.36, No1A. 337-344 (1997)
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[文献書誌] I.Ghanashev: "Mode Jumps and Hysteresis in Surface-Wave Sustained Microwave Discharges" Jpn.J.Appl.Phys.Vol.36, No7B. 4704-4710 (1997)
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[文献書誌] I.Ghanashev: "High-and Low-Density Modes in a Large-Area Surface-WaveSustained Plasma Source" Abstract 50th Annual Gaseous Electronics Conferenece. (1997)
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[文献書誌] I.Ghanashev: "Large Area High Density Plasma Excitation Using Standing Pure and Hybrid Surface Waves" J.Vac.Sci.Technol.(発表予定). (1998)
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[文献書誌] K.Suzuki: "Control of High-Density Plasma Sources for CVD and Etching" Vacuum. Vol.48, No7-9. 659-664 (1997)