1999 年度実績報告書

機能性酸化物高度プロセス研究

研究課題

研究課題/領域番号	10142103
研究機関	東京工業大学
研究代表者	小田俊理東京工業大学, 量子効果エレクトロニクス研究センター, 教授 (50126314)
研究分担者	後藤俊成電気通信大学, 電気通信学部, 教授 (70017333) 寺島孝仁京都大学, 化学研究所, 助教授 (40252506) 小林猛大阪大学, 大学院・基礎工学研究科, 教授 (80153617) 道上修岩手大学, 工学部, 教授 (90261461)
キーワード	酸化物超伝導体 / MOCVD法 / その場結晶成長観察 / エクリプスオーロラPLD / 磁性体 / 超伝導接合 / サファイアバイクリスタル / 大型サファイア基板
研究概要	1.分光エリプソメトリを用いてMOCVDによるYBCO薄膜の初期成長過程を精密にモニターし、異相不純物の析出を抑える方法を開発した。また、GaをYBCO中のCu-O鎖部分に選択的に置換して酸素拡散を低減させ、超伝導特性を安定化する方法を提案した。 2.オーロラPLD法において磁界印加方向を変えた場合のプラズマプルームの挙動を調べた。さらに高温超伝導SQUIDによる心磁信号のウェーブレット解析を用いてノイズの除去を行う方法を開発した。 3.サファイアバイクリスタル基板を用いて粒界接合を試作した結果良好なジョセフソン特性が得られ、94GHzのミリ波照射に対して15次までのステップ(1.4THz相当)が観測された。 4.活性化酸素プラズマを用いて、素子作製プロセス中で劣化した高温超伝導薄膜の特性回復に効果があることを見いだした。 5.ジョセフソンプラズマを励起可能な高品質結晶Bi-2212系をレーザーアブレーション法で形成するために種々の方法で作製したターゲットと得られる薄膜の特性との関係を明らかにした。

研究成果

(29件)

すべてその他

すべて文献書誌 (29件)

[文献書誌] S. Yamamoto, K. Nagata, S. Sugai, A. Sengoku, Y. Matsukawa, T. Hattori and S. Oda: "Reproducible Growth of metalorganic Chemical Vapor Depostion Derived YBa2Cu3Ox Thinfilms Using Ultrasonic Gas Concentration Analyzer"Japanese Journal of Applied Physics. 38 (8). 4727-4732 (1999)
[文献書誌] S. Yamamoto, S. Sugai, Y. Matsukawa, A. Sengoku, H. Tobisaka, T. Hattori and S. Oda: "In situ growth monitoring during metalorganic chemical vapor depostion of YBa2Cu3Ox thimfilms by spectroscopic ellipsometry"Japanese Journal of Applied Physics. 38 (6AB). L632-L635 (1999)
[文献書誌] S. Yamamoto, S. Sugai and S. Oda: "In situ process monitoring of MOCVD of supercondcting and dielectric oxide thimfilms"Jornal de Physique IV. 9. 1013-1020 (1999)
[文献書誌] X. Fang, M. Tachiki and T. Kobayashi: "Preparation of SrRuO3 thin films by chemical reactive pulsee laser deposition"Thin Solid Films. (1999)
[文献書誌] M. Sugiura, M. Tachiki, K. Uragou, Y. Furukawa and M. Nomura and T. Kobayashi: "Highly Smooth Surface of Perovskite-Type Oxide Thin Films Grown by Advanced Laser Ablation Method"Int. Conf. on Perfect Surface. (1999)
[文献書誌] M. Tachiki and T. Kobayashi: "Manipulation of Laser Ablation Plume by Mgnetic Field Application"Jpn. J. Appl. Phys.. 38 (6A). 3642-3645 (1999)
[文献書誌] X. Fang, M. Tachiki and T. Kobayashi: "Preparation of SrRuO3 thin films by chemical reactive pulsed laser deposition"1999 Asian CVD Conf. (Invited Paper). (1999)
[文献書誌] T. Kobayashi, M. Tachiki and C. Cai: "Proposal of new PLD "Eclopse-Aurora Method2 and Its Application to NiO/YBCO Josephson Junction Formation Suitalbe for Low-Noise SQUID"Int. Supercon. Electromics Conf.. 497-499 (1999)
[文献書誌] T. Kobayashi, M. Tachiki, C. Cai and M. Sugiura: "PLD Growth of Insulator/Oxide-Superconductor Heterostructures for Josephson Junction Formation"Future Electron Device HYSC Final Meeting. (1998)
[文献書誌] T. Fujii, T. Kiwa, M. Tonouchi, M. Hangyo and T. Kobayashi: "Improved S/N-ratio of High Tc SQUID Magnetcardiometer due to Anisotropic Collection of Magnetic Flux by High-mu Platelet Spacer"Appl. Supercon. Conf.. (1998)
[文献書誌] M. Tachiki and T. Kobayashi: "Investigation of excier laser ablation ofRuO2 by streak camera observation"J. Appl. Phys.. 85 (4). 2402-2407 (1998)
[文献書誌] M. Tachiki, M. Noda, K. Yamada and T. Kobayashi: "SrTiO3 films epitaxially grown by eclipse pulsed laser deposition and their electrical characterization"J. Appl. Phys.. 83. 5351-5356 (1998)
[文献書誌] T. Kudo, M. Tachiki, T. Kashiwai and T. Kobayashi: "Band Diagram of Metal-Insulator-Magnetic Semiconductor (La0.85Sr0.15MnO3) Structure at Room Temperature"J. Appl. Phys.. 37. L999-L1001 (1998)
[文献書誌] M. Sugiura, K. Urago, M. Noda, M. Tachiki and T. Kobayashi: "First Demonstration of Rectifying Property of P-I-N Heterojunctions Fabricated by Tri-Layered Semiconducting Oxides"J. Appl. Phys.. 38 (4B). 2675-2678 (1998)
[文献書誌] T. Goto, T. Kuji, Y.S. Jiang, M. Moriya, K. Usami and T. Kobayashi: "Preparation of YBCO films on sapphire with CeO2 Deposited by ion beam sputtering"IEEE Trans. on Applied Superconductivity. 9 (2). 1653-1656 (1999)
[文献書誌] Y.S. Jiang, T. Kobayashi and T. Goto: "Preparation of a-ais oritented YBCO film on CeO2 Buffered sapphire substrate"IEEE Trans. on Applied Superconductivity. 9 (2). 1657-1660 (1999)
[文献書誌] M. Moriya, T. Okamoto, K. Usami, T. Goto and T. Kobayashi: "Properties of Bi-Sr-Ca-Cu-O (2212) films deposited by sputtering on tilted substrates"IEEE Trans. on Applied Superconductivity. 9 (2). 2380-2382 (1999)
[文献書誌] N. Ishikawa, Y. Chimi, A. Iwase, H. Maeta, K. Tsruru, O. Michikami, T. Kambara, T. Mitamura, Y. Awaya and M. Terasawa: "Electronic excitation effects in ion-irradiated high-Tc superconductors"Nucl. Instr. and Meth. in Phys. Res.. 135. 184-189 (1999)
[文献書誌] A. Iwase, N. Ishikawa, Y. Chimi, K. Tsuru, H. Wakana, O. Michikami and T. Kambara: "High energy heavy ion irradation damage in oxide superconductor EuBa2Cu3Oy"Nucl. Instr. and Meth. in Phys. Res.. 146. 557-564 (1998)
[文献書誌] N. Ishikawa, Y. Chimi, A. Iwase, K. Tsuru and O. Michikami: "Defect production and recovery in high-Tc superconductors irradiated with electrons and ions at low temperature"J. Nucl. Mater.. 258-263. 1924-1928 (1998)
[文献書誌] K. Kawabata, S. Tsukui, Y. Shono, O. Michikami, H. Sasakura, K. Yoshiara, Y. Kakehi and T. Yotsuya: "Detection of a coherent boson curent in the normalstate of a high-tempeture siuperconductor YBa2Cu3Oy film patterned to micrometer-sized rings"Phys. Rev. B. 58 (5). 2458-2461 (1998)
[文献書誌] N. Ishikawa, Y. Chimi, A. Iwase, H. Wakana and O. Michikami: "Irradiation Temperaure Dependence of Swift Heavy Ion Induced Defects in Oxide Superconductor EuBa2Cu3Oy"Int. Conf. on Atomic Collision in Solid 18 (Aug. 3-8, Odense). (1999)
[文献書誌] H. Wakana, T. Hashimoto, S. Kikuchi and O. Michikami: "Preparation of high-Tc c-axis oriented EBCO thin films on R-sapphires with CeO2/PBCO buffer layers using DC magnetron sputtering"12th Int. Symp. on Super, (ISS '99) (Oct. 17-19, Morioka). (1999)
[文献書誌] T. Hashimoto, H. Muto, H. Wakana, H. Saitou and O. Michikami: "Preparation of high-Tc c-axis oriented EBCO thin films on Si substrates with buffer layers using DC magnetron sputtering"12th Int. Symp. on Super. (ISS '99) (Oct. 17-19, Morioka). (1999)
[文献書誌] H. Wakana, A. Yokosawa and O. Michikami: "Non-c axis oriented EuBa2Cu3Oy thin films grown on Al2O3 (1102) substrates with CeO2 buffer layers"Jpn. J. Appl. Phys.. 38 (10). (1999)
[文献書誌] O. Michikami, H. Wakana and K. Atsumi: "Recovery treatment of EuBa2Cu3Oy thin films with activated oxygen plasma"Jpn. J. Appl. Phys.. in press (2000)
[文献書誌] Y. Furubayashi, T. Terashima, I. Chong, M. Takano, K. Yagi, S. Shima and H. Terauchi: "Epitaxial growth of single-crystlline thin film of Ca14 Cu24 O41 : A heavily hole-doped two-legged spin ladder"Phys. Rev. B. 60. R3720-3723 (1999)
[文献書誌] T. Nagaoka, Y. Matsuda, H. Obara, A. Sawa, T. Terashima, I. Chong, M. Takano and M. Suzuki: "Hall Anomaly in the Superconduncting State of High-Tc Cuprates : Universality in Doping Dependence"Phys. Rev. Lett.. 80. 3594-3597 (1998)
[文献書誌] S. Oda, S. Yamamoto, Z. Wang, H. Tobisaka and K. Nagata: "High-Temperature Superconductors and Novel Inorganic Materials"NATO ASI Series 3, vol. 62 (eds. by G. van Tendeloo, E.V. Antipov and S.N. Putilin, Kluwer Academic, (Dordorecht). 75-78 (1999)

1999 年度 実績報告書

機能性酸化物高度プロセス研究

研究代表者

小田 俊理 東京工業大学, 量子効果エレクトロニクス研究センター, 教授 (50126314)

研究成果

[文献書誌] S. Yamamoto, K. Nagata, S. Sugai, A. Sengoku, Y. Matsukawa, T. Hattori and S. Oda: "Reproducible Growth of metalorganic Chemical Vapor Depostion Derived YBa2Cu3Ox Thinfilms Using Ultrasonic Gas Concentration Analyzer"Japanese Journal of Applied Physics. 38 (8). 4727-4732 (1999)

[文献書誌] S. Yamamoto, S. Sugai, Y. Matsukawa, A. Sengoku, H. Tobisaka, T. Hattori and S. Oda: "In situ growth monitoring during metalorganic chemical vapor depostion of YBa2Cu3Ox thimfilms by spectroscopic ellipsometry"Japanese Journal of Applied Physics. 38 (6AB). L632-L635 (1999)

[文献書誌] S. Yamamoto, S. Sugai and S. Oda: "In situ process monitoring of MOCVD of supercondcting and dielectric oxide thimfilms"Jornal de Physique IV. 9. 1013-1020 (1999)

[文献書誌] X. Fang, M. Tachiki and T. Kobayashi: "Preparation of SrRuO3 thin films by chemical reactive pulsee laser deposition"Thin Solid Films. (1999)

[文献書誌] M. Sugiura, M. Tachiki, K. Uragou, Y. Furukawa and M. Nomura and T. Kobayashi: "Highly Smooth Surface of Perovskite-Type Oxide Thin Films Grown by Advanced Laser Ablation Method"Int. Conf. on Perfect Surface. (1999)

[文献書誌] M. Tachiki and T. Kobayashi: "Manipulation of Laser Ablation Plume by Mgnetic Field Application"Jpn. J. Appl. Phys.. 38 (6A). 3642-3645 (1999)

[文献書誌] X. Fang, M. Tachiki and T. Kobayashi: "Preparation of SrRuO3 thin films by chemical reactive pulsed laser deposition"1999 Asian CVD Conf. (Invited Paper). (1999)

[文献書誌] T. Kobayashi, M. Tachiki and C. Cai: "Proposal of new PLD "Eclopse-Aurora Method2 and Its Application to NiO/YBCO Josephson Junction Formation Suitalbe for Low-Noise SQUID"Int. Supercon. Electromics Conf.. 497-499 (1999)

[文献書誌] T. Kobayashi, M. Tachiki, C. Cai and M. Sugiura: "PLD Growth of Insulator/Oxide-Superconductor Heterostructures for Josephson Junction Formation"Future Electron Device HYSC Final Meeting. (1998)

[文献書誌] T. Fujii, T. Kiwa, M. Tonouchi, M. Hangyo and T. Kobayashi: "Improved S/N-ratio of High Tc SQUID Magnetcardiometer due to Anisotropic Collection of Magnetic Flux by High-mu Platelet Spacer"Appl. Supercon. Conf.. (1998)

[文献書誌] M. Tachiki and T. Kobayashi: "Investigation of excier laser ablation ofRuO2 by streak camera observation"J. Appl. Phys.. 85 (4). 2402-2407 (1998)

[文献書誌] M. Tachiki, M. Noda, K. Yamada and T. Kobayashi: "SrTiO3 films epitaxially grown by eclipse pulsed laser deposition and their electrical characterization"J. Appl. Phys.. 83. 5351-5356 (1998)

[文献書誌] T. Kudo, M. Tachiki, T. Kashiwai and T. Kobayashi: "Band Diagram of Metal-Insulator-Magnetic Semiconductor (La0.85Sr0.15MnO3) Structure at Room Temperature"J. Appl. Phys.. 37. L999-L1001 (1998)

[文献書誌] M. Sugiura, K. Urago, M. Noda, M. Tachiki and T. Kobayashi: "First Demonstration of Rectifying Property of P-I-N Heterojunctions Fabricated by Tri-Layered Semiconducting Oxides"J. Appl. Phys.. 38 (4B). 2675-2678 (1998)

[文献書誌] T. Goto, T. Kuji, Y.S. Jiang, M. Moriya, K. Usami and T. Kobayashi: "Preparation of YBCO films on sapphire with CeO2 Deposited by ion beam sputtering"IEEE Trans. on Applied Superconductivity. 9 (2). 1653-1656 (1999)

[文献書誌] Y.S. Jiang, T. Kobayashi and T. Goto: "Preparation of a-ais oritented YBCO film on CeO2 Buffered sapphire substrate"IEEE Trans. on Applied Superconductivity. 9 (2). 1657-1660 (1999)

[文献書誌] M. Moriya, T. Okamoto, K. Usami, T. Goto and T. Kobayashi: "Properties of Bi-Sr-Ca-Cu-O (2212) films deposited by sputtering on tilted substrates"IEEE Trans. on Applied Superconductivity. 9 (2). 2380-2382 (1999)

[文献書誌] N. Ishikawa, Y. Chimi, A. Iwase, H. Maeta, K. Tsruru, O. Michikami, T. Kambara, T. Mitamura, Y. Awaya and M. Terasawa: "Electronic excitation effects in ion-irradiated high-Tc superconductors"Nucl. Instr. and Meth. in Phys. Res.. 135. 184-189 (1999)

[文献書誌] A. Iwase, N. Ishikawa, Y. Chimi, K. Tsuru, H. Wakana, O. Michikami and T. Kambara: "High energy heavy ion irradation damage in oxide superconductor EuBa2Cu3Oy"Nucl. Instr. and Meth. in Phys. Res.. 146. 557-564 (1998)

[文献書誌] N. Ishikawa, Y. Chimi, A. Iwase, K. Tsuru and O. Michikami: "Defect production and recovery in high-Tc superconductors irradiated with electrons and ions at low temperature"J. Nucl. Mater.. 258-263. 1924-1928 (1998)

[文献書誌] K. Kawabata, S. Tsukui, Y. Shono, O. Michikami, H. Sasakura, K. Yoshiara, Y. Kakehi and T. Yotsuya: "Detection of a coherent boson curent in the normalstate of a high-tempeture siuperconductor YBa2Cu3Oy film patterned to micrometer-sized rings"Phys. Rev. B. 58 (5). 2458-2461 (1998)

[文献書誌] N. Ishikawa, Y. Chimi, A. Iwase, H. Wakana and O. Michikami: "Irradiation Temperaure Dependence of Swift Heavy Ion Induced Defects in Oxide Superconductor EuBa2Cu3Oy"Int. Conf. on Atomic Collision in Solid 18 (Aug. 3-8, Odense). (1999)

[文献書誌] H. Wakana, T. Hashimoto, S. Kikuchi and O. Michikami: "Preparation of high-Tc c-axis oriented EBCO thin films on R-sapphires with CeO2/PBCO buffer layers using DC magnetron sputtering"12th Int. Symp. on Super, (ISS '99) (Oct. 17-19, Morioka). (1999)

[文献書誌] T. Hashimoto, H. Muto, H. Wakana, H. Saitou and O. Michikami: "Preparation of high-Tc c-axis oriented EBCO thin films on Si substrates with buffer layers using DC magnetron sputtering"12th Int. Symp. on Super. (ISS '99) (Oct. 17-19, Morioka). (1999)

[文献書誌] H. Wakana, A. Yokosawa and O. Michikami: "Non-c axis oriented EuBa2Cu3Oy thin films grown on Al2O3 (1102) substrates with CeO2 buffer layers"Jpn. J. Appl. Phys.. 38 (10). (1999)

[文献書誌] O. Michikami, H. Wakana and K. Atsumi: "Recovery treatment of EuBa2Cu3Oy thin films with activated oxygen plasma"Jpn. J. Appl. Phys.. in press (2000)

[文献書誌] Y. Furubayashi, T. Terashima, I. Chong, M. Takano, K. Yagi, S. Shima and H. Terauchi: "Epitaxial growth of single-crystlline thin film of Ca14 Cu24 O41 : A heavily hole-doped two-legged spin ladder"Phys. Rev. B. 60. R3720-3723 (1999)

[文献書誌] T. Nagaoka, Y. Matsuda, H. Obara, A. Sawa, T. Terashima, I. Chong, M. Takano and M. Suzuki: "Hall Anomaly in the Superconduncting State of High-Tc Cuprates : Universality in Doping Dependence"Phys. Rev. Lett.. 80. 3594-3597 (1998)

[文献書誌] S. Oda, S. Yamamoto, Z. Wang, H. Tobisaka and K. Nagata: "High-Temperature Superconductors and Novel Inorganic Materials"NATO ASI Series 3, vol. 62 (eds. by G. van Tendeloo, E.V. Antipov and S.N. Putilin, Kluwer Academic, (Dordorecht). 75-78 (1999)

1999 年度実績報告書

小田俊理東京工業大学, 量子効果エレクトロニクス研究センター, 教授 (50126314)